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Open AccessArticle

Magnetostrictive Performance of Electrodeposited TbxDy(1−x)Fey Thin Film with Microcantilever Structures

1
Department of Mechanical Systems Engineering, Tohoku University, Sendai 980-8579, Japan
2
Micro-Nanomachining Research Education Center, Tohoku University, Sendai 980-8579, Japan
3
Micro System Integration Center (µSiC), Tohoku University, Sendai 980-8579, Japan
*
Authors to whom correspondence should be addressed.
Micromachines 2020, 11(5), 523; https://doi.org/10.3390/mi11050523
Received: 30 March 2020 / Revised: 16 May 2020 / Accepted: 17 May 2020 / Published: 21 May 2020
(This article belongs to the Section D:Materials and Processing)
The microfabrication with a magnetostrictive TbxDy(1−x)Fey thin film for magnetic microactuators is developed, and the magnetic and magnetostrictive actuation performances of the deposited thin film are evaluated. The magnetostrictive thin film of TbxDy(1−x)Fey is deposited on a metal seed layer by electrodeposition using a potentiostat in an aqueous solution. Bi-material cantilever structures with the Tb0.36Dy0.64Fe1.9 thin-film are fabricated using microfabrication, and the magnetic actuation performances are evaluated under the application of a magnetic field. The actuators show large magnetostriction coefficients of approximately 1250 ppm at a magnetic field of 11000 Oe. View Full-Text
Keywords: magnetostriction; thin film; Terfenol-D; TbxDy(1−x)Fey; electrodeposition magnetostriction; thin film; Terfenol-D; TbxDy(1−x)Fey; electrodeposition
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Shim, H.; Sakamoto, K.; Inomata, N.; Toda, M.; Toan, N.V.; Ono, T. Magnetostrictive Performance of Electrodeposited TbxDy(1−x)Fey Thin Film with Microcantilever Structures. Micromachines 2020, 11, 523.

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