- Article
Multiparametric Porous Silicon Sensors
- C. Baratto,
- G. Faglia,
- G. Sberveglieri,
- Z. Gaburro,
- L. Pancheri,
- C. Oton and
- L. Pavesi
We investigated the possibility of using several sensing parameters from porous silicon in order to improve gas selectivity. By fabricating porous silicon optical microcavities, three independent quantities can be measured, i.e. the electrical conduc...

