Micromachines, Volume 16, Issue 9

The polymer deposition layer (PDL) formed during inductively coupled plasma (ICP) processing significantly limits the figuring accuracy and surface quality of fused silica optics. This study investigates the formation mechanism, composition, and evol...

The overlying rock layers in a mining area may collapse or settle, subjecting pipelines to uneven forces that can lead to deformation or even fracture. This paper proposes a pipeline safety monitoring method that combines fiberoptic vibration and str...

Electromagnetic micro-electro-mechanical system (MEMS) micromirrors are widely used in optical scanning systems but often encounter mechanical crosstalk due to the use of shared drive coils. This phenomenon leads to parasitic motion along the slow ax...

This paper focuses on the scoring-wheel cutting process for circular structures of OLED display panels, conducting in-depth research through an experiment–analysis–optimization system. Based on the Taguchi experimental design, a three-fac...

In the research of triboelectric nanogenerators (TENGs), most attention has been paid to material modification, structural design, and power management. Little study has been performed on the transient process of TENGs, although the capacitance chara...

The measurement accuracy and equipment stability of superposition-type force sensors are primarily influenced by the layout and number of individual force sensors. Analyzing this impact effect through experimental testing for each configuration would...

This study presents a non-invasive three-dimensional cell manipulation technique based on acoustic microfluidic chips, which generates acoustic flow fields through the vibration of micropillars induced by bulk acoustic waves to achieve precise multi-...

To enhance the RF power properties of CMOS-compatible gold-free GaN devices, this work introduces a kind of GaN-on-Si HEMT with a low parasitic regrown ohmic contact technology. Attributed to the highly doped n+ InGaN regrown layer and smooth morphol...

This study employs reactive magnetron sputtering technology to fabricate TiN/Y-HfO2/TiN multilayer thin film devices using titanium targets and yttrium-doped high-purity hafnium targets. A systematic investigation was conducted to explore the influen...

Zirconia (ZrO2) ceramics are advanced structural materials that exhibit exceptional performance in aerospace and other heavy-duty applications. Since conventional machining of ZrO2 ceramics presents significant challenges, this study employs the long...