- Article
A Differential Measurement System for Surface Topography Based on a Modular Design
- Fang Cheng,
- Jingwu Zou,
- Hang Su,
- Yin Wang and
- Qing Yu
In this paper, a novel design of a surface topography measurement system is proposed, to address the challenge of accurate measurement in a relatively large area. This system was able to achieve nanometer-scale accuracy in a measurement range of 100...

