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Micromachines 2014, 5(3), 472-485;

Laser Direct Writing of Thick Hybrid Polymers for Microfluidic Chips

Department of Materials Science & Engineering, Aalto University, P.O. BOX 16200, FI-00076 Aalto, Finland
Division of Pharmaceutical Chemistry, Faculty of Pharmacy, University of Helsinki, P.O. Box 56, FI-00014 Helsinki, Finland
These authors contributed equally to this work.
Author to whom correspondence should be addressed.
Received: 10 June 2014 / Revised: 9 July 2014 / Accepted: 16 July 2014 / Published: 22 July 2014
(This article belongs to the Special Issue Laser Micro- and Nano- Processing)
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This work presents patterning of thick (10–50 µm) hybrid polymer structures of ORMOCER® by laser direct writing. ORMOCER® combine polymer-like fabrication processes with glass-like surface chemistry that is beneficial for many bio-microfluidic applications. ORMOCER® is liquid before exposure, so patterning is done by contact-free lithography, such as proximity exposure. With laser direct writing, we obtained higher resolution patterns, with smaller radius of curvature (~2–4 µm), compared to proximity exposure (~10–20 µm). Process parameters were studied to find the optimal dose for different exposure conditions and ORMOCER® layer thicknesses. Two fluidic devices were successfully fabricated: a directional wetting device (fluidic diode) and an electrophoresis chip. The fluidic diode chip operation depends on the sharp corner geometry and water contact angle, and both have been successfully tailored to obtain diodicity. Electrophoresis chips were used to separate of two fluorescent dyes, rhodamine 123 and fluorescein. The electrophoresis chip also made use of ORMOCER® to ORMOCER® bonding. View Full-Text
Keywords: lithography; resist; laser direct writing; ORMOCER®; microfluidics lithography; resist; laser direct writing; ORMOCER®; microfluidics

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This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Singh, A.; Scotti, G.; Sikanen, T.; Jokinen, V.; Franssila, S. Laser Direct Writing of Thick Hybrid Polymers for Microfluidic Chips. Micromachines 2014, 5, 472-485.

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