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Article

PIN-PMN-PT Single Crystal 1-3 Composite-based 20 MHz Ultrasound Phased Array

by 1,2,3,†, 1,3,†, 1, 1, 4,* and 1,3,*
1
School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China
2
Jingzhou Vocational College of Technology, Jingzhou 434000, China
3
State Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Shanghai 200050, China
4
State Key Laboratory of Mechanics and Control of Mechanical Structures, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China
*
Authors to whom correspondence should be addressed.
The authors are co-first authors of this paper.
Micromachines 2020, 11(5), 524; https://doi.org/10.3390/mi11050524
Received: 27 November 2019 / Revised: 16 May 2020 / Accepted: 20 May 2020 / Published: 21 May 2020
(This article belongs to the Special Issue Piezoelectric Transducers: Materials, Devices and Applications)
Based on a modified dice-and-fill technique, a PIN-PMN-PT single crystal 1-3 composite with the kerf of 12 μm and pitch of 50 μm was prepared. The as-made piezoelectric composite material behaved with high piezoelectric constant (d33 = 1500 pC/N), high electromechanical coefficient (kt = 0.81), and low acoustic impedance (16.2 Mrayls). Using lithography and flexible circuit method, a 48-element phased array was successfully fabricated from such a piezoelectric composite. The array element was measured to have a central frequency of 20 MHz and a fractional bandwidth of approximately 77% at −6 dB. Of particular significance was that this PIN-PMN-PT single crystal 1-3 composite-based phased array exhibits a superior insertion loss compared with PMN-PT single crystal and PZT-5H-based 20 MHz phased arrays. The focusing and steering capabilities of the obtained phased array were demonstrated theoretically and experimentally. These promising results indicate that the PIN-PMN-PT single crystal 1-3 composite-based high frequency phased array is a good candidate for ultrasound imaging applications. View Full-Text
Keywords: PIN-PMN-PT; 1-3 composite; high frequency; phased array PIN-PMN-PT; 1-3 composite; high frequency; phased array
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MDPI and ACS Style

Zhou, W.; Zhang, T.; Ou-Yang, J.; Yang, X.; Wu, D.; Zhu, B. PIN-PMN-PT Single Crystal 1-3 Composite-based 20 MHz Ultrasound Phased Array. Micromachines 2020, 11, 524. https://doi.org/10.3390/mi11050524

AMA Style

Zhou W, Zhang T, Ou-Yang J, Yang X, Wu D, Zhu B. PIN-PMN-PT Single Crystal 1-3 Composite-based 20 MHz Ultrasound Phased Array. Micromachines. 2020; 11(5):524. https://doi.org/10.3390/mi11050524

Chicago/Turabian Style

Zhou, Wei; Zhang, Tao; Ou-Yang, Jun; Yang, Xiaofei; Wu, Dawei; Zhu, Benpeng. 2020. "PIN-PMN-PT Single Crystal 1-3 Composite-based 20 MHz Ultrasound Phased Array" Micromachines 11, no. 5: 524. https://doi.org/10.3390/mi11050524

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