Development of a Cantilever-Type Electrostatic Energy Harvester and Its Charging Characteristics on a Highway Viaduct
Saginomiya Seisakusho, Inc., 535 Sasai, Sayama, Saitama 350-1395, Japan
Institute of Industrial Science, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan
Department of Mechanical Engineering, Shizuoka University, 3-5-1 Jyouhoku, Naka-ku, Hamamatsu, Shizuoka 432-8011, Japan
These authors contributed equally to this work.
Author to whom correspondence should be addressed.
Received: 11 August 2017 / Revised: 8 September 2017 / Accepted: 14 September 2017 / Published: 28 September 2017
We have developed a micro-electro-mechanical systems (MEMS) electrostatic vibratory power generator with over 100
of (root-mean-square) output electric power under 0.03 G
(G: the acceleration of gravity) accelerations. The device is made of a silicon-on-insulator (SOI) wafer and is fabricated by silicon micromachining technology. An electret built-in potential is given to the device by electrothermal polarization in silicon oxide using potassium ions. The force factor, which is defined by a proportional coefficient of the output current with respect to the vibration velocity, is 2.34 × 10
C/m; this large value allows the developed vibration power generator to have a very high power efficiency of 80.7%. We have also demonstrated a charging experiment by using an environmental acceleration waveform with an average amplitude of about 0.03 G
taken at a viaduct of a highway, and we obtained 4.8 mJ of electric energy stored in a 44
F capacitor in 90 min.
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Koga, H.; Mitsuya, H.; Honma, H.; Fujita, H.; Toshiyoshi, H.; Hashiguchi, G. Development of a Cantilever-Type Electrostatic Energy Harvester and Its Charging Characteristics on a Highway Viaduct. Micromachines 2017, 8, 293.
Koga H, Mitsuya H, Honma H, Fujita H, Toshiyoshi H, Hashiguchi G. Development of a Cantilever-Type Electrostatic Energy Harvester and Its Charging Characteristics on a Highway Viaduct. Micromachines. 2017; 8(10):293.
Koga, Hideaki; Mitsuya, Hiroyuki; Honma, Hiroaki; Fujita, Hiroyuki; Toshiyoshi, Hiroshi; Hashiguchi, Gen. 2017. "Development of a Cantilever-Type Electrostatic Energy Harvester and Its Charging Characteristics on a Highway Viaduct." Micromachines 8, no. 10: 293.
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