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Micromachines, Volume 5, Issue 3

September 2014 - 28 articles

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Articles (28)

  • Article
  • Open Access
7,717 Views
14 Pages

Stress-Free Bonding Technology with Pyrex for Highly Integrated 3D Fluidic Microsystems

  • Florian Thoma,
  • Frank Goldschmidtböing,
  • Keith Cobry and
  • Peter Woias

23 September 2014

In this article, a novel Pyrex reflow bonding technology is introduced which bonds two functional units made of silicon via a Pyrex reflow bonding process. The practical application demonstrated here is a precision dosing system that uses a mechanica...

  • Article
  • Open Access
104 Citations
13,245 Views
18 Pages

Optimized SU-8 Processing for Low-Cost Microstructures Fabrication without Cleanroom Facilities

  • Vânia C. Pinto,
  • Paulo J. Sousa,
  • Vanessa F. Cardoso and
  • Graça Minas

22 September 2014

The study and optimization of epoxy-based negative photoresist (SU-8) microstructures through a low-cost process and without the need for cleanroom facility is presented in this paper. It is demonstrated that the Ultraviolet Rays (UV) exposure equipm...

  • Article
  • Open Access
6 Citations
6,777 Views
10 Pages

Multifunctional Material Structures Based on Laser-Etched Carbon Nanotube Arrays

  • Aline Emplit,
  • Ester Tooten,
  • Victor Xhurdebise and
  • Isabelle Huynen

22 September 2014

High-power electronics in the transportation and aerospace sectors need size and weight reduction. Multifunctional and multistructured materials are currently being developed to couple electromagnetic (EM) and thermal properties, i.e., shielding agai...

  • Article
  • Open Access
75 Citations
18,317 Views
17 Pages

22 September 2014

The use of SU-8 as precursor for glass-like carbon, or glassy carbon, is presented here. SU-8 carbonizes when subject to high temperature under inert atmosphere. Although epoxy-based precursors can be patterned in a variety of ways, photolithography...

  • Article
  • Open Access
10 Citations
9,276 Views
16 Pages

18 September 2014

This paper presents a chemical reaction-free sensor, based on the osmosis principle, fabricated to measure the change in glucose concentration levels. The sensor consists of a square cavity filled with a known concentration of glucose solution and se...

  • Article
  • Open Access
9,462 Views
11 Pages

12 September 2014

This paper presents the progress of monolithic technology for microwaveapplication, focusing on gallium nitride technology advances in the realization of integratedpower amplifiers. Three design examples, developed for microwave backhaul radios, ares...

  • Article
  • Open Access
44 Citations
15,328 Views
14 Pages

11 September 2014

Flexures are components of micro-mechanisms efficiently replacing classical multi-part joints found at the macroscale. So far, flexures have been limited to two-dimensional planar designs due to the lack of a suitable three-dimensional micromanufact...

  • Article
  • Open Access
8 Citations
10,294 Views
14 Pages

10 September 2014

Stop-flow lithography (SFL) is a microfluidic-based particle synthesis method, in which photolithography with a two dimensional (2D) photomask is performed in situ within a microfluidic environment to fabricate multifunctional microstructures. Here,...

  • Article
  • Open Access
64 Citations
9,643 Views
16 Pages

A Single Cell Extraction Chip Using Vibration-Induced Whirling Flow and a Thermo-Responsive Gel Pattern

  • Takeshi Hayakawa,
  • Shinya Sakuma,
  • Takeshi Fukuhara,
  • Yoshiyuki Yokoyama and
  • Fumihito Arai

10 September 2014

We propose a single cell extraction chip with an open structure, which utilizes vibration-induced whirling flow and a single cell catcher. By applying a circular vibration to a micropillar array spiral pattern, a whirling flow is induced around the m...

  • Article
  • Open Access
5 Citations
6,428 Views
13 Pages

1 September 2014

This paper reports the numerical and experimental analysis of the acoustic streaming effect in a fluidic domain. The actuation of a piezoelectric transducer generates acoustic waves that propagate to the fluids, generating pressure gradients that ind...

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Micromachines - ISSN 2072-666X