Conferences
26–30 January 2014, San Francisco, USA
The 27th International Conference on Micro Electro Mechanical Systems (MEMS 2014)
The major areas of activity in the development of MEMS solicited and expected at this conference include but are not limited to:
- Design, simulation and analysis tools with experimental verification
- Fabrication technologies and processes
- Silicon and non-silicon materials
- Electro-mechanical integration techniques
- Assembly and packaging approaches
- Metrology and operational evaluation techniques
- System architecture
The major areas of activity in the application of MEMS solicited and expected at this conference include but are not limited to:
- Mechanical, thermal, and magnetic sensors and actuators, and system
- Opto-mechanical microdevices and microsystems
- Fluidic microcomponents and microsystems
- Microdevices for data storage
- Microdevices for biomedical engineering
- Micro chemical analysis systems
- Microdevices and systems for wireless communication
- Microdevices for power supply and energy harvesting
- Nano-electro-mechanical devices and systems
- Scientific microinstruments
