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Micromachines 2017, 8(10), 287;

Milling Positive Master for Polydimethylsiloxane Microfluidic Devices: The Microfabrication and Roughness Issues

Key Laboratory of Biorheological Science and Technology, Ministry of Education, Bioengineering College of Chongqing University, Chongqing 400044, China
Author to whom correspondence should be addressed.
Received: 3 August 2017 / Revised: 12 September 2017 / Accepted: 18 September 2017 / Published: 21 September 2017
(This article belongs to the Special Issue Polymer Based MEMS and Microfabrication)
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We provide a facile and low-cost method (F-L) to fabricate a two-dimensional positive master using a milling technique for polydimethylsiloxane (PDMS)-based microchannel molding. This method comprises the following steps: (1) a positive microscale master of the geometry is milled on to an acrylic block; (2) pre-cured PDMS is used to mold the microscale positive master; (3) the PDMS plate is peeled off from the master and punctured with a blunt needle; and (4) the PDMS plate is O2 plasma bonded to a glass slide. Using this technique, we can fabricate microchannels with very simple protocols quickly and inexpensively. This method also avoids breakage of the end mill (ϕ = 0.4 mm) of the computerized numerical control (CNC) system when fabricating the narrow channels (width < 50 µm). The prominent surface roughness of the milled bottom-layer could be overcomed by pre-cured PDMS with size trade-off in design. Finally, emulsion formation successfully demonstrates the validity of the proposed fabrication protocol. This work represents an important step toward the use of a milling technique for PDMS-based microfabrication. View Full-Text
Keywords: microchannel; microfluidic; milling; acrylic; emulsions; polydimethylsiloxane (PDMS) microchannel; microfluidic; milling; acrylic; emulsions; polydimethylsiloxane (PDMS)

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Zhou, Z.; Chen, D.; Wang, X.; Jiang, J. Milling Positive Master for Polydimethylsiloxane Microfluidic Devices: The Microfabrication and Roughness Issues. Micromachines 2017, 8, 287.

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