Next Article in Journal
Temperature Frequency Characteristics of Hexamethyldisiloxane (HMDSO) Polymer Coated Rayleigh Surface Acoustic Wave (SAW) Resonators for Gas-Phase Sensor Applications
Next Article in Special Issue
Hydrodynamic Flow Confinement Technology in Microfluidic Perfusion Devices
Previous Article in Journal / Special Issue
A Hybrid Thermopneumatic and Electrostatic Microvalve with Integrated Position Sensing
Open AccessArticle

Design Considerations for a Micromachined Proportional Control Valve

1
MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500AE Enschede, The Netherlands
2
Mechanical Automation and Mechatronics, University of Twente, P.O. Box 217, 7500AE Enschede, The Netherlands
3
DEMCON Advanced Mechatronics, Zutphenstraat 25, 7575EJ Oldenzaal, The Netherlands
4
Bronkhorst High-Tech B.V., Nijverheidsstraat 1A, 7261AK Ruurlo, The Netherlands
*
Author to whom correspondence should be addressed.
Micromachines 2012, 3(2), 396-412; https://doi.org/10.3390/mi3020396
Received: 6 February 2012 / Revised: 6 April 2012 / Accepted: 24 April 2012 / Published: 27 April 2012
(This article belongs to the Special Issue Micro Flow Controllers)
Precise mass flow control is an essential requirement for novel, small-scale fluidic systems. However, a small-volume, low-leakage proportional control valve for minute fluid flows has not yet been designed or manufactured. A survey is therefore made of the primary design considerations of a micromachined, proportional control valve. Performance requirements are identified based on various applications. Valve operating principles and actuation schemes presented in the literature are evaluated with respect to functionality and technological feasibility. Proceeding from these analyses, we identify the design concepts and actuation schemes that we think are best suited for the fabrication of the intended microvalve. View Full-Text
Keywords: microvalve; flow control; low leakage; mass flow controller; micro actuator; MEMS microvalve; flow control; low leakage; mass flow controller; micro actuator; MEMS
Show Figures

Figure 1

MDPI and ACS Style

Groen, M.S.; Brouwer, D.M.; Wiegerink, R.J.; Lötters, J.C. Design Considerations for a Micromachined Proportional Control Valve. Micromachines 2012, 3, 396-412.

Show more citation formats Show less citations formats

Article Access Map by Country/Region

1
Only visits after 24 November 2015 are recorded.
Search more from Scilit
 
Search
Back to TopTop