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Micromachines 2017, 8(10), 308;

A Fluidic Interface with High Flow Uniformity for Reusable Large Area Resonant Biosensors

FEMTO-ST Institute, Univ. Bourgogne Franche-Comté, CNRS, 15B avenue des Montboucons, 25030 Besançon, CEDEX, France
Institute for Interdisciplinary Innovations in Technology (3IT), Faculty of Engineering, Université de Sherbrooke, 3000 Boulevard de l’Université, Sherbrooke, QC J1K OA5, Canada
Author to whom correspondence should be addressed.
Received: 16 August 2017 / Revised: 6 October 2017 / Accepted: 11 October 2017 / Published: 14 October 2017
(This article belongs to the Special Issue Biomedical Microfluidic Devices)
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Resonant biosensors are known for their high accuracy and high level of miniaturization. However, their fabrication costs prevent them from being used as disposable sensors and their effective commercial success will depend on their ability to be reused repeatedly. Accordingly, all the parts of the sensor in contact with the fluid need to tolerate the regenerative process which uses different chemicals (H3PO4, H2SO4 based baths) without degrading the characteristics of the sensor. In this paper, we propose a fluidic interface that can meet these requirements, and control the liquid flow uniformity at the surface of the vibrating area. We study different inlet and outlet channel configurations, estimating their performance using numerical simulations based on finite element method (FEM). The interfaces were fabricated using wet chemical etching on Si, which has all the desirable characteristics for a reusable biosensor circuit. Using a glass cover, we could observe the circulation of liquid near the active surface, and by using micro-particle image velocimetry (μPIV) on large surface area we could verify experimentally the effectiveness of the different designs and compare with simulation results. View Full-Text
Keywords: microengineering; planar flow; fluidic interface; micro-machining; biosensor microengineering; planar flow; fluidic interface; micro-machining; biosensor

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Azzopardi, C.-L.; Lacour, V.; Manceau, J.-F.; Barthès, M.; Bonnet, D.; Chollet, F.; Leblois, T. A Fluidic Interface with High Flow Uniformity for Reusable Large Area Resonant Biosensors. Micromachines 2017, 8, 308.

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