Advances in Microelectronic Materials, Processes and Devices
A special issue of Applied Sciences (ISSN 2076-3417). This special issue belongs to the section "Electrical, Electronics and Communications Engineering".
Deadline for manuscript submissions: closed (31 March 2022) | Viewed by 35597

Special Issue Editor
Interests: microelectronics; semiconductor devices; electrical characterization; device modelling; reliability
Special Issues, Collections and Topics in MDPI journals
Special Issue Information
Dear Colleagues,
Silicon microelectronics is at the heart of modern electronics, finding applications in computing, data processing, data storage, communications or internet-of-things field. Its development has been guided by Moore’s law since the 70’s and is nowadays reaching its physical limits related to device dimension, integration density and complexity both in CMOS and memory technologies. To overcome these limits, new challenges have been addressed regarding new material integration for FEOL and BEOL purpose, new processes for material growth, deposition, doping, etching and patterning, new device architectures for better scalability, improved physical characterization techniques for CD metrology, advanced device and interconnect electrical characterization methodologies.
We invite researcher to contribute works on the “Advances in Microelectronic Materials, Processes and Devices” topic. Potential subjects include, but are not limited to:
- New material;
- Integration processes;
- Device architectures;
- Physical characterization and metrology;
- Electrical characterization and reliability;
Prof. Gerard Ghibaudo
Guest Editor
Manuscript Submission Information
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Keywords
- new materials (FEOL, BEOL…)
- integration processes (growth, deposition, doping, etching, patterning, lithography…)
- device architectures (bulk, thin film, nanoribbon, nanowire, 2D…)
- physical characterization and metrology
- electrical characterization and reliability
- memories (SRAM, DRAM, NVM, MRAM, ReRAM…)
- cryogenic CMOS
- beyond CMOS
- 3D VLSI
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