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Micromachines 2012, 3(1), 28-35;

A Study on Millimetre-Wave Tunable Bandpass Filter Based on Polymer Cap Deflection

IEMN CNRS 8520/Cité Scientifique-Avenue Poincare BP 60069, 59652 Villeneuve d’Ascq Cedex, France
Author to whom correspondence should be addressed.
Received: 29 November 2011 / Revised: 28 December 2011 / Accepted: 29 December 2011 / Published: 6 January 2012
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This paper presents a new tuning mechanism for millimetre-wave BPF based on deflection of the BCB membrane of BCB packaging cap. A 3-pole parallel-coupled microstrip filter operating at 60 GHz is first implemented on 30 µm-thick BCB polymer substrate and then BCB-capped through our new anti-adhesion layer assisted wafer-level transfer technique. Gold electrodes are fabricated on top of the BCB cap for DC actuation. The implemented BCB capped BPF showed the tuning range of 1.49 GHz from 63.36 GHz to 64.85 GHz with the associated insertion losses of −9.7 dB and −9.4 dB and the return losses better than −11 dB over the tuning range. View Full-Text
Keywords: BCB polymer; filter; tuning; millimeter-wave BCB polymer; filter; tuning; millimeter-wave

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This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Seok, S.; Kim, J.; Rolland, N.; Rolland, P.-A. A Study on Millimetre-Wave Tunable Bandpass Filter Based on Polymer Cap Deflection. Micromachines 2012, 3, 28-35.

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