Microelectromechanical Systems (MEMSs): Design, Fabrication, Integration, and Applications

Dear Colleagues,

Microelectromechanical systems (MEMSs) represent a groundbreaking domain in the world of miniaturized devices, renowned for their ability to seamlessly integrate mechanical, electrical, and optical components at a microscale. MEMSs play a pivotal role in enabling miniaturized high-performance sensors and actuators, and are instrumental in driving forward the ongoing intelligence revolution, where interconnected and intelligent systems and IoT applications rely on MEMS devices for data acquisition, processing, and control. Recent developments in the design methodology, fabrication, and integration techniques advance MEMSs toward intelligent microsystems.

This Special Issue will be focused on the design, fabrication, and integration technology for enabling novel MEMS devices and applications in various electronic systems. In this Special Issue, original research articles and reviews are welcome. Research areas may include (but are not limited to) the following:

• The system-level modelling of MEMSs;
• The multiphysics simulation of MEMSs;
• Advanced materials in MEMSs;
• Novel fabrication and integration techniques for MEMSs;
• The design and implementaion of electronic circuits for MEMSs;
• Artificial intelligence and MEMSs;
• Novel applications of MEMSs.

Dr. Jiahao Zhao
Dr. Xiaoguang Zhao
Guest Editors

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