Micromachines, Volume 3, Issue 1

New and novel sensing schemes require optical functions with unconventional spatial light distributions, as well as complex spectral functionality. Micro-optical elements have shown some flexibility in their ability to spatially encode phase informat...

We have realized a micromachined single chip flow sensing system with an ultra-wide dynamic flow range of more than five decades, from 100 nL/h up to more than 10 mL/h. The system comprises both a thermal and a micro Coriolis flow sensor with partial...

In this paper, a general methodology for the dynamic study of electrostatically actuated droplets is presented. A simplified 1D transient model is developed to investigate the transient response of a droplet to an actuation voltage and to study the e...

We present a new effective permittivity (EP) model to accurately calculate surface plasmons (SPs) using the finite-difference time-domain (FDTD) method. The computational representation of physical structures with curved interfaces causes inherent er...

Flexible and high-sensitive capacitive sensors are demanded to detect pressure distribution and/or tactile information on a curved surface, hence, wide varieties of polymer-based flexible MEMS sensors have been developed. High-sensitivity may be achi...

We describe how the amorphous fluoropolymer CYTOP can be advantageously used as a waveguide cladding material in integrated optical circuits suitable for applications in integrated biophotonics. The unique refractive index of CYTOP (n = 1.34) enables...

This paper presents an integrated sensor/actuator device with multi-input and multi-output designed on the basis of a standard control representation called a distributed port-Hamiltonian system. The device is made from soft material called an ionic...

A thin-film grating on a curved substrate functions as a highly reflective and wavelength sensitive mirror for a diverging wave that has the same curvature as the substrate. In this paper we propose a cylindrical cavity surrounded by a curved resonan...

Prognostics is seen as a key component of health usage monitoring systems, where prognostics algorithms can both detect anomalies in the behavior/performance of a micro-device/system, and predict its remaining useful life when subjected to monitored...

Fabrication and performance of a functional photonic-microfluidic flow cytometer is demonstrated. The devices are fabricated on a Pyrex substrate by photolithographically patterning the microchannels and optics in a SU-8 layer that is sealed via a po...

Collimated Gaussian beams are efficiently localized at the apex of a metal-coated axicon prism by surface plasmon excitations. We observed the light scattered at the apex and the light reflected by the prism. Intense scattered light was observed with...

A novel angle detector for laser beams is designed in this paper. It takes advantage of grating coupling to couple the incident light into a slab waveguide; and, the incident light’s angle can be determined by reading the outputs of light detectors w...

The dispersion of the fundamental super mode confined along the boundary between a multilayer metal-insulator (MMI) stack and a dielectric coating is theoretically analyzed and compared to the dispersion of surface waves on a single metal-insulator (...

We present a switchable thermal interface based on an array of discrete liquid droplets initially confined on hydrophilic islands on a substrate. The droplets undergo reversible morphological transition into a continuous liquid film when they are mec...

We prepared high-density plasmonic nanostructures on a glass substrate. By using soft UV nanoimprint lithography, gold nanodisks with a diameter of 65 nm were obtained on an area of 1 mm². We tested these gold nanosensors in the biotin/streptavidin s...

This paper presents a new tuning mechanism for millimetre-wave BPF based on deflection of the BCB membrane of BCB packaging cap. A 3-pole parallel-coupled microstrip filter operating at 60 GHz is first implemented on 30 µm-thick BCB polymer substrate...

We describe two novel centrifugal microfluidic platform designs that enable passive pumping of liquids radially inward while the platform is in motion. The first design uses an immiscible liquid to displace an aqueous solution back towards the center...