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PIN-PMN-PT Single Crystal 1-3 Composite-based 20 MHz Ultrasound Phased Array

by 1,2,3,†, 1,3,†, 1, 1, 4,* and 1,3,*
School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China
Jingzhou Vocational College of Technology, Jingzhou 434000, China
State Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Shanghai 200050, China
State Key Laboratory of Mechanics and Control of Mechanical Structures, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China
Authors to whom correspondence should be addressed.
The authors are co-first authors of this paper.
Micromachines 2020, 11(5), 524;
Received: 27 November 2019 / Revised: 16 May 2020 / Accepted: 20 May 2020 / Published: 21 May 2020
(This article belongs to the Special Issue Piezoelectric Transducers: Materials, Devices and Applications)
Based on a modified dice-and-fill technique, a PIN-PMN-PT single crystal 1-3 composite with the kerf of 12 μm and pitch of 50 μm was prepared. The as-made piezoelectric composite material behaved with high piezoelectric constant (d33 = 1500 pC/N), high electromechanical coefficient (kt = 0.81), and low acoustic impedance (16.2 Mrayls). Using lithography and flexible circuit method, a 48-element phased array was successfully fabricated from such a piezoelectric composite. The array element was measured to have a central frequency of 20 MHz and a fractional bandwidth of approximately 77% at −6 dB. Of particular significance was that this PIN-PMN-PT single crystal 1-3 composite-based phased array exhibits a superior insertion loss compared with PMN-PT single crystal and PZT-5H-based 20 MHz phased arrays. The focusing and steering capabilities of the obtained phased array were demonstrated theoretically and experimentally. These promising results indicate that the PIN-PMN-PT single crystal 1-3 composite-based high frequency phased array is a good candidate for ultrasound imaging applications. View Full-Text
Keywords: PIN-PMN-PT; 1-3 composite; high frequency; phased array PIN-PMN-PT; 1-3 composite; high frequency; phased array
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MDPI and ACS Style

Zhou, W.; Zhang, T.; Ou-Yang, J.; Yang, X.; Wu, D.; Zhu, B. PIN-PMN-PT Single Crystal 1-3 Composite-based 20 MHz Ultrasound Phased Array. Micromachines 2020, 11, 524.

AMA Style

Zhou W, Zhang T, Ou-Yang J, Yang X, Wu D, Zhu B. PIN-PMN-PT Single Crystal 1-3 Composite-based 20 MHz Ultrasound Phased Array. Micromachines. 2020; 11(5):524.

Chicago/Turabian Style

Zhou, Wei; Zhang, Tao; Ou-Yang, Jun; Yang, Xiaofei; Wu, Dawei; Zhu, Benpeng. 2020. "PIN-PMN-PT Single Crystal 1-3 Composite-based 20 MHz Ultrasound Phased Array" Micromachines 11, no. 5: 524.

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