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Micromachines 2017, 8(10), 301;

AlN-Based Ceramic Patch Antenna-Type Wireless Passive High-Temperature Sensor

Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China
Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China
Taiyuan Research Institute Co., Ltd., China Coal Technology and Engineering Group Corporation, Taiyuan 030006, China
North Automatic Control Technology Research Institute, Taiyuan 030051, China
National Demonstration Center for Experimental Chemical Engineering Comprehensive Education, North University of China, Taiyuan, 030051, China
Authors to whom correspondence should be addressed.
Received: 22 September 2017 / Revised: 5 October 2017 / Accepted: 5 October 2017 / Published: 10 October 2017
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An aluminum nitride (AlN) based patch antenna-type high-temperature wireless passive sensor is reported to operate as both a sensor and an antenna, which integrates in situ measurement/sensing with remote wireless communication at the same time. The sensor is small, easy to manufacture, highly sensitive and has a high operating temperature; it can be used in high-temperature, chemically corrosive and other harsh environments. The sensing mechanism of the sensor, the dielectric constant of the AlN ceramic substrate, increases with rising temperature, which reduces the resonant frequency of the sensor. Thus, the temperature can be measured by detecting changes in the sensor’s resonant frequency. High-Frequency Simulation Structure (HFSS) software is used to determine the structure and size of the sensor, which is then fabricated using thick-film technology. The substrate of the sensor is AlN ceramic due to its outstanding thermal resistance at high temperature; and its conductors (the radiation patch and the ground under the substrate) are silver-palladium alloy sintered form silver–palladium paste. A vector network analyzer reveals that the sensor’s operating range extends to 700 °C. Furthermore, its resonant frequency decreases from 2.20 GHz to 2.13 GHz with increasing temperature from room temperature (25 °C) to 700 °C, with an absolute sensitivity of 104.77 KHz/°C. Our work verifies the feasibility of measuring high temperatures using AlN-based patch antenna wireless passive temperature sensors, and provides a new material and temperature sensitive structure for high-temperature measurement in harsh environments. View Full-Text
Keywords: high-temperature environment; patch antenna temperature sensor; passive wireless; dielectric constant high-temperature environment; patch antenna temperature sensor; passive wireless; dielectric constant

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Yan, D.; Yang, Y.; Hong, Y.; Liang, T.; Yao, Z.; Chen, X.; Xiong, J. AlN-Based Ceramic Patch Antenna-Type Wireless Passive High-Temperature Sensor. Micromachines 2017, 8, 301.

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