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Laser Micro- and Nano- Processing

Special Issue Information

Keywords

  • Laser-Matter Interaction
  • Fundamental aspects (dynamics, modeling)
  • Nanotechnology
  • Direct write processes (MAPLE DW, LIFT, etc.)
  • Ultra-short pulse laser processing
  • VUV laser processing
  • Surface treatment (texturing, cleaning, annealing, modification, etc.)
  • Micro-patterning and micro-structuring
  • Micro-machining
  • 3-D micro- and nano-fabrication
  • Drilling and cutting
  • Micro-forming
  • Lithography (including EUV sources and applications)
  • Manufacture of micro devices and systems
  • Film deposition and synthesis of advanced materials
  • Nano- and micro-particles
  • Medical and biological applications
  • Photochemistry
  • Glass/Ceramic processing

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Micromachines - ISSN 2072-666X