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Micromachines 2017, 8(10), 296;

Structural Analysis of Disk Resonance Gyroscope

Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China
Author to whom correspondence should be addressed.
Received: 27 July 2017 / Revised: 9 September 2017 / Accepted: 29 September 2017 / Published: 30 September 2017
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In this paper, we present two design methods to improve the performance of disk resonator gyroscope (DRG), including decreasing the frequency split and increasing the quality factor (Q). The structure parameters, which can affect the frequency split and Q value were concluded with the help of the FEM software. Meanwhile, devices with different parameters were designed, fabricated, and tested, and the experimental result was in accordance with the simulation. With the proposed methods, the DRG was selected with a high Q value and a low frequency split to satisfy the demand of high performance. The weakness and future works were pointed at last. View Full-Text
Keywords: disk resonator gyroscope (DRG); quality factor (Q); finite element method (FEM); frequency split disk resonator gyroscope (DRG); quality factor (Q); finite element method (FEM); frequency split

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Xia, D.; Huang, L.; Xu, L.; Gao, H. Structural Analysis of Disk Resonance Gyroscope. Micromachines 2017, 8, 296.

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