Micromachines, Volume 5, Issue 4

This paper illustrates an application of a technique for predicting the thermal characteristics of a bidirectional thermocycling device for polymerase chain reaction (PCR). The micromilling chamber is oscillated by a servo motor and contacted with di...

We present a comprehensive experimental investigation of a micromachined inductive suspension (MIS) based on 3D wire-bonded microcoils. A theoretical model has been developed to predict the levitation height of the disc-shaped proof mass (PM), which...

In this paper, the advances of the silicon-based millimeter-wave (MMW) monolithic integrated circuits (MMICs) are reported. The silicon-based technologies for MMW MMICs are briefly introduced. In addition, the current status of the MMW MMICs is surve...

In this paper, we proposed a novel bonding technology to fabricate a microfluidic device based on Poly(methyl methacrylate) (PMMA). The method, which used chloroform and ethanol as miscible bonding solvent, can complete complex structures rapid assem...

This paper presents a systematic numerical investigation of the transient transport phenomenon during the pileup of molten metal droplets on the substrate. The physical mechanisms of the pileup process, including the bulk liquid, capillarity effects...

In spite of the fact that more than five decades have passed since the invention of laser, some topics of laser-matter interaction still remain incompletely studied. One of such topics is plasma impact on the overall phenomenon of the interaction and...

The study and application of microscale lenses and lens arrays have been actively researched in recent years; new approaches in the fabrication of microlenses and microlens arrays have emerged. Also, novel applications of these microlenses and microl...

This paper presents the design and simulation of an improved electro-thermal micromachined pump for drug delivery applications. Thermal actuators, which are a type of Micro Electro Mechanical system (MEMS) device, are highly useful because of their a...

In this paper we examine the suitability of SU-8 2000 as a construction material for electrothermal actuators and the actuator stability for long-term operation. The fabrication of SU-8 was optimized for mechanical and thermal stability. Samples with...

Nanostructured gold and silver thin films were grown by pulsed laser deposition.Performing the process in an ambient gas (Ar) leads to the nucleation and growth ofnanoparticles in the ablation plasma and their self-organization on the substrate. Thed...

Certain bacteria have motility and can be made non-toxic, and using them for drug delivery has been proposed. For example, using bacteria with flagella motion in multiple spin actuators in drug delivery microrobots has been suggested. This paper inve...

The ability to elicit distinct duty cycles from the same self-regulating microfluidic oscillator device would greatly enhance the versatility of this micro-machine as a tool, capable of recapitulating in vitro the diverse oscillatory processes that o...

As an extension of our previous study, the flow and mixing characteristics of a serpentine mixer in non-creeping flow conditions are investigated numerically. A periodic velocity field is obtained for each spatially periodic channel with the Reynolds...

Femtosecond laser micromachining has emerged in recent years as a new technique for micro/nano structure fabrication because of its applicability to virtually all kinds of materials in an easy one-step process that is scalable. In the past, much rese...

We analyze the opportunities provided by the plasmonic nanoparticles inserted into the bulk of a transparent medium to modify the material by laser light irradiation. This study is provoked by the advent of photo-induced nano-composites consisting of...

By introducing smart materials in micro systems technologies, novel smart microactuators and sensors are currently being developed, e.g., for mobile, wearable, and implantable MEMS (Micro-electro-mechanical-system) devices. Magnetic shape memory allo...

Improved glycemic control with insulin pump therapy in patients with type 1 diabetes mellitus has shown gradual reductions in nephropathy and retinopathy. More recently, the emerging concept of the artificial pancreas, comprising an insulin pump coup...

This paper describes a light-addressable electrolytic system used to perform an electrodeposition of magnetically-guided cells encapsulated in alginate hydrogels using a digital micromirror device (DMD) for three-dimensional cell patterning. In this...

The dispersion of cell deformability mapping is affected not only by the resolution of the sensing system, but also by cell deformability itself. In order to extract the pure deformability characteristics of cells, it is necessary to improve the reso...

The creation of complex three-dimensional (3D) fluidic systems composed of hollow micro- and nanostructures embedded in transparent substrates has attracted significant attention from both scientific and applied research communities. However, it is b...

Recent years have witnessed a rapid development of brain-computer interface (BCI) technology. An independent BCI is a communication system for controlling a device by human intension, e.g., a computer, a wheelchair or a neuroprosthes is, not dependin...

The rapid growth of the micro-electro-mechanical systems (MEMS) is being driven by the rapid development of the micro manufacturing processes. Laser beam machining is one of the micro manufacturing processes which can shape almost all ranges of engin...

In this work, we have modified the experimental setup for a vapor-solid (VS) process to synthesize Zinc oxide (ZnO) microtubes (MTs) with lengths up to 3 mm during a 90-min growth period. The critical idea behind this modification is to control the d...

We report on high precision high speed micromachining of Al₂O₃ and AlN using pulsed near infrared fiber laser. Ablation thresholds are determined to be 30 J/cm² for alumina and 18 J/cm² for aluminum nitride. The factors influencing the efficiency and...

In this paper, the dynamic performance of a Kalman filter (KF) was analyzed, which is used to combine multiple measurements of a gyroscopes array to reduce the noise and improve the accuracy of the individual sensors. A principle for accuracy improve...

This paper considers the problem of indoor navigation by means of low-cost mobile devices. The required accuracy, the low reliability of low-cost sensor measurements and the typical unavailability of the GPS signal make indoor navigation a challengin...

We describe a precision micropump for generation of precisely metered micro-aliquots of liquid at high rates. The use of custom designed piezoelectric valves positioned externally to the microfluidic chip allows for on-demand formation of micro-dro...

Advances in micro and nano fabrication technologies have enabled fabrication of smaller and more sensitive devices for applications not only in solid-state physics but also in medicine and biology. The demand for devices that can precisely transport...

Thin film ablation with pulsed nanosecond lasers can benefit from the use of beam shaping optics to transform the Gaussian beam profile with a circular footprint into a Top-Hat beam profile with a rectangular footprint. In general, the quality of the...

Microactuators have become essential elements of microelectromechanical systems, for example, for positioning purposes and for fluid-handling tasks in microfluidic systems. UV depth lithography and other new micromachining technologies, which have be...

A micromixer with unbalanced three-split rhombic sub-channels was proposed, and analyses of the mixing and flow characteristics of this micromixer were performed in this work. Three-dimensional Navier-Stokes equations in combination with an advection...

A trend in the global technological progress in the last few decades is the development of microsystem technology, microelectromechanical systems and corresponding technologies. Fluid mixing is an extremely important process widely used in various mi...

An available novel system for studying the cellular mechanobiology applies an equiaxial strain field to cells cultured on a PolyDiMethylSiloxane (PDMS) substrate membrane, which is stretched over the deformation of a cylindrical shell. In its applica...

Polarization independent liquid crystal (LC) microlens arrays based on controlling the spatial distribution of the Kerr constants of blue phase LC are simulated. Each sub-lens with a parabolic distribution of Kerr constants results in a parabolic pha...

Recently, we showed that femtosecond laser induced “nanogratings” consist of thin regions with a low refractive index (Δn = −0.15), due to the formation of nanoporous silica surrounded by regions with a positive index change. In this paper, we invest...

A 3D printing fused filament fabrication (FFF) approach has been implemented for the creation of microstructures having an internal 3D microstructure geometry. These objects were produced without any sacrificial structures or additional support mater...

A high-temperature pressure sensor realized by the post-fire metallization on zirconia ceramic is presented. The pressure signal can be read out wirelessly through the magnetic coupling between the reader antenna and the sensor due to that the sensor...

Microrobots have a number of potential applications for micromanipulation and assembly, but also offer challenges in power and control. This paper describes an uncalibrated vision-based control system for magnetically actuated microrobots operating u...