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Journal: MicromachinesVolume: 11Number: 523
Article: Magnetostrictive Performance of Electrodeposited TbxDy(1−x)Fey Thin Film with Microcantilever Structures
- Authors:
- Hang Shim1,*,
- Kei Sakamoto2 and
- Naoki Inomata1
- et al.
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