Micromachines, Volume 5, Issue 2

In this paper, a novel capacitance pressure sensor based on Low-Temperature Co-Fired Ceramic (LTCC) technology is proposed for pressure measurement. This approach differs from the traditional fabrication process for a LTCC pressure sensor because a 4...

We present a wide-angle, broad-spectrum cylindrical lens based on reflections from an array of three-dimensional, high-aspect-ratio micro-mirrors fabricated on a cylindrical elastomeric substrate, functionally inspired by natural reflecting superposi...

Two Si-based micro pulsating heat pipes (µPHPs) charged using HFE-7100 were either horizontally or vertically oriented and were tested using several heating powers. The width of each channel was 0.8 mm in one µPHP containing uniform channels, and the...

We applied two-photon polymerization to fabricate 3D synthetic niches arranged in complex patterns to study the effect of mechano-topological parameters on morphology, renewal and differentiation of rat mesenchymal stromal cells. Niches were formed i...

Laser micro bending process of Ti6Al4V square bar are carried out using a 3D thermo-mechanical finite element analytical model (FEM). The transient temperature fields, displacement fields, stress fields and strain fields are obtained and analyzed. Th...

A series of technological steps concentrating around photolithography and UV polymer on glass replication in a mask-aligner that allow for the cost-effective generation of rather complex micro-optical systems on the wafer level are discussed. In this...

Electrically tunable liquid crystal microlenses have attracted strong research attention due to their advantages of tunable focusing, voltage actuation, low power consumption, simple fabrication, compact structure, and good stability. They are expect...

Lab-on-a-chip technology is promising for the miniaturization of chemistry, biochemistry, and/or biology researchers looking to exploit the advantages of a microspace. To manipulate fluid on a microchip, on-chip pumps are indispensable. To date, ther...

We report on polydimethlysiloxane (PDMS) microlenses and microlens arrays on flat and curved substrates fabricated via a relatively simple process combining liquid-phase photopolymerization and a single molding step. The mold for the formation of th...

In a previous work, we have developed a perflouropolyether (PFPE) lubricant droplet-filled SU-8 composite which promotes bonding between the molecules of SU-8 and PFPE and provides excellent boundary lubrication. The SU-8 + PFPE composite has enhance...