15 Results Found

This study demonstrates room-temperature bonding using a getter layer for the vacuum packaging of microsystems. A thick Ti layer covered with an Au layer is utilized as a getter layer because it can absorb gas molecules in the package. Additionally,...

In order to achieve and maintain a high quality factor (high-Q) for the micro resonant pressure sensor, this paper presents a new wafer level package by adopting cross-layer anodic bonding technique of the glass/silicon/silica (GSS) stackable structu...

Improving the vacuum degree inside the vacuum device is vital to the performance and lifespan of the vacuum device. The influence of the Ti and ZrCoCe barrier layers on the performance of ZrCoCe getter films, including sorption performance, anti-vibr...

Mastering non-evaporable getter (NEG) thin films by elucidating their activation mechanisms and predicting their sorption performances will contribute to facilitating their integration into micro-electro-mechanical systems (MEMS). For this aim, thin...

Using a new implantation technique with multielement molecular ions consisting of carbon, hydrogen, and phosphorus, namely, CH₂P molecular ions, we developed an epitaxial silicon wafer with proximity gettering sinks under the epitaxial silicon layer...

A MEMS thin-film getter–heater unit has been previously proposed for the vacuum packaging of a Micro-Electro-Mechanical System (MEMS) device, where the floating structure (FS) design is found to be obviously more power-efficient than the solid...

The impact of hydrocarbon-molecular (C₃H₆)-ion implantation in an epitaxial layer, which has low oxygen concentration, on the dark characteristics of complementary metal-oxide-semiconductor (CMOS) image sensor pixels was investigated by dark current...

The oxidation and corrosion behavior at elevated temperatures of a SiC_F/SiC(N) composite with two plasma-sprayed environmental barrier coating (EBC) systems were studied. After both processes, the formation of a silica-based thermally grown oxide (TG...

This paper reports on design, fabrication and characterization of high-Q MEMS resonators to be used in optical applications like laser displays and LIDAR range sensors. Stacked vertical comb drives for electrostatic actuation of single-axis scanners...

The vacuum chamber is an important part of microparticle optical levitation technology. The traditional vacuum chamber has a large volume and many peripheral components, which cannot meet the requirements of miniaturization and on-chip optical levita...

Porous silicon (PSi), characterized by its high specific surface area and highly tunable morphology, presents significant potential across optoelectronics, energy storage, and biomedical applications. This review provides a systematic analysis of the...

Industrial Czochralski silicon (Cz-Si) photovoltaic (PV) efficiencies have routinely reached >20% with the passivated emitter rear cell (PERC) design. Nanostructuring silicon (black-Si) by dry-etching decreases surface reflectance, allows diamond...

In this study, we report the fabrication of high quality AZO/NRs-ZnO/n-ZnO/p-GaAs heterojunction via a novel optimized design. First of all, the electrical proprieties of gallium arsenide (GaAs) substrates were enhanced via an optimized gettering tre...

Growing high-quality Si films at high rates with thicknesses ranging from the few nm- to µm-range while keeping the material consumption at a minimum is important for a wide range of Si-based technologies, spanning from batteries to sensors and...

The development of software applications using multiple programming languages has increased in recent years, as it allows the selection of the most suitable language and runtime for each component of the system and the integration of third-party libr...