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Integrated Magnetic MEMS Relays: Status of the Technology

Scottish Microelectronics Centre, Institute for Integrated Micro and Nano Systems, School of Engineering, The University of Edinburgh, King's Buildings, Edinburgh EH9 3JF, UK
Research Institute of Signals, Sensors and Systems, School of Engineering & Physical Sciences, Heriot-Watt University, Edinburgh EH14 4AS, UK
Author to whom correspondence should be addressed.
Micromachines 2014, 5(3), 622-653;
Received: 17 June 2014 / Revised: 24 July 2014 / Accepted: 19 August 2014 / Published: 29 August 2014
The development and application of magnetic technologies employing microfabricated magnetic structures for the production of switching components has generated enormous interest in the scientific and industrial communities over the last decade. Magnetic actuation offers many benefits when compared to other schemes for microelectromechanical systems (MEMS), including the generation of forces that have higher magnitude and longer range. Magnetic actuation can be achieved using different excitation sources, which create challenges related to the integration with other technologies, such as CMOS (Complementary Metal Oxide Semiconductor), and the requirement to reduce power consumption. Novel designs and technologies are therefore sought to enable the use of magnetic switching architectures in integrated MEMS devices, without incurring excessive energy consumption. This article reviews the status of magnetic MEMS technology and presents devices recently developed by various research groups, with key focuses on integrability and effective power management, in addition to the ability to integrate the technology with other microelectronic fabrication processes. View Full-Text
Keywords: magnetic MEMS (microelectromechanical systems); relays; MEMS integration; MEMS switches; microactuators; RF-MEMS (radio frequency MEMS) magnetic MEMS (microelectromechanical systems); relays; MEMS integration; MEMS switches; microactuators; RF-MEMS (radio frequency MEMS)
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Schiavone, G.; Desmulliez, M.P.Y.; Walton, A.J. Integrated Magnetic MEMS Relays: Status of the Technology. Micromachines 2014, 5, 622-653.

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