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Open AccessArticle

Time of Flight Sensor with a Flow Parallel Wire

RWTH Aachen University, Konstruktion und Entwicklung von Mikrosystemen (KEmikro), Steinbachstraße 53 B, Aachen 52074, Germany
Author to whom correspondence should be addressed.
Micromachines 2012, 3(2), 325-330;
Received: 5 March 2012 / Revised: 5 April 2012 / Accepted: 18 April 2012 / Published: 26 April 2012
(This article belongs to the Special Issue Micro Flow Controllers)
A time of flight sensor has been equipped with a sensing wire parallel to the flow direction (flow parallel wire, FPW). A heat pulse is generated with a coil in the flow channel. The FPW has a center tap allowing its upstream and downstream parts to join in a half bridge. When a heat pulse passes the FPW, a large output peak is generated. The time between heat pulse generation and recording the peak maximum is only marginally affected by the properties of the fluid. With a combination of two FPWs, a measuring range of approximately 0.01–0.5 m/s can be achieved. View Full-Text
Keywords: time of flight sensor; flow parallel wire; fluid property insensitive time of flight sensor; flow parallel wire; fluid property insensitive
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Gerhardy, C.; Schomburg, W.K. Time of Flight Sensor with a Flow Parallel Wire. Micromachines 2012, 3, 325-330.

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