Micro Flow Controllers
A special issue of Micromachines (ISSN 2072-666X).
Deadline for manuscript submissions: closed (30 January 2012) | Viewed by 143529
2. Bronkhorst High-Tech BV, Nijverheidsstraat 1A, 7261 AK Ruurlo, The Netherlands
Interests: Design, modelling, fabrication and application of microfluidic handling systems, including MEMS thermal and Coriolis flow sensors and controllers, MEMS pressure sensors, MEMS control valves and micromachined flow analysis sytems such as multiparameter flow measurement systems and micro Wobbe index meters
Special Issues, Collections and Topics in MDPI journals
Worldwide, accurate measurement and control of small and extremely small mass flow rates of both gases and liquids is becoming more and more important, driven by numerous economically important applications in for instance semiconductor industry, analytical instrumentation, energy, and micro reaction systems. Accordingly, we hereby announce a special issue addressing advances in design, modeling and simulation, fabrication, and characterization of micromachined mass flow sensors and controllers. Such devices have typically critical feature size on the order of ~1-500 μm and process or design control on a microscale. We invite submission of papers on devices for accurate measurement and control of (extremely) small mass flow rates of both gases and liquids, and corresponding measurement and control principles, for instance the thermal, ultrasonic and Coriolis principles for flow measurement, and the piezo-electric, electromagnetic and electrostatic principles for flow control. Related novel systems concepts, electronic instrumentation and application proposals are acceptable contributions. Moreover, innovative methods in calibration equipment and methodology, micro- and nanomachining, device characterization, etc., are of interest.
I am looking forward to receiving your valuable contributions!
Dr. Joost Lötters
- flow sensors
- mass flow sensors
- flow controllers
- mass flow controllers
- thermal flow sensors
- Coriolis flow sensors
- ultrasonic flow sensors
- control valves
- electromagnetic actuator
- piezo-electric actuator
- electrostatic actuator