Editor’s Choice Articles

Editor’s Choice articles are based on recommendations by the scientific editors of MDPI journals from around the world. Editors select a small number of articles recently published in the journal that they believe will be particularly interesting to readers, or important in the respective research area. The aim is to provide a snapshot of some of the most exciting work published in the various research areas of the journal.

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Article

12 pages, 5301 KiB  
Article
Origami Inspired Laser Scanner
by Yu-Shin Wu and Shao-Kang Hung
Micromachines 2022, 13(10), 1796; https://doi.org/10.3390/mi13101796 - 21 Oct 2022
Viewed by 1625
Abstract
Diverse origami techniques and various selections of paper open new possibilities to create micromachines. By folding paper, this article proposes an original approach to build laser scanners, which manipulate optical beams precisely and realize valuable applications, including laser marking, cutting, engraving, and displaying. [...] Read more.
Diverse origami techniques and various selections of paper open new possibilities to create micromachines. By folding paper, this article proposes an original approach to build laser scanners, which manipulate optical beams precisely and realize valuable applications, including laser marking, cutting, engraving, and displaying. A prototype has been designed, implemented, actuated, and controlled. The experimental results demonstrate that the angular stroke, repeatability, full scale settling time, and resonant frequency are 20°, 0.849 m°, 330 ms, 68 Hz, respectively. Its durability, more than 35 million cycles, shows the potential to carry out serious tasks. Full article
(This article belongs to the Special Issue Origami Devices: Design and Application)
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10 pages, 21721 KiB  
Article
Millimeter-Wave Permittivity Variations of an HR Silicon Substrate from the Photoconductive Effect
by Charlotte Tripon-Canseliet and Jean Chazelas
Micromachines 2022, 13(10), 1782; https://doi.org/10.3390/mi13101782 - 19 Oct 2022
Cited by 1 | Viewed by 1261
Abstract
The photoinduced microwave complex permittivity of a highly resistive single-crystal silicon wafer was extracted from a bistatic free-space characterization test bench operating in the 26.5–40 GHz frequency band under CW optical illumination at wavelengths of 806 and 971 nm. Significant variations in the [...] Read more.
The photoinduced microwave complex permittivity of a highly resistive single-crystal silicon wafer was extracted from a bistatic free-space characterization test bench operating in the 26.5–40 GHz frequency band under CW optical illumination at wavelengths of 806 and 971 nm. Significant variations in the real and imaginary parts of the substrate’s permittivity induced by direct photoconductivity are reported, with an optical power density dependence, in agreement with the theoretical predictions. These experimental results open the route to ultrafast system reconfiguration of microwave devices in integrated technology by an external EMI-protected and contactless control with unprecedented performance. Full article
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13 pages, 5642 KiB  
Article
A Sensitive and Portable Double-Layer Microfluidic Biochip for Harmful Algae Detection
by Ping Li, Le Qiang, Yingkuan Han, Yujin Chu, Jiaoyan Qiu, Fangteng Song, Min Wang, Qihang He, Yunhong Zhang, Mingyuan Sun, Caiwen Li, Shuqun Song, Yun Liu, Lin Han and Yu Zhang
Micromachines 2022, 13(10), 1759; https://doi.org/10.3390/mi13101759 - 18 Oct 2022
Cited by 2 | Viewed by 1988
Abstract
Harmful algal blooms (HABs) are common disastrous ecological anomalies in coastal waters. An effective algae monitoring approach is important for natural disaster warning and environmental governance. However, conducting rapid and sensitive detection of multiple algae is still challenging. Here, we designed an ultrasensitive, [...] Read more.
Harmful algal blooms (HABs) are common disastrous ecological anomalies in coastal waters. An effective algae monitoring approach is important for natural disaster warning and environmental governance. However, conducting rapid and sensitive detection of multiple algae is still challenging. Here, we designed an ultrasensitive, rapid and portable double-layer microfluidic biochip for the simultaneous quantitative detection of six species of algae. Specific DNA probes based on the 18S ribosomal DNA (18S rDNA) gene fragments of HABs were designed and labeled with the fluorescent molecule cyanine-3 (Cy3). The biochip had multiple graphene oxide (GO) nanosheets-based reaction units, in which GO nanosheets were applied to transfer target DNA to the fluorescence signal through a photoluminescence detection system. The entire detection process of multiple algae was completed within 45 min with the linear range of fluorescence recovery of 0.1 fM–100 nM, and the detection limit reached 108 aM. The proposed approach has a simple detection process and high detection performance and is feasible to conduct accurate detection with matched portable detection equipment. It will have promising applications in marine natural disaster monitoring and environmental care. Full article
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12 pages, 61097 KiB  
Article
Metasurfaces as Energy Valves for Sustainable Energy Management
by Yoshiaki Nishijima, Syunya Kimura, Yu Takeshima and Saulius Juodkazis
Micromachines 2022, 13(10), 1769; https://doi.org/10.3390/mi13101769 - 18 Oct 2022
Cited by 4 | Viewed by 1835
Abstract
Control of light absorption and transmission by metal–insulator–metal (MIM) metasurfaces are promising for applications in optical windows. This study shows the realization of photo-thermal energy conversion for radiative cooling by MIM metasurfaces with thin metal substrate and Indium–Tin–Oxide (ITO). High transparency of ITO [...] Read more.
Control of light absorption and transmission by metal–insulator–metal (MIM) metasurfaces are promising for applications in optical windows. This study shows the realization of photo-thermal energy conversion for radiative cooling by MIM metasurfaces with thin metal substrate and Indium–Tin–Oxide (ITO). High transparency of ITO at visible wavelengths and high absorption at mid-infrared wavelengths were realized for future applications of efficient cooling or heating applicable for living and working spaces. The MIM (ITO/CaF2/ITO) metasurface was patterned with low-resolution photo-lithography as a demonstration of further simplification and possible scalability of the patterning for practical window applications. Full article
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12 pages, 2388 KiB  
Article
A Vertical Single Transistor Neuron with Core–Shell Dual-Gate for Excitatory–Inhibitory Function and Tunable Firing Threshold Voltage
by Taegoon Lee, Seung-Bae Jeon and Daewon Kim
Micromachines 2022, 13(10), 1740; https://doi.org/10.3390/mi13101740 - 14 Oct 2022
Viewed by 2065
Abstract
A novel inhibitable and firing threshold voltage tunable vertical nanowire (NW) single transistor neuron device with core–shell dual-gate (CSDG) was realized and verified by TCAD simulation. The CSDG NW neuron is enclosed by an independently accessed shell gate and core gate to serve [...] Read more.
A novel inhibitable and firing threshold voltage tunable vertical nanowire (NW) single transistor neuron device with core–shell dual-gate (CSDG) was realized and verified by TCAD simulation. The CSDG NW neuron is enclosed by an independently accessed shell gate and core gate to serve an excitatory–inhibitory transition and a firing threshold voltage adjustment, respectively. By utilizing the shell gate, the firing of specific neuron can be inhibited for winner-takes-all learning. It was confirmed that the independently accessed core gate can be used for adjustment of the firing threshold voltage to compensate random conductance variation before the learning and to fix inference error caused by unwanted synapse conductance change after the learning. This threshold voltage tuning can also be utilized for homeostatic function during the learning process. Furthermore, a myelination function which controls the transmission rate was obtained based on the inherent asymmetry between the source and drain in vertical NW structure. Finally, using the CSDG NW neuron device, a letter recognition test was conducted by SPICE simulation for a system-level validation. This multi-functional neuron device can contribute to construct a high-density monolithic SNN hardware combining with the previously developed vertical synapse MOSFET devices. Full article
(This article belongs to the Special Issue Self-Powered Devices and Systems)
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18 pages, 3687 KiB  
Article
Electromechanical Properties of 3D-Printed Stretchable Carbon Fiber Composites
by Teemu Salo, Donato Di Vito, Aki Halme and Jukka Vanhala
Micromachines 2022, 13(10), 1732; https://doi.org/10.3390/mi13101732 - 13 Oct 2022
Cited by 8 | Viewed by 2106
Abstract
The addition of fillers has been implemented in fused filament fabrication (FFF), and robust carbon fillers have been found to improve the mechanical, electrical, and thermal properties of 3D-printed matrices. However, in stretchable matrices, the use of fillers imposes significant challenges related to [...] Read more.
The addition of fillers has been implemented in fused filament fabrication (FFF), and robust carbon fillers have been found to improve the mechanical, electrical, and thermal properties of 3D-printed matrices. However, in stretchable matrices, the use of fillers imposes significant challenges related to quality and durability. In this work, we show that long carbon staple fibers in the form of permeable carbon fiber cloth (CFC) can be placed into a stretchable thermoplastic polyurethane (TPU) matrix to improve the system. Four CFC sample series (nominally 53–159-µm-thick CFC layers) were prepared with a permeable and compliant thin CFC layer and a highly conductive and stiff thick CFC layer. The sample series was tested with single pull-up tests and cyclic tensile tests with 10,000 cycles and was further studied with digital image correlation (DIC) analyses. The results showed that embedded CFC layers in a TPU matrix can be used for stretchable 3D-printed electronics structures. Samples with a thin 53 µm CFC layer retained electrical properties at 50% cyclic tensile deformations, whereas the samples with a thick >150-µm CFC layer exhibited the lowest resistance (5 Ω/10 mm). Between those structures, the 106-µm-thick CFC layer exhibited balanced electromechanical properties, with resistance changes of 0.5% in the cyclic tests after the orientation of the samples. Furthermore, the suitability of the structure as a sensor was estimated. Full article
(This article belongs to the Special Issue Flexible and Wearable Sensors)
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14 pages, 8513 KiB  
Article
Scalable, Dual-Band Metasurface Array for Electromagnetic Energy Harvesting and Wireless Power Transfer
by Yiqing Wei, Junping Duan, Huihui Jing, Huimin Yang, Hao Deng, Chengwei Song, Jiayun Wang, Zeng Qu and Binzhen Zhang
Micromachines 2022, 13(10), 1712; https://doi.org/10.3390/mi13101712 - 11 Oct 2022
Cited by 10 | Viewed by 1695
Abstract
A dual-band metasurface array is presented in this paper for electromagnetic (EM) energy harvesting in the Wi-Fi band and Ku band. The array consists of metasurface unit cells, rectifiers, and load resistors. The metasurface units within each column are interconnected to establish two [...] Read more.
A dual-band metasurface array is presented in this paper for electromagnetic (EM) energy harvesting in the Wi-Fi band and Ku band. The array consists of metasurface unit cells, rectifiers, and load resistors. The metasurface units within each column are interconnected to establish two channels of energy delivery, enabling the transmission and aggregation of incident power. At the terminals of two channels, a single series diode rectifier and a voltage doubler rectifier are integrated into them to rectify the energy in the Wi-Fi band and the Ku band, respectively. A 7 × 7 prototype of the metasurface array is fabricated and tested. The measured results in the anechoic chamber show that the RF-to-dc efficiencies of the prototype at 2.4 GHz and 12.6 GHz reach 64% and 55% accordingly, when the available incident power at the surface is 3 dBm and 14 dBm, respectively. Full article
(This article belongs to the Topic Advanced Energy Harvesting Technology)
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14 pages, 2409 KiB  
Article
The Effect of Non-Uniform Magnetic Field on the Efficiency of Mixing in Droplet-Based Microfluidics: A Numerical Investigation
by Masoud Rezaeian, Moein Nouri, Mojtaba Hassani-Gangaraj, Amir Shamloo and Rohollah Nasiri
Micromachines 2022, 13(10), 1661; https://doi.org/10.3390/mi13101661 - 02 Oct 2022
Cited by 7 | Viewed by 1909
Abstract
Achieving high efficiency and throughput in droplet-based mixing over a small characteristic length, such as microfluidic channels, is one of the crucial parameters in Lab-on-a-Chip (LOC) applications. One solution to achieve efficient mixing is to use active mixers in which an external power [...] Read more.
Achieving high efficiency and throughput in droplet-based mixing over a small characteristic length, such as microfluidic channels, is one of the crucial parameters in Lab-on-a-Chip (LOC) applications. One solution to achieve efficient mixing is to use active mixers in which an external power source is utilized to mix two fluids. One of these active methods is magnetic micromixers using ferrofluid. In this technique, magnetic nanoparticles are used to make one phase responsive to magnetic force, and then by applying a magnetic field, two fluid phases, one of which is magneto-responsive, will sufficiently mix. In this study, we investigated the effect of the magnetic field’s characteristics on the efficiency of the mixing process inside droplets. When different concentrations of ferrofluids are affected by a constant magnetic field, there is no significant change in mixing efficiency. As the magnetic field intensifies, the magnetic force makes the circulation flow inside the droplet asymmetric, leading to chaotic advection, which creates a flow that increases the mixing efficiency. The results show that the use of magnetic fields is an effective method to enhance the mixing efficiency within droplets, and the efficiency of mixing increases from 65.4 to 86.1% by increasing the magnetic field intensity from 0 to 90 mT. Besides that, the effect of ferrofluid’s concentration on the mixing efficiency is studied. It is shown that when the concentration of the ferrofluid changes from 0 to 0.6 mol/m3, the mixing efficiency increases considerably. It is also shown that by changing the intensity of the magnetic field, the mixing efficiency increases by about 11%. Full article
(This article belongs to the Special Issue Digital Microfluidics for Liquid Handling and Biochemical Analysis)
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19 pages, 6760 KiB  
Article
Transient Response Characteristics Analysis of High-Power Piezoelectric Transducers
by Zhaopeng Dong, Liang Xu and Tianyue Yang
Micromachines 2022, 13(10), 1638; https://doi.org/10.3390/mi13101638 - 29 Sep 2022
Cited by 2 | Viewed by 1490
Abstract
To improve suitability in applications with high dynamic performance requirements, the transient response characteristics of high-power piezoelectric transducers should be studied quantitatively. This paper proposes the vector reduction method to solve the complex transient equations and obtains a transient matching scheme clarifying the [...] Read more.
To improve suitability in applications with high dynamic performance requirements, the transient response characteristics of high-power piezoelectric transducers should be studied quantitatively. This paper proposes the vector reduction method to solve the complex transient equations and obtains a transient matching scheme clarifying the mechanism of electrical matching resistance on electromechanical damping. A matching scheme with a combination of full-bridge inverter, transformer and series LC circuit is designed and validated, which can provide suitable electrical damping without causing energy losses. Consequently, the experiment verifies the transient properties of the proposed scheme. For a typical piezoelectric cutting transducer with 100.8 ms response time, our scheme is verified to have high dynamic performance within frequency response time of 5.5 ms and vibration response time of 15.0 ms. Full article
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13 pages, 3461 KiB  
Article
A Miniaturized Piezoelectric MEMS Accelerometer with Polygon Topological Cantilever Structure
by Chaoxiang Yang, Bohao Hu, Liangyu Lu, Zekai Wang, Wenjuan Liu and Chengliang Sun
Micromachines 2022, 13(10), 1608; https://doi.org/10.3390/mi13101608 - 27 Sep 2022
Cited by 5 | Viewed by 2029
Abstract
This work proposes a miniaturized piezoelectric MEMS accelerometer based on polygonal topology with an area of only 868 × 833 μm2. The device consists of six trapezoidal cantilever beams with shorter fixed sides. Meanwhile, a device with larger fixed sides is [...] Read more.
This work proposes a miniaturized piezoelectric MEMS accelerometer based on polygonal topology with an area of only 868 × 833 μm2. The device consists of six trapezoidal cantilever beams with shorter fixed sides. Meanwhile, a device with larger fixed sides is also designed for comparison. The theoretical and finite element models are established to analyze the effect of the beam′s effective stiffness on the output voltage and natural frequency. As the stiffness of the device decreases, the natural frequency of the device decreases while the output signal increases. The proposed polygonal topology with shorter fixed sides has higher voltage sensitivity than the larger fixed one based on finite element simulations. The piezoelectric accelerometers are fabricated using Cavity-SOI substrates with a core piezoelectric film of aluminum nitride (AlN) of about 928 nm. The fabricated piezoelectric MEMS accelerometers have good linearity (0.99996) at accelerations less than 2 g. The measured natural frequency of the accelerometer with shorter fixed sides is 98 kHz, and the sensitivity, resolution, and minimum detectable signal at 400 Hz are 1.553 mV/g, 1 mg, and 2 mg, respectively. Compared with the traditional trapezoidal cantilever with the same diaphragm area, its output voltage sensitivity is increased by 22.48%. Full article
(This article belongs to the Special Issue MEMS Accelerometers: Design, Applications and Characterization)
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19 pages, 7670 KiB  
Article
A Disposable Electromagnetic Bi-Directional Micropump Utilizing a Rotating Multi-Pole Ring Magnetic Coupling
by Chao Qi, Naohiro Sugita and Tadahiko Shinshi
Micromachines 2022, 13(10), 1565; https://doi.org/10.3390/mi13101565 - 21 Sep 2022
Cited by 1 | Viewed by 1689
Abstract
Electromagnetic bi-directional micropumps (EMBM) are indispensable for the development of portable devices which enable fluid transportation in forward and reverse directions. However, the high disposal cost of rare-earth magnets attached to the fluidic part and the low pump density due to multiple motors [...] Read more.
Electromagnetic bi-directional micropumps (EMBM) are indispensable for the development of portable devices which enable fluid transportation in forward and reverse directions. However, the high disposal cost of rare-earth magnets attached to the fluidic part and the low pump density due to multiple motors limit their practical application in disposable multi-channel microfluidic applications such as droplet-based oscillatory-flow (DBOF) rapid PCR amplification. Therefore, this paper presented a low-cost, disposable, high-pump-density EMBM. To reduce the disposal cost, we separated the magnets from the disposable fluidic part and used cylindrical holes to store and guide the magnet, which resulted in the ability to reuse all the magnets. To increase the pump density, we used the combination of one motor and one multi-pole ring magnet to drive several channels simultaneously. A proof-of-concept prototype with a pump density of 0.28 cm−2 was fabricated and experimentally evaluated. The fabricated micropump exhibited a maximum flow rate of 0.86 mL/min and a maximum backpressure of 0.5 kPa at a resonant frequency around 50 Hz. The developed multi-channel micropump with reusable magnets is highly beneficial to the development of low-cost and high-throughput rapid PCR amplification microchips and therefore can have a significant impact on timely infectious disease recognition and intervention. Full article
(This article belongs to the Special Issue Microfluidics: Emerging Tool in Point-of-Care Testing)
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8 pages, 3530 KiB  
Communication
The Reflectance Characteristics of an Inverse Moth-Eye Structure in a Silicon Substrate Depending on SF6/O2 Plasma Etching Conditions
by Jong-Chang Woo and Doo-Seung Um
Micromachines 2022, 13(10), 1556; https://doi.org/10.3390/mi13101556 - 20 Sep 2022
Cited by 1 | Viewed by 1546
Abstract
The global RE100 campaign is attracting attention worldwide due to climate change caused by global warming, increasingly highlighting the efficiency of renewable energy. Texturing of photovoltaic devices increases the devices’ efficiency by reducing light reflectance at their surfaces. This study introduces the change [...] Read more.
The global RE100 campaign is attracting attention worldwide due to climate change caused by global warming, increasingly highlighting the efficiency of renewable energy. Texturing of photovoltaic devices increases the devices’ efficiency by reducing light reflectance at their surfaces. This study introduces the change in light reflectance following the process conditions of plasma etching as a texturing process to increase the efficiency of photovoltaic cells. Isotropic etching was induced through plasma using SF6 gas, and the etch profile was modulated by adding O2 gas to reduce light reflectance. A high etch rate produces high surface roughness, which results in low surface reflectance properties. The inverse moth-eye structure was implemented using a square PR pattern arranged diagonally and showed the minimum reflectance in visible light at a tip spacing of 1 μm. This study can be applied to the development of higher-efficiency optical devices. Full article
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6 pages, 3076 KiB  
Article
Low Buffer Trapping Effects above 1200 V in Normally off GaN-on-Silicon Field Effect Transistors
by Idriss Abid, Youssef Hamdaoui, Jash Mehta, Joff Derluyn and Farid Medjdoub
Micromachines 2022, 13(9), 1519; https://doi.org/10.3390/mi13091519 - 14 Sep 2022
Cited by 1 | Viewed by 1687
Abstract
We report on the fabrication and electrical characterization of AlGaN/GaN normally off transistors on silicon designed for high-voltage operation. The normally off configuration was achieved with a p-gallium nitride (p-GaN) cap layer below the gate, enabling a positive threshold voltage higher than +1 [...] Read more.
We report on the fabrication and electrical characterization of AlGaN/GaN normally off transistors on silicon designed for high-voltage operation. The normally off configuration was achieved with a p-gallium nitride (p-GaN) cap layer below the gate, enabling a positive threshold voltage higher than +1 V. The buffer structure was based on AlN/GaN superlattices (SLs), delivering a vertical breakdown voltage close to 1.5 kV with a low leakage current all the way to 1200 V. With the grounded substrate, the hard breakdown voltage transistors at VGS = 0 V is 1.45 kV, corresponding to an outstanding average vertical breakdown field higher than 2.4 MV/cm. High-voltage characterizations revealed a state-of-the-art combination of breakdown voltage at VGS = 0 V together with low buffer electron trapping effects up to 1.4 kV, as assessed by means of substrate ramp measurements. Full article
(This article belongs to the Special Issue III–V Compound Semiconductors and Devices)
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16 pages, 3787 KiB  
Article
Rapid and Continuous Cryopreservation of Stem Cells with a 3D Micromixer
by Lin Ding, Sajad Razavi Bazaz, Jesus Shrestha, Hoseyn A. Amiri, Sima Mas-hafi, Balarka Banerjee, Graham Vesey, Morteza Miansari and Majid Ebrahimi Warkiani
Micromachines 2022, 13(9), 1516; https://doi.org/10.3390/mi13091516 - 13 Sep 2022
Cited by 2 | Viewed by 2136
Abstract
Cryopreservation is the final step of stem cell production before the cryostorage of the product. Conventional methods of adding cryoprotecting agents (CPA) into the cells can be manual or automated with robotic arms. However, challenging issues with these methods at industrial-scale production are [...] Read more.
Cryopreservation is the final step of stem cell production before the cryostorage of the product. Conventional methods of adding cryoprotecting agents (CPA) into the cells can be manual or automated with robotic arms. However, challenging issues with these methods at industrial-scale production are the insufficient mixing of cells and CPA, leading to damage of cells, discontinuous feeding, the batch-to-batch difference in products, and, occasionally, cross-contamination. Therefore, the current study proposes an alternative way to overcome the abovementioned challenges; a highly efficient micromixer for low-cost, continuous, labour-free, and automated mixing of stem cells with CPA solutions. Our results show that our micromixer provides a more homogenous mixing of cells and CPA compared to the manual mixing method, while the cell properties, including surface markers, differentiation potential, proliferation, morphology, and therapeutic potential, are well preserved. Full article
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16 pages, 54271 KiB  
Article
Soft Molds with Micro-Machined Internal Skeletons Improve Robustness of Flapping-Wing Robots
by Hang Gao, James Lynch and Nick Gravish
Micromachines 2022, 13(9), 1489; https://doi.org/10.3390/mi13091489 - 07 Sep 2022
Cited by 1 | Viewed by 2046
Abstract
Mobile millimeter and centimeter scale robots often use smart composite manufacturing (SCM) for the construction of body components and mechanisms. The fabrication of SCM mechanisms requires laser machining and laminating flexible, adhesive, and structural materials into small-scale hinges, transmissions, and, ultimately, wings or [...] Read more.
Mobile millimeter and centimeter scale robots often use smart composite manufacturing (SCM) for the construction of body components and mechanisms. The fabrication of SCM mechanisms requires laser machining and laminating flexible, adhesive, and structural materials into small-scale hinges, transmissions, and, ultimately, wings or legs. However, a fundamental limitation of SCM components is the plastic deformation and failure of flexures. In this work, we demonstrate that encasing SCM components in a soft silicone mold dramatically improves the durability of SCM flexure hinges and provides robustness to SCM components. We demonstrate this advance in the design of a flapping-wing robot that uses an underactuated compliant transmission fabricated with an inner SCM skeleton and exterior silicone mold. The transmission design is optimized to achieve desired wingstroke requirements and to allow for independent motion of each wing. We validate these design choices in bench-top tests, measuring transmission compliance, kinematics, and fatigue. We integrate the transmission with laminate wings and two types of actuation, demonstrating elastic energy exchange and limited lift-off capabilities. Lastly, we tested collision mitigation through flapping-wing experiments that obstructed the motion of a wing. These experiments demonstrate that an underactuated compliant transmission can provide resilience and robustness to flapping-wing robots. Full article
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9 pages, 2834 KiB  
Article
Thermal Performance Improvement of AlGaN/GaN HEMTs Using Nanocrystalline Diamond Capping Layers
by Huaixin Guo, Yizhuang Li, Xinxin Yu, Jianjun Zhou and Yuechan Kong
Micromachines 2022, 13(9), 1486; https://doi.org/10.3390/mi13091486 - 07 Sep 2022
Cited by 6 | Viewed by 1585
Abstract
Nanocrystalline diamond capping layers have been demonstrated to improve thermal management for AlGaN/GaN HEMTs. To improve the RF devices, the application of the technology, the technological approaches and device characteristics of AlGaN/GaN HEMTs with gate length less than 0.5 μm using nanocrystalline diamond [...] Read more.
Nanocrystalline diamond capping layers have been demonstrated to improve thermal management for AlGaN/GaN HEMTs. To improve the RF devices, the application of the technology, the technological approaches and device characteristics of AlGaN/GaN HEMTs with gate length less than 0.5 μm using nanocrystalline diamond capping layers have been studied systematically. The approach of diamond-before-gate has been adopted to resolve the growth of nanocrystalline diamond capping layers and compatibility with the Schottky gate of GaN HEMTs, and the processes of diamond multi-step etching technique and AlGaN barrier protection are presented to improve the technological challenge of gate metal. The GaN HEMTs with nanocrystalline diamond passivated structure have been successfully prepared; the heat dissipation capability and electrical characteristics have been evaluated. The results show the that thermal resistance of GaN HEMTs with nanocrystalline diamond passivated structure is lower than conventional SiN-GaN HEMTs by 21.4%, and the mechanism of heat transfer for NDC-GaN HEMTs is revealed by simulation method in theory. Meanwhile, the GaN HEMTs with nanocrystalline diamond passivated structure has excellent output, small signal gain and cut-off frequency characteristics, especially the current–voltage, which has a 27.9% improvement than conventional SiN-GaN HEMTs. The nanocrystalline diamond capping layers for GaN HEMTs has significant performance advantages over the conventional SiN passivated structure. Full article
(This article belongs to the Special Issue Novel Diamond Electronic Devices)
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15 pages, 6706 KiB  
Article
All-MEMS Lidar Using Hybrid Optical Architecture with Digital Micromirror Devices and a 2D-MEMS Mirror
by Eunmo Kang, Heejoo Choi, Brandon Hellman, Joshua Rodriguez, Braden Smith, Xianyue Deng, Parker Liu, Ted Liang-Tai Lee, Eric Evans, Yifan Hong, Jiafan Guan, Chuan Luo and Yuzuru Takashima
Micromachines 2022, 13(9), 1444; https://doi.org/10.3390/mi13091444 - 01 Sep 2022
Cited by 4 | Viewed by 3100
Abstract
In a lidar system, replacing moving components with solid-state devices is highly anticipated to make a reliable and compact lidar system, provided that a substantially large beam area with a large angular extent as well as high angular resolution is assured for the [...] Read more.
In a lidar system, replacing moving components with solid-state devices is highly anticipated to make a reliable and compact lidar system, provided that a substantially large beam area with a large angular extent as well as high angular resolution is assured for the lidar transmitter and receiver. A new quasi-solid-state lidar optical architecture employs a transmitter with a two-dimensional MEMS mirror for fine beam steering at a fraction of the degree of the angular resolution and is combined with a digital micromirror device for wide FOV scanning over 37 degree while sustaining a large aperture area of 140 mm squared. In the receiver, a second digital micromirror device is synchronized to the transmitter DMD, which enables a large FOV receiver. An angular resolution of 0.57°(H) by 0.23° (V) was achieved with 0.588 fps for scanning 1344 points within the field of view. Full article
(This article belongs to the Special Issue Beam Steering via Arrayed Micromachines)
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12 pages, 2554 KiB  
Article
Evaluating and Visualizing the Contribution of ECG Characteristic Waveforms for PPG-Based Blood Pressure Estimation
by Gang Ma, Yuhang Chen, Wenliang Zhu, Lesong Zheng, Hui Tang, Yong Yu and Lirong Wang
Micromachines 2022, 13(9), 1438; https://doi.org/10.3390/mi13091438 - 31 Aug 2022
Cited by 1 | Viewed by 1909
Abstract
Non-invasive continuous blood pressure monitoring is of great significance for the preventing, diagnosing, and treating of cardiovascular diseases (CVDs). Studies have demonstrated that photoplethysmogram (PPG) and electrocardiogram (ECG) signals can effectively and continuously predict blood pressure (BP). However, most of the BP estimation [...] Read more.
Non-invasive continuous blood pressure monitoring is of great significance for the preventing, diagnosing, and treating of cardiovascular diseases (CVDs). Studies have demonstrated that photoplethysmogram (PPG) and electrocardiogram (ECG) signals can effectively and continuously predict blood pressure (BP). However, most of the BP estimation models focus on the waveform features of the PPG signal, while the peak value of R-wave in ECG is only used as a time reference, and few references investigated the ECG waveforms. This paper aims to evaluate the influence of three characteristic waveforms in ECG on the improvement of BP estimation. PPG is the primary signal, and five input combinations are formed by adding ECG, P wave, QRS complex, T wave, and none. We employ five common convolutional neural networks (CNN) to validate the consistency of the contribution. Meanwhile, with the visualization of Gradient-weighted class activation mapping (Grad-CAM), we generate the heat maps and further visualize the distribution of CNN’s attention to each waveform of PPG and ECG. The heat maps show that networks pay more attention to the QRS complex and T wave. In the comparison results, the QRS complex and T wave have more contribution to minimizing errors than P wave. By separately adding P wave, QRS complex, and T wave, the average MAE of these networks reaches 7.87 mmHg, 6.57 mmHg, and 6.21 mmHg for systolic blood pressure (SBP), and 4.27 mmHg, 3.65 mmHg, and 3.73 mmHg, respectively, for diastolic blood pressure (DBP). The results of the experiment show that QRS complex and T wave deserves more attention and feature extraction like PPG waveform features in the continuous BP estimation. Full article
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10 pages, 1676 KiB  
Article
Nucleic Acid Detection with Ion Concentration Polarization Microfluidic Chip for Reduced Cycle Numbers of Polymerase Chain Reaction
by Chengzhuang Yu, Shijie Dai, Shanshan Li, Junwei Li, Hezhi Hu, Jiyu Meng, Chunyang Wei and Jie Jayne Wu
Micromachines 2022, 13(9), 1394; https://doi.org/10.3390/mi13091394 - 26 Aug 2022
Cited by 2 | Viewed by 1764
Abstract
Nucleic acid detection is widely used in disease diagnosis, food safety, environmental monitoring and many other research fields. The continuous development of rapid and sensitive new methods to detective nucleic acid is very important for practical application. In this study, we developed a [...] Read more.
Nucleic acid detection is widely used in disease diagnosis, food safety, environmental monitoring and many other research fields. The continuous development of rapid and sensitive new methods to detective nucleic acid is very important for practical application. In this study, we developed a rapid nucleic-acid detection method using polymerase chain reaction (PCR) combined with electrokinetic preconcentration based on ion concentration polarization (ICP). Using a Nafion film, the proposed ICP microfluidic chip is utilized to enrich the nucleic acid molecules amplified by PCR thermal cycles. To demonstrate the capability of the microfluidic device and the hybrid nucleic-acid detection method, we present an animal-derived component detection experiment for meat product identification applications. With the reduced cycle numbers of 24 cycles, the detection can be completed in about 35 min. The experimental results show that this work can provide a microfluidic device and straightforward method for rapid detection of nucleic acids with reduced cycle numbers. Full article
(This article belongs to the Special Issue Feature Papers of Micromachines in Biology and Biomedicine 2022)
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13 pages, 15307 KiB  
Article
Scalable Additive Construction of Arrayed Microstructures with Encoded Properties for Bioimaging
by Matthew DiSalvo, Belén Cortés-Llanos, Cody A. LaBelle, David M. Murdoch and Nancy L. Allbritton
Micromachines 2022, 13(9), 1392; https://doi.org/10.3390/mi13091392 - 25 Aug 2022
Cited by 1 | Viewed by 1397
Abstract
Microarrays are essential components of analytical instruments. The elements of microarrays may be imbued with additional functionalities and encodings using composite materials and structures, but traditional microfabrication methods present substantial barriers to fabrication, design, and scalability. In this work, a tool-free technique was [...] Read more.
Microarrays are essential components of analytical instruments. The elements of microarrays may be imbued with additional functionalities and encodings using composite materials and structures, but traditional microfabrication methods present substantial barriers to fabrication, design, and scalability. In this work, a tool-free technique was reported to additively batch-construct micromolded, composite, and arrayed microstructures. The method required only a compatible carrier fluid to deposit a material onto a substrate with some topography. Permutations of this basic fabrication approach were leveraged to gain control over the volumes and positions of deposited materials within the microstructures. As a proof of concept, cell micro-carrier arrays were constructed to demonstrate a range of designs, compositions, functionalities, and applications for composite microstructures. This approach is envisioned to enable the fabrication of complex composite biological and synthetic microelements for biosensing, cellular analysis, and biochemical screening. Full article
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11 pages, 5536 KiB  
Article
On-Skin Flexible Pressure Sensor with High Sensitivity for Portable Pulse Monitoring
by Weihao Zheng, Hongcheng Xu, Meng Wang, Qikai Duan, Yangbo Yuan, Weidong Wang and Libo Gao
Micromachines 2022, 13(9), 1390; https://doi.org/10.3390/mi13091390 - 25 Aug 2022
Cited by 11 | Viewed by 2559
Abstract
Radial artery pulse pressure contains abundant cardiovascular physiological and pathological information, which plays an important role in clinical diagnosis of traditional Chinese medical science. However, many photoelectric sensors and pressure sensors will lose a large number of waveform features in monitoring pulse, which [...] Read more.
Radial artery pulse pressure contains abundant cardiovascular physiological and pathological information, which plays an important role in clinical diagnosis of traditional Chinese medical science. However, many photoelectric sensors and pressure sensors will lose a large number of waveform features in monitoring pulse, which will make it difficult for doctors to precisely evaluate the patients’ health. In this letter, we proposed an on-skin flexible pressure sensor for monitoring radial artery pulse. The sensor consists of the MXene (Ti3C2Tx)-coated nonwoven fabrics (n-WFs) sensitive layer and laser-engraved interdigital copper electrodes. Benefiting from substantially increased conductive paths between fibers and electrodes during normal compression, the sensor obtains high sensitivity (3.187 kPa−1), fast response time (15 ms), low detection limit (11.1 Pa), and long-term durability (20,000 cycles). Furthermore, a flexible processing circuit was connected with the sensor mounted on wrist radial artery, achieving wirelessly precise monitoring of the pulse on smart phones in real time. Compared with the commercial flexible pressure sensor, our sensor successfully captures weak systolic peak precisely, showing its great clinical potential and commercial value. Full article
(This article belongs to the Special Issue Flexible and Wearable Sensors)
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10 pages, 3764 KiB  
Article
Oscillation Dynamics of Multiple Water Droplets Levitated in an Acoustic Field
by Koji Hasegawa and Manami Murata
Micromachines 2022, 13(9), 1373; https://doi.org/10.3390/mi13091373 - 23 Aug 2022
Cited by 6 | Viewed by 2230
Abstract
This study aimed to improve and investigate the oscillation dynamics and levitation stability of acoustically levitated water droplets. Contactless sample manipulation technology in mid-air has attracted significant attention in the fields of biochemistry and pharmaceutical science. Although one promising method is acoustic levitation, [...] Read more.
This study aimed to improve and investigate the oscillation dynamics and levitation stability of acoustically levitated water droplets. Contactless sample manipulation technology in mid-air has attracted significant attention in the fields of biochemistry and pharmaceutical science. Although one promising method is acoustic levitation, most studies have focused on a single sample. Therefore, it is important to determine the stability of multiple samples during acoustic levitation. Here, we aim to understand the effect of multiple-sample levitation on levitation stability in acoustic fields. We visualized the oscillatory motion of multiple levitated droplets using a high-speed video camera. To characterize the dynamics of multiple levitating droplets, the oscillation frequency and restoring force coefficients of the levitated samples, which were obtained from the experimental data, were analyzed to quantify the droplet–droplet interaction. The oscillation model of the spring-mass system was compared with the experimental results, and we found that the number of levitating droplets and their position played an important role in the levitation stability of the droplets. Our insights could help us understand the oscillatory behavior of levitated droplets to achieve more stable levitation. Full article
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13 pages, 2696 KiB  
Article
Acoustic Manipulation of Intraocular Particles
by Ari Leshno, Avraham Kenigsberg, Heli Peleg-Levy, Silvia Piperno, Alon Skaat and Hagay Shpaisman
Micromachines 2022, 13(8), 1362; https://doi.org/10.3390/mi13081362 - 21 Aug 2022
Cited by 2 | Viewed by 2468
Abstract
Various conditions cause dispersions of particulate matter to circulate inside the anterior chamber of a human eye. These dispersed particles might reduce visual acuity or promote elevation of intraocular pressure (IOP), causing secondary complications such as particle related glaucoma, which is a major [...] Read more.
Various conditions cause dispersions of particulate matter to circulate inside the anterior chamber of a human eye. These dispersed particles might reduce visual acuity or promote elevation of intraocular pressure (IOP), causing secondary complications such as particle related glaucoma, which is a major cause of blindness. Medical and surgical treatment options are available to manage these complications, yet preventive measures are not currently available. Conceptually, manipulating these dispersed particles in a way that reduces their negative impact could prevent these complications. However, as the eye is a closed system, manipulating dispersed particles in it is challenging. Standing acoustic waves have been previously shown to be a versatile tool for manipulation of bioparticles from nano-sized extracellular vesicles up to millimeter-sized organisms. Here we introduce for the first time a novel method utilizing standing acoustic waves to noninvasively manipulate intraocular particles inside the anterior chamber. Using a cylindrical acoustic resonator, we show ex vivo manipulation of pigmentary particles inside porcine eyes. We study the effect of wave intensity over time and rule out temperature changes that could damage tissues. Optical coherence tomography and histologic evaluations show no signs of damage or any other side effect that could be attributed to acoustic manipulation. Finally, we lay out a clear pathway to how this technique can be used as a non-invasive tool for preventing secondary glaucoma. This concept has the potential to control and arrange intraocular particles in specific locations without causing any damage to ocular tissue and allow aqueous humor normal outflow which is crucial for maintaining proper IOP levels. Full article
(This article belongs to the Special Issue Recent Advances in Acoustofluidics)
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16 pages, 5193 KiB  
Article
Design and Fabrication of Millimeter-Wave Frequency-Tunable Metamaterial Absorber Using MEMS Cantilever Actuators
by Myungjin Chung, Heijun Jeong, Yong-Kweon Kim, Sungjoon Lim and Chang-Wook Baek
Micromachines 2022, 13(8), 1354; https://doi.org/10.3390/mi13081354 - 20 Aug 2022
Cited by 7 | Viewed by 2125
Abstract
In this paper, a MEMS (Micro Electro Mechanical Systems)-based frequency-tunable metamaterial absorber for millimeter-wave application was demonstrated. To achieve the resonant-frequency tunability of the absorber, the unit cell of the proposed metamaterial was designed to be a symmetric split-ring resonator with a stress-induced [...] Read more.
In this paper, a MEMS (Micro Electro Mechanical Systems)-based frequency-tunable metamaterial absorber for millimeter-wave application was demonstrated. To achieve the resonant-frequency tunability of the absorber, the unit cell of the proposed metamaterial was designed to be a symmetric split-ring resonator with a stress-induced MEMS cantilever array having initial out-of-plane deflections, and the cantilevers were electrostatically actuated to generate a capacitance change. The dimensional parameters of the absorber were determined via impedance matching using a full electromagnetic simulation. The designed absorber was fabricated on a glass wafer with surface micromachining processes using a photoresist sacrificial layer and the oxygen-plasma-ashing process to release the cantilevers. The performance of the fabricated absorber was experimentally validated using a waveguide measurement setup. The absorption frequency shifted down according to the applied DC (direct current) bias voltage from 28 GHz in the initial off state to 25.5 GHz in the pull-down state with the applied voltage of 15 V. The measured reflection coefficients at those frequencies were −5.68 dB and −33.60 dB, corresponding to the peak absorptivity rates of 72.9 and 99.9%, respectively. Full article
(This article belongs to the Special Issue Design, Fabrication, Testing of MEMS/NEMS)
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12 pages, 1822 KiB  
Article
Integrated Amplitude and Phase Monitor for Micro-Actuators
by Sandra Nicole Manosalvas-Kjono, Ronald Quan and Olav Solgaard
Micromachines 2022, 13(8), 1360; https://doi.org/10.3390/mi13081360 - 20 Aug 2022
Cited by 2 | Viewed by 1792
Abstract
Micro-actuators driven on resonance maximize reach and speed; however, due to their sensitivity to environmental factors (e.g., temperature and air pressure), the amplitude and phase response must be monitored to achieve an accurate actuator position. We introduce an MEMS (microelectromechanical system) amplitude and [...] Read more.
Micro-actuators driven on resonance maximize reach and speed; however, due to their sensitivity to environmental factors (e.g., temperature and air pressure), the amplitude and phase response must be monitored to achieve an accurate actuator position. We introduce an MEMS (microelectromechanical system) amplitude and phase monitor (MAPM) with a signal-to-noise ratio of 51 dB and 11.0 kHz bandwidth, capable of simultaneously driving and sensing the movement of 1D and 2D electrostatically driven micro-actuators without modifying the chip or its packaging. The operational principle is to electromechanically modulate the amplitude of a high-frequency signal with the changing capacitance of the micro-actuator. MAPM operation is characterized and verified by simultaneously measuring the amplitude and phase frequency response of commercial micromirrors. We demonstrate that the MAPM circuitry is insensitive to complex relationships between capacitance and position of the MEMS actuators, and it is capable of giving real-time read-out of the micromirror motion. Our measurements also reveal and quantify observations of phase drift and crosstalk in 2D resonant operation. Measurements of phase changes over time under normal operation also verify the need for phase monitoring. The open-loop, high-sensitivity position sensor enables detailed characterization of dynamic micro-actuator behavior, leading to new insights and new types of operation, including improved control of nonlinear motion. Full article
(This article belongs to the Special Issue Optical MEMS, Volume III)
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11 pages, 3967 KiB  
Article
Wide-Angle Mini-Light-Emitting Diodes without Optical Lens for an Ultrathin Flexible Light Source
by Yen-Lung Chen, Wen-Chung Chin, Chun-Wei Tsai, Chang-Che Chiu, Ching-Ho Tien, Zhi-Ting Ye and Pin Han
Micromachines 2022, 13(8), 1326; https://doi.org/10.3390/mi13081326 - 16 Aug 2022
Cited by 5 | Viewed by 1939
Abstract
This report outlines a proposed method of packaging wide-angle (WA) mini-light-emitting diode (mini-LED) devices without optical lenses to create a highly efficient, ultrathin, flexible planar backlight for portable quantum dot light-emitting diode (QLED) displays. Since the luminous intensity curve for mini-LEDs generally recommends [...] Read more.
This report outlines a proposed method of packaging wide-angle (WA) mini-light-emitting diode (mini-LED) devices without optical lenses to create a highly efficient, ultrathin, flexible planar backlight for portable quantum dot light-emitting diode (QLED) displays. Since the luminous intensity curve for mini-LEDs generally recommends a beam angle of 120°, numerous LEDs are necessary to achieve a uniform surface light source for a QLED backlight. The light-guide layer and diffusion layer were packaged together on a chip surface to create WA mini-LEDs with a viewing angle of 180°. These chips were then combined with a quantum dot (QD) film and an optical film to create a high-efficiency, ultrathin, flexible planar light source with excellent color purity that can be used as a QLED display backlight. A 6 in (14.4 cm) light source was used as an experimental sample. When 1.44 W was supplied to the sample, the 3200-piece WA mini-LED with a flexible planar QLED display had a beam angle of 180° on the luminous intensity curve, a planar backlight thickness of 0.98 mm, a luminance of 10,322 nits, and a luminance uniformity of 92%. Full article
(This article belongs to the Special Issue Advanced Technologies in Electronic Packaging)
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22 pages, 5778 KiB  
Article
Oil Displacement in Calcite-Coated Microfluidic Chips via Waterflooding at Elevated Temperatures and Long Times
by Duy Le-Anh, Ashit Rao, Amy Z. Stetten, Subhash C. Ayirala, Mohammed B. Alotaibi, Michel H. G. Duits, Han Gardeniers, Ali A. AlYousef and Frieder Mugele
Micromachines 2022, 13(8), 1316; https://doi.org/10.3390/mi13081316 - 14 Aug 2022
Cited by 4 | Viewed by 2934
Abstract
In microfluidic studies of improved oil recovery, mostly pore networks with uniform depth and surface chemistry are used. To better mimic the multiple porosity length scales and surface heterogeneity of carbonate reservoirs, we coated a 2.5D glass microchannel with calcite particles. After aging [...] Read more.
In microfluidic studies of improved oil recovery, mostly pore networks with uniform depth and surface chemistry are used. To better mimic the multiple porosity length scales and surface heterogeneity of carbonate reservoirs, we coated a 2.5D glass microchannel with calcite particles. After aging with formation water and crude oil (CRO), high-salinity Water (HSW) was flooded at varying temperatures and durations. Time-resolved microscopy revealed the CRO displacements. Precise quantification of residual oil presented some challenges due to calcite-induced optical heterogeneity and brine–oil coexistence at (sub)micron length scales. Both issues were addressed using pixel-wise intensity calibration. During waterflooding, most of the ultimately produced oil gets liberated within the first pore volume (similar to glass micromodels). Increasing temperature from 22 °C to 60 °C and 90 °C produced some more oil. Waterflooding initiated directly at 90 °C produced significantly more oil than at 22 °C. Continuing HSW exposure at 90 °C for 8 days does not release additional oil; although, a spectacular growth of aqueous droplets is observed. The effect of calcite particles on CRO retention is weak on flat surfaces, where the coverage is ~20%. The calcite-rich pore edges retain significantly more oil suggesting that, in our micromodel wall roughness is a stronger determinant for oil retention than surface chemistry. Full article
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16 pages, 5904 KiB  
Article
A Miniature Soft Sensor with Origami-Inspired Self-Folding Parallel Mechanism
by Yongqi Shi, Gang Wang, Wenguang Sun, Yunfeng Ya, Shuhan Liu, Jiongjie Fang, Feiyang Yuan, Youning Duo and Li Wen
Micromachines 2022, 13(8), 1188; https://doi.org/10.3390/mi13081188 - 28 Jul 2022
Cited by 4 | Viewed by 2590
Abstract
Miniature soft sensors are crucial for the perception of soft robots. Although centimeter-scale sensors have been well developed, very few works addressed millimeter-scale, three-dimensional-shaped soft sensors capable of measuring multi-axis forces. In this work, we developed a millimeter-scale (overall size of 6 mm [...] Read more.
Miniature soft sensors are crucial for the perception of soft robots. Although centimeter-scale sensors have been well developed, very few works addressed millimeter-scale, three-dimensional-shaped soft sensors capable of measuring multi-axis forces. In this work, we developed a millimeter-scale (overall size of 6 mm × 11 mm × 11 mm) soft sensor based on liquid metal printing technology and self-folding origami parallel mechanism. The origami design of the sensor enables the soft sensor to be manufactured within the plane and then fold into a three-dimensional shape. Furthermore, the parallel mechanism allows the sensor to rotate along two orthogonal axes. We showed that the soft sensor can be self-folded (took 17 s) using a shape-memory polymer and magnets. The results also showed that the sensor prototype can reach a deformation of up to 20 mm at the tip. The sensor can realize a measurement of external loads in six directions. We also showed that the soft sensor enables underwater sensing with a minimum sensitivity of 20 mm/s water flow. This work may provide a new manufacturing method and insight into future millimeter-scale soft sensors for bio-inspired robots. Full article
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24 pages, 10600 KiB  
Article
Study on Detection of a Small Magnetic Particle Using Thin Film Magneto-Impedance Sensor with Subjecting to Strong Normal Field
by Tomoo Nakai
Micromachines 2022, 13(8), 1199; https://doi.org/10.3390/mi13081199 - 28 Jul 2022
Cited by 1 | Viewed by 1486
Abstract
This paper deals with the detection of small magnetization using a thin film magneto-impedance sensor with subjecting to strong normal field. The sensor was made by soft magnetic amorphous thin-film with uniaxial magnetic anisotropy in the width direction of the element. It was [...] Read more.
This paper deals with the detection of small magnetization using a thin film magneto-impedance sensor with subjecting to strong normal field. The sensor was made by soft magnetic amorphous thin-film with uniaxial magnetic anisotropy in the width direction of the element. It was reported that the sensor has very high sensitivity, such as pico-tesla order, when it is driven by hundreds of MHz. In this paper, a sensitive measurement method aiming for detection of a small particle or a cluster of nano-particles, having low-remanence, is proposed. The point is the application of strong normal field in the measurement area including sensor element and particle. The normal strong field is applied in the normal direction of the sensor plane in the value almost hundreds of mT. Instead of such strong normal field, the sensor keeps high sensitivity, because of the demagnetizing force in the thickness direction. A theoretical estimation for clarifying an efficiency of the method, experimental results of sensor property and sensitivity with subjecting to the normal field, and also a confirmation of detection of a small particle using the proposed method is reported. As a special mention, detection fundamentals when a applied surface normal field has a distribution and also a particle would run through in the vicinity of sensor is discussed. Full article
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14 pages, 3455 KiB  
Article
Miniature Mobile Robot Using Only One Tilted Vibration Motor
by Renjie Zhu, Yifan Zhang and Hongqiang Wang
Micromachines 2022, 13(8), 1184; https://doi.org/10.3390/mi13081184 - 27 Jul 2022
Cited by 3 | Viewed by 2436
Abstract
In miniature mobile robots, reducing the number of actuators can effectively reduce the size and weight of the robot. However, it is challenging to design a robot with as few actuators as possible without losing good motion performance. This work presented a simple-structured [...] Read more.
In miniature mobile robots, reducing the number of actuators can effectively reduce the size and weight of the robot. However, it is challenging to design a robot with as few actuators as possible without losing good motion performance. This work presented a simple-structured low-cost miniature mobile robot. It is driven by only a single tilted motor and yet is fully capable of being controlled to move forward and turn left or right on the ground. Based on the stick–slip mechanism, the robot’s motion is achieved by interplaying between the centrifugal force generated by the vibration motor tilted on the robot and the friction force of the robot. The robot’s speed can be controlled by regulating the magnitude and the period of the applied voltage. Finally, the robot can translate and rotate on the ground and follow various arbitrary paths. The prototype weighs only 11.15 g, costs $6.35, and is 20 mm in diameter and 25 mm in height. The proposed system is experimentally verified and demonstrates the controllability of the robot by the movement along a straight line, a circle, and more arbitrary paths. Full article
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13 pages, 5463 KiB  
Article
Towards Robust Thermal MEMS: Demonstration of a Novel Approach for Solid Thermal Isolation by Substrate-Level Integrated Porous Microstructures
by Ole Behrmann, Thomas Lisec and Björn Gojdka
Micromachines 2022, 13(8), 1178; https://doi.org/10.3390/mi13081178 - 26 Jul 2022
Cited by 6 | Viewed by 1857
Abstract
Most current thermal MEMS use fragile structures such as thin-film membranes or microcantilevers for thermal isolation. To increase the robustness of these devices, solid thermal insulators that are compatible with MEMS cleanroom processing are needed. This work introduces a novel approach for microscale [...] Read more.
Most current thermal MEMS use fragile structures such as thin-film membranes or microcantilevers for thermal isolation. To increase the robustness of these devices, solid thermal insulators that are compatible with MEMS cleanroom processing are needed. This work introduces a novel approach for microscale thermal isolation using porous microstructures created with the recently developed PowderMEMS wafer-level process. MEMS devices consisting of heaters on a thin-film membrane were modified with porous microstructures made from three different materials. A thermal model for the estimation of the resulting thermal conductivity was developed, and measurements for porous structures in ambient air and under vacuum were performed. The PowderMEMS process was successfully used to create microscale thermal insulators in silicon cavities at the wafer level. Measurements indicate thermal conductivities of close to 0.1 W/mK in ambient air and close to 0.04 W/mK for porous structures under vacuum for the best-performing material. The obtained thermal conductivities are lower than those reported for both glass and porous silicon, making PowderMEMS a very interesting alternative for solid microscale thermal isolation. Full article
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15 pages, 10380 KiB  
Article
THz Filters Made by Laser Ablation of Stainless Steel and Kapton Film
by Molong Han, Daniel Smith, Soon Hock Ng, Zoltan Vilagosh, Vijayakumar Anand, Tomas Katkus, Ignas Reklaitis, Haoran Mu, Meguya Ryu, Junko Morikawa, Jitraporn Vongsvivut, Dominique Appadoo and Saulius Juodkazis
Micromachines 2022, 13(8), 1170; https://doi.org/10.3390/mi13081170 - 25 Jul 2022
Cited by 3 | Viewed by 1937
Abstract
THz band-pass filters were fabricated by femtosecond-laser ablation of 25-μm-thick micro-foils of stainless steel and Kapton film, which were subsequently metal coated with a ∼70 nm film, closely matching the skin depth at the used THz spectral window. Their spectral performance [...] Read more.
THz band-pass filters were fabricated by femtosecond-laser ablation of 25-μm-thick micro-foils of stainless steel and Kapton film, which were subsequently metal coated with a ∼70 nm film, closely matching the skin depth at the used THz spectral window. Their spectral performance was tested in transmission and reflection modes at the Australian Synchrotron’s THz beamline. A 25-μm-thick Kapton film performed as a Fabry–Pérot etalon with a free spectral range (FSR) of 119 cm1, high finesse Fc17, and was tuneable over ∼10μm (at ∼5 THz band) with β=30 tilt. The structure of the THz beam focal region as extracted by the first mirror (slit) showed a complex dependence of polarisation, wavelength and position across the beam. This is important for polarisation-sensitive measurements (in both transmission and reflection) and requires normalisation at each orientation of linear polarisation. Full article
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10 pages, 2015 KiB  
Article
Design of Metal-Based Slippery Liquid-Infused Porous Surfaces (SLIPSs) with Effective Liquid Repellency Achieved with a Femtosecond Laser
by Zheng Fang, Yang Cheng, Qing Yang, Yu Lu, Chengjun Zhang, Minjing Li, Bing Du, Xun Hou and Feng Chen
Micromachines 2022, 13(8), 1160; https://doi.org/10.3390/mi13081160 - 22 Jul 2022
Cited by 5 | Viewed by 1613
Abstract
Slippery liquid-infused porous surfaces (SLIPSs) have become an effective method to provide materials with sliding performance and, thus, achieve liquid repellency, through the process of infusing lubricants into the microstructure of the surface. However, the construction of microstructures on high-strength metals is still [...] Read more.
Slippery liquid-infused porous surfaces (SLIPSs) have become an effective method to provide materials with sliding performance and, thus, achieve liquid repellency, through the process of infusing lubricants into the microstructure of the surface. However, the construction of microstructures on high-strength metals is still a significant challenge. Herein, we used a femtosecond laser with a temporally shaped Bessel beam to process NiTi alloy, and created uniform porous structures with a microhole diameter of around 4 µm, in order to store and lock lubricant. In addition, as the lubricant is an important factor that can influence the sliding properties, five different lubricants were selected to prepare the SLIPSs, and were further compared in terms of their sliding behavior. The temperature cycle test and the hydraulic pressure test were implemented to characterize the durability of the samples, and different liquids were used to investigate the possible failure under complex fluid conditions. In general, the prepared SLIPSs exhibited superior liquid repellency. We believe that, in combination with a femtosecond laser, slippery liquid-infused porous surfaces are promising for applications in a wide range of areas. Full article
(This article belongs to the Special Issue Laser Bionic Fabrication)
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9 pages, 3304 KiB  
Communication
Enzymatic and Cellular Degradation of Carbon-Based Biconcave Nanodisks
by Zhiyong Wei, Qingxin Mu, Hui Wang, Guanyou Lin and Miqin Zhang
Micromachines 2022, 13(7), 1144; https://doi.org/10.3390/mi13071144 - 19 Jul 2022
Cited by 1 | Viewed by 1471
Abstract
The assessment of the biodegradability of nanomaterials is of pragmatic importance for understanding the interactions between nanomaterials and biological systems and for the determination of ultimate fate of these materials as well as their potential use. We recently developed carbon-based biconcave nanodisks (CBBNs) [...] Read more.
The assessment of the biodegradability of nanomaterials is of pragmatic importance for understanding the interactions between nanomaterials and biological systems and for the determination of ultimate fate of these materials as well as their potential use. We recently developed carbon-based biconcave nanodisks (CBBNs) serving as a versatile nanocarrier for enhanced accumulation in tumors and combined photothermal-chemotherapy. Here, we investigate both the enzymatic and cellular degradation of CBBNs by monitoring their cellular response with electron microscopy, near-infrared absorbance spectroscopy, and cell viability and oxidative stress assessments. Our results show that CBBNs underwent significant degradation in solutions catalyzed by horseradish peroxidase (HRP) and hydrogen peroxide (H2O2), or in the presence of macrophage cells. The ability of CBBNs to be degraded in biological systems provides suitability for their future biomedical applications. Full article
(This article belongs to the Special Issue Nanoparticles in Biomedical Sciences)
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10 pages, 8561 KiB  
Article
Toward Higher Integration Density in Femtosecond-Laser-Written Programmable Photonic Circuits
by Riccardo Albiero, Ciro Pentangelo, Marco Gardina, Simone Atzeni, Francesco Ceccarelli and Roberto Osellame
Micromachines 2022, 13(7), 1145; https://doi.org/10.3390/mi13071145 - 19 Jul 2022
Cited by 5 | Viewed by 1869
Abstract
Programmability in femtosecond-laser-written integrated circuits is commonly achieved with the implementation of thermal phase shifters. Recent work has shown how such phase shifters display significantly reduced power dissipation and thermal crosstalk with the implementation of thermal isolation structures. However, the aforementioned phase shifter [...] Read more.
Programmability in femtosecond-laser-written integrated circuits is commonly achieved with the implementation of thermal phase shifters. Recent work has shown how such phase shifters display significantly reduced power dissipation and thermal crosstalk with the implementation of thermal isolation structures. However, the aforementioned phase shifter technology is based on a single gold film, which poses severe limitations on integration density and circuit complexity due to intrinsic geometrical constraints. To increase the compactness, we propose two improvements to this technology. Firstly, we fabricated thermal phase shifters with a photolithography process based on two different metal films, namely (1) chromium for microheaters and (2) copper for contact pads and interconnections. Secondly, we developed a novel curved isolation trench design that, along with a state-of-the-art curvature radius, allows for a significant reduction in the optical length of integrated circuits. As a result, curved Cr-Cu phase shifters provide a compact footprint with low parasitic series resistance and no significant increase in power dissipation (∼38 mW) and thermal crosstalk (∼20%). These results pave the way toward the fabrication of femtosecond-laser-written photonic circuits with a steep increase in terms of layout complexity. Full article
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14 pages, 4761 KiB  
Article
Lasered Graphene Microheaters Modified with Phase-Change Composites: New Approach to Smart Patch Drug Delivery
by Victoria Gilpin, Deetchaya Surandhiran, Cameron Scott, Amy Devine, Jill H. Cundell, Chris I. R. Gill, L. Kirsty Pourshahidi and James Davis
Micromachines 2022, 13(7), 1132; https://doi.org/10.3390/mi13071132 - 18 Jul 2022
Cited by 6 | Viewed by 2238
Abstract
The combination of paraffin wax and O,O′-bis(2-aminopropyl) polypropylene glycol–block–polyethylene glycol–block–polypropylene glycol was used as a phase-change material (PCM) for the controlled delivery of curcumin. The PCM was combined with a graphene-based heater derived from the laser [...] Read more.
The combination of paraffin wax and O,O′-bis(2-aminopropyl) polypropylene glycol–block–polyethylene glycol–block–polypropylene glycol was used as a phase-change material (PCM) for the controlled delivery of curcumin. The PCM was combined with a graphene-based heater derived from the laser scribing of polyimide film. This assembly provides a new approach to a smart patch through which release can be electronically controlled, allowing repetitive dosing. Rather than relying on passive diffusion, delivery is induced and terminated through the controlled heating of the PCM with transfer only occurring when the PCM transitions from solid to liquid. The material properties of the device and release characteristics of the strategy under repetitive dosing are critically assessed. The delivery yield of curcumin was found to be 3.5 µg (4.5 µg/cm2) per 3 min thermal cycle. Full article
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11 pages, 2038 KiB  
Article
A Continuous Microfluidic Concentrator for High-Sensitivity Detection of Bacteria in Water Sources
by Seunghee Choo, Hyunjung Lim, Tae Eun Kim, Jion Park, Kyu Been Park, Chaewon Park, Chae Seung Lim and Jeonghun Nam
Micromachines 2022, 13(7), 1093; https://doi.org/10.3390/mi13071093 - 10 Jul 2022
Cited by 2 | Viewed by 1573
Abstract
Water contamination is a critical issue that threatens global public health. To enable the rapid and precise monitoring of pathogen contamination in drinking water, a concentration technique for bacterial cells is required to address the limitations of current detection methods, including the culture [...] Read more.
Water contamination is a critical issue that threatens global public health. To enable the rapid and precise monitoring of pathogen contamination in drinking water, a concentration technique for bacterial cells is required to address the limitations of current detection methods, including the culture method and polymerase chain reaction. Here we present a viscoelastic microfluidic device for the continuous concentration of bacterial cells. To validate the device performance for cell concentration, the flow characteristics of 2-μm particles were estimated in viscoelastic fluids at different concentrations and flow rates. Based on the particle flow distributions, the flow rate factor, which is defined as the ratio of the inlet flow rate to the outlet flow rate at the center outlet, was optimized to achieve highly concentrated bacterial cells by removal of the additional suspending medium. The flow characteristics of 0.5-, 0.7-, and 1.0-μm-diameter particles were evaluated to consider the effect of a wide spectrum of bacterial size distribution. Finally, the concentration factor of bacterial cells, Staphylococcus aureus, suspended in a 2000-ppm polyethylene oxide solution was found to be 20.6-fold at a flow rate of 20 μL/min and a flow rate factor of 40. Full article
(This article belongs to the Special Issue Micro/Nanofluidics for Cell and Particle Manipulation)
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12 pages, 7124 KiB  
Article
Strain Rate Dependence of Compressive Mechanical Properties of Polyamide and Its Composite Fabricated Using Selective Laser Sintering under Saturated-Water Conditions
by Xiaodong Zheng, Jiahuan Meng and Yang Liu
Micromachines 2022, 13(7), 1041; https://doi.org/10.3390/mi13071041 - 30 Jun 2022
Cited by 4 | Viewed by 1416
Abstract
In this work, polyamide 12 (PA12) and carbon fiber reinforced polyamide 12 (CF/PA12) composites were fabricated using selective laser sintering (SLS), and the coupling effects of the strain rate and hygroscopicity on the compressive mechanical properties were investigated. The results showed that the [...] Read more.
In this work, polyamide 12 (PA12) and carbon fiber reinforced polyamide 12 (CF/PA12) composites were fabricated using selective laser sintering (SLS), and the coupling effects of the strain rate and hygroscopicity on the compressive mechanical properties were investigated. The results showed that the CF/PA12 had a shorter saturation time and lower saturated water absorption under the same conditions, indicating that the SLS of CF/PA12 had lower hydrophilia and higher water resistance when compared to the SLS of PA12. It was observed that as the strain rate increased, and the ultimate compression strength and the yield strength monotonically increased with almost the same slope, indicating that the strain rate had the same positive correlation with the compressive strength of the SLS of PA12 and CF/PA12. The water immersion results showed a significant reduction of 15% in the yield strength of SLS of PA12, but not very significant in CF/PA12. This indicated that the carbon fiber was favorable for maintaining the mechanical properties of polyamide 12 after absorbing water. The findings in this work provide a basic knowledge of the mechanical properties of SLS polyamide under different loading and saturated-water conditions and thus is helpful to widen the application of SLS products in harsh environments. Full article
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11 pages, 2485 KiB  
Article
A Fiber-Based SPR Aptasensor for the In Vitro Detection of Inflammation Biomarkers
by Yu Hua, Ridong Wang and Dachao Li
Micromachines 2022, 13(7), 1036; https://doi.org/10.3390/mi13071036 - 29 Jun 2022
Cited by 5 | Viewed by 2417
Abstract
It is widely accepted that the abnormal concentrations of different inflammation biomarkers can be used for the early diagnosis of cardiovascular disease (CVD). Currently, many reported strategies, which require extra report tags or bulky detection equipment, are not portable enough for onsite inflammation [...] Read more.
It is widely accepted that the abnormal concentrations of different inflammation biomarkers can be used for the early diagnosis of cardiovascular disease (CVD). Currently, many reported strategies, which require extra report tags or bulky detection equipment, are not portable enough for onsite inflammation biomarker detection. In this work, a fiber-based surface plasmon resonance (SPR) biosensor decorated with DNA aptamers, which were specific to two typical inflammation biomarkers, C-reactive protein (CRP) and cardiac troponin I (cTn-I), was developed. By optimizing the surface concentration of the DNA aptamer, the proposed sensor could achieve a limit of detection (LOD) of 1.7 nM (0.204 μg/mL) and 2.5 nM (57.5 ng/mL) to CRP and cTn-I, respectively. Additionally, this biosensor could also be used to detect other biomarkers by immobilizing corresponding specific DNA aptamers. Integrated with a miniaturized spectral analysis device, the proposed sensor could be applied for constructing a portable instrument to provide the point of care testing (POCT) for CVD patients. Full article
(This article belongs to the Special Issue Physics in Micro/Nano Devices: From Fundamental to Application)
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13 pages, 9121 KiB  
Article
From Microtiter Plates to Droplets—There and Back Again
by Thomas Henkel, Günter Mayer, Jörg Hampl, Jialan Cao, Linda Ehrhardt, Andreas Schober and Gregor Alexander Groß
Micromachines 2022, 13(7), 1022; https://doi.org/10.3390/mi13071022 - 28 Jun 2022
Cited by 1 | Viewed by 2091
Abstract
Droplet-based microfluidic screening techniques can benefit from interfacing established microtiter plate-based screening and sample management workflows. Interfacing tools are required both for loading preconfigured microtiter-plate (MTP)-based sample collections into droplets and for dispensing the used droplets samples back into MTPs for subsequent storage [...] Read more.
Droplet-based microfluidic screening techniques can benefit from interfacing established microtiter plate-based screening and sample management workflows. Interfacing tools are required both for loading preconfigured microtiter-plate (MTP)-based sample collections into droplets and for dispensing the used droplets samples back into MTPs for subsequent storage or further processing. Here, we present a collection of Digital Microfluidic Pipetting Tips (DMPTs) with integrated facilities for droplet generation and manipulation together with a robotic system for its operation. This combination serves as a bidirectional sampling interface for sample transfer from wells into droplets (w2d) and vice versa droplets into wells (d2w). The DMPT were designed to fit into 96-deep-well MTPs and prepared from glass by means of microsystems technology. The aspirated samples are converted into the channel-confined droplets’ sequences separated by an immiscible carrier medium. To comply with the demands of dose-response assays, up to three additional assay compound solutions can be added to the sample droplets. To enable different procedural assay protocols, four different DMPT variants were made. In this way, droplet series with gradually changing composition can be generated for, e.g., 2D screening purposes. The developed DMPT and their common fluidic connector are described here. To handle the opposite transfer d2w, a robotic transfer system was set up and is described briefly. Full article
(This article belongs to the Special Issue Droplet-Based Microfluidic Devices)
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18 pages, 12715 KiB  
Article
Dielectrophoresis from the System’s Point of View: A Tale of Inhomogeneous Object Polarization, Mirror Charges, High Repelling and Snap-to-Surface Forces and Complex Trajectories Featuring Bifurcation Points and Watersheds
by Jan Gimsa and Michal M. Radai
Micromachines 2022, 13(7), 1002; https://doi.org/10.3390/mi13071002 - 26 Jun 2022
Cited by 3 | Viewed by 1648
Abstract
Microscopic objects change the apparent permittivity and conductivity of aqueous systems and thus their overall polarizability. In inhomogeneous fields, dielectrophoresis (DEP) increases the overall polarizability of the system by moving more highly polarizable objects or media to locations with a higher field. The [...] Read more.
Microscopic objects change the apparent permittivity and conductivity of aqueous systems and thus their overall polarizability. In inhomogeneous fields, dielectrophoresis (DEP) increases the overall polarizability of the system by moving more highly polarizable objects or media to locations with a higher field. The DEP force is usually calculated from the object’s point of view using the interaction of the object’s induced dipole or multipole moments with the inducing field. Recently, we were able to derive the DEP force from the work required to charge suspension volumes with a single object moving in an inhomogeneous field. The capacitance of the volumes was described using Maxwell–Wagner’s mixing equation. Here, we generalize this system’s-point-of-view approach describing the overall polarizability of the whole DEP system as a function of the position of the object with a numerical “conductance field”. As an example, we consider high- and low conductive 200 µm 2D spheres in a square 1 × 1 mm chamber with plain-versus-pointed electrode configuration. For given starting points, the trajectories of the sphere and the corresponding DEP forces were calculated from the conductance gradients. The model describes watersheds; saddle points; attractive and repulsive forces in front of the pointed electrode, increased by factors >600 compared to forces in the chamber volume where the classical dipole approach remains applicable; and DEP motions with and against the field gradient under “positive DEP” conditions. We believe that our approach can explain experimental findings such as the accumulation of viruses and proteins, where the dipole approach cannot account for sufficiently high holding forces to defeat Brownian motion. Full article
(This article belongs to the Special Issue Micromachines for Dielectrophoresis, Volume II)
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11 pages, 2600 KiB  
Article
A Novel Fluidic Platform for Semi-Automated Cell Culture into Multiwell-like Bioreactors
by Francesca Maria Orecchio, Vito Tommaso, Tommaso Santaniello, Sara Castiglioni, Federico Pezzotta, Andrea Monti, Francesco Butera, Jeanette Anne Marie Maier and Paolo Milani
Micromachines 2022, 13(7), 994; https://doi.org/10.3390/mi13070994 - 24 Jun 2022
Cited by 1 | Viewed by 2256
Abstract
In this work, we developed and characterized a novel fluidic platform that enables long-term in vitro cell culture in a semi-automated fashion. The system is constituted by a control unit provided with a piezoelectric pump, miniaturized valves, and a microfluidic network for management [...] Read more.
In this work, we developed and characterized a novel fluidic platform that enables long-term in vitro cell culture in a semi-automated fashion. The system is constituted by a control unit provided with a piezoelectric pump, miniaturized valves, and a microfluidic network for management and fine control of reagents’ flow, connected to a disposable polymeric culture unit resembling the traditional multiwell-like design. As a proof of principle, Human Umbilical Vein Endothelial Cells (HUVEC) and Human Mesenchymal Stem Cells (hMSC) were seeded and cultured into the cell culture unit. The proliferation rate of HUVEC and the osteogenic differentiation of hMSC were assessed and compared to standard culture in Petri dishes. The results obtained demonstrated that our approach is suitable to perform semi-automated cell culture protocols, minimizing the contribution of human operators and allowing the standardization and reproducibility of the procedures. We believe that the proposed system constitutes a promising solution for the realization of user-friendly automated control systems that will favor the standardization of cell culture processes for cell factories, drug testing, and biomedical research. Full article
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18 pages, 4498 KiB  
Article
The Thickness and Structure of Dip-Coated Polymer Films in the Liquid and Solid States
by Zhao Zhang, Fei Peng and Konstantin G. Kornev
Micromachines 2022, 13(7), 982; https://doi.org/10.3390/mi13070982 - 22 Jun 2022
Cited by 9 | Viewed by 2234
Abstract
Films formed by dip coating brass wires with dilute and semi-dilute solutions of polyvinyl butyral in benzyl alcohol were studied in their liquid and solid states. While dilute and semi-dilute solutions behaved as Maxwell viscoelastic fluids, the thickness of the liquid films followed [...] Read more.
Films formed by dip coating brass wires with dilute and semi-dilute solutions of polyvinyl butyral in benzyl alcohol were studied in their liquid and solid states. While dilute and semi-dilute solutions behaved as Maxwell viscoelastic fluids, the thickness of the liquid films followed the Landau-Levich-Derjaguin prediction for Newtonian fluids. At a very slow rate of coating, the film thickness was difficult to evaluate. Therefore, the dynamic contact angle was studied in detail. We discovered that polymer additives preserve the advancing contact angle at its static value while the receding contact angle follows the Cox–Voinov theory. In contrast, the thickness of solid films does not correlate with the Landau-Levich-Derjaguin predictions. Only solutions of high-molecular-weight polymers form smooth solid films. Solutions of low-molecular-weight polymers may form either solid films with an inhomogeneous roughness or solid polymer domains separated by the dry substrate. In technological applications, very dilute polymer solutions of high-molecular-weight polymers can be used to avoid inhomogeneities in solid films. These solutions form smooth solid films, and the film thickness can be controlled by the experimental coating conditions. Full article
(This article belongs to the Special Issue Interfaces in Microfluidics)
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14 pages, 7042 KiB  
Article
Design and Analysis of a PDLC-Based Reconfigurable Hilbert Fractal Antenna for Large and Fine THz Frequency Tuning
by Prabir Garu and Wei-Chih Wang
Micromachines 2022, 13(6), 964; https://doi.org/10.3390/mi13060964 - 18 Jun 2022
Cited by 3 | Viewed by 2407
Abstract
The proposed reconfigurable radiating antenna design is based on the integration of a reconfigurable fractal antenna and electro-optic substrate material. This antenna can be adjusted to achieve either re-configurability or tunability in the desired frequency range for wireless systems. The electromagnetic characteristics of [...] Read more.
The proposed reconfigurable radiating antenna design is based on the integration of a reconfigurable fractal antenna and electro-optic substrate material. This antenna can be adjusted to achieve either re-configurability or tunability in the desired frequency range for wireless systems. The electromagnetic characteristics of the fractal antenna are manipulated at both the level of fractal geometry, electrical length and dielectric substrate. The designed antenna features multiband responses, in which the geometry and length change create a large frequency shift and the dielectric change using polymer dispersed liquid crystal (PDLC) creates fine and/or continuous tuning. The far field and scattering properties of the antenna are analyzed using the Computer Simulation Technology (CST) Microwave Studio Suite. The proposed approach has successfully demonstrated reconfigurable switching for up to four frequency bands between 0.2 and 0.6 THz. The dielectric constant change in the PDLC substrate shows fine and continuous frequency tuning with an 8% maximum frequency shift when operating around 0.54 THz and a high directivity of 7.35 dBi at 0.54 THz and 8.43 dBi at 0.504 THz. The antenna can also realize a peak gain of 4.29 dBi at 0.504 THz in the extraordinary polarization state of PDLC. The designed antenna can be readily integrated in the current communication devices, such as satellites, smart phones, laptops, and other portable electronic devices, due to its compact geometry and IC compatible design. In satellite applications, the proposed antenna can play a significant role in terms of security. The antenna could be extremely useful for satellites that want to keep their information secret; by constantly switching their operating frequency, spy satellites can evade detection and data collection from enemy ears. Full article
(This article belongs to the Section E:Engineering and Technology)
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15 pages, 8048 KiB  
Article
High Performance Eight-Port Dual-Band MIMO Antenna System for 5G Devices
by Saad Hassan Kiani, Muhammad Abbas Khan, Umair Rafique, Mohamed Marey, Abdullah G. Alharbi, Hala Mostafa, Muhammad Amir Khan and Syed Muzahir Abbas
Micromachines 2022, 13(6), 959; https://doi.org/10.3390/mi13060959 - 17 Jun 2022
Cited by 9 | Viewed by 2328
Abstract
This study provides an eight-component multiple-input multiple-output (MIMO) antenna architecture for fifth-generation (5G) mobile communication systems. The single antenna element is comprised of an L-shaped radiating component, an L-shaped parasitic element, and a ground plane with a rectangular slot. The main element with [...] Read more.
This study provides an eight-component multiple-input multiple-output (MIMO) antenna architecture for fifth-generation (5G) mobile communication systems. The single antenna element is comprised of an L-shaped radiating component, an L-shaped parasitic element, and a ground plane with a rectangular slot. The main element with a slot-loaded ground plane helps to draw current from a coaxial feed from the other side of the board, while the parasitic element helps to elongate the current path and improve the impedance of the system. This enables the system to radiate at two different frequency ranges: 3.34–3.7 GHz and 4.67–5.08 GHz, with 360 MHz and 410 MHz bandwidths, respectively. For MIMO configuration, the radiating elements are designed on either side of a 0.8 mm thick FR-4 substrate, allowing space to accommodate a battery, radio frequency (RF) systems and subsystems, and camera and sensor modules. The corner and the middle elements are arranged in such a manner so that they can provide spatial and pattern diversity. Furthermore, at least 12 dB of isolation is established between any two radiating elements. Various MIMO performance parameters were evaluated, e.g., mean effective gain (MEG), channel capacity (CC), envelope correlation coefficient (ECC), realized gain, far-field characteristics, and efficiency. Single- and double-hand mode evaluations were performed to further demonstrate the capability of the proposed MIMO antenna. A prototype of the proposed MIMO antenna was manufactured and assessed to verify the simulated data. The measured and simulated results were found to be in good agreement. On the basis of its performance characteristics, the designed MIMO system could be used in 5G communication systems. Full article
(This article belongs to the Special Issue Microwave Antennas: From Fundamental Research to Applications)
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12 pages, 3968 KiB  
Article
Dual-Wavelength Photoacoustic Computed Tomography with Piezoelectric Ring-Array Transducer for Imaging of Indocyanine Green Liposomes Aggregation in Tumors
by Xin Sun, Han Shan, Qibo Lin, Ziyan Chen, Dongxu Liu, Zhankai Liu, Kuan Peng and Zeyu Chen
Micromachines 2022, 13(6), 946; https://doi.org/10.3390/mi13060946 - 15 Jun 2022
Cited by 3 | Viewed by 1810
Abstract
Recently, indocyanine green (ICG), as an FDA-approved dye, has been widely used for phototherapy. It is essential to obtain information on the migration and aggregation of ICG in deep tissues. However, existing fluorescence imaging platforms are not able to obtain the structural information [...] Read more.
Recently, indocyanine green (ICG), as an FDA-approved dye, has been widely used for phototherapy. It is essential to obtain information on the migration and aggregation of ICG in deep tissues. However, existing fluorescence imaging platforms are not able to obtain the structural information of the tissues. Here, we prepared ICG liposomes (ICG-Lips) and built a dual-wavelength photoacoustic computed tomography (PACT) system with piezoelectric ring-array transducer to image the aggregation of ICG-Lips in tumors to guide phototherapy. Visible 780 nm light excited the photoacoustic (PA) effects of the ICG-Lips and near-infrared 1064 nm light provided the imaging of the surrounding tissues. The aggregation of ICG-Lips within the tumor and the surrounding tissues was visualized by PACT in real time. This work indicates that PACT with piezoelectric ring-array transducer has great potential in the real-time monitoring of in vivo drug distribution. Full article
(This article belongs to the Special Issue Piezoelectric Ultrasound Transducer for Biomedical Applications)
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17 pages, 5572 KiB  
Article
Wafer-Level Vacuum-Packaged Electric Field Microsensor: Structure Design, Theoretical Model, Microfabrication, and Characterization
by Jun Liu, Shanhong Xia, Chunrong Peng, Zhengwei Wu, Zhaozhi Chu, Zhouwei Zhang, Hucheng Lei, Fengjie Zheng and Wei Zhang
Micromachines 2022, 13(6), 928; https://doi.org/10.3390/mi13060928 - 11 Jun 2022
Cited by 5 | Viewed by 1657
Abstract
This paper proposes a novel wafer-level vacuum packaged electric field microsensor (EFM) featuring a high quality factor, low driving voltage, low noise, and low power consumption. The silicon-on-insulator (SOI) conductive handle layer was innovatively used as the sensing channel to transmit the external [...] Read more.
This paper proposes a novel wafer-level vacuum packaged electric field microsensor (EFM) featuring a high quality factor, low driving voltage, low noise, and low power consumption. The silicon-on-insulator (SOI) conductive handle layer was innovatively used as the sensing channel to transmit the external electric field to the surface of the sensitive structure, and the vacuum packaging was realized through anodic bonding between the SOI and glass-on-silicon (GOS). The fabrication process was designed and successfully realized, featured with a simplified process and highly efficient batch manufacturing, and the final chip size was only 5 × 5 mm. A theoretical model for the packaged device was set up. The influence of key parameters in the packaging structure on the output characteristics of the microsensor was analyzed on the basis of the proposed model. Experiments were conducted on the wafer-level vacuum-packaged EFM to characterize its performance. Experimental results show that, under the condition of applying 5 V DC driving voltage, the required AC driving voltage of the sensor was only 0.05 VP, and the feedthrough was only 4.2 mV. The quality factor was higher than 5000 and was maintained with no drop in the 50-day test. The vacuum in the chamber of the sensor was about 10 Pa. A sensitivity of 0.16 mV/(kV/m) was achieved within the electrostatic field range of 0–50 kV/m. The linearity of the microsensor was 1.62%, and the uncertainty was 4.42%. Full article
(This article belongs to the Section A:Physics)
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14 pages, 1003 KiB  
Article
Optimizing Efficiency and Motility of a Polyvalent Molecular Motor
by Mark Rempel and Eldon Emberly
Micromachines 2022, 13(6), 914; https://doi.org/10.3390/mi13060914 - 09 Jun 2022
Viewed by 1238
Abstract
Molecular motors play a vital role in the transport of material within the cell. A family of motors of growing interest are burnt bridge ratchets (BBRs). BBRs rectify spatial fluctuations into directed motion by creating and destroying motor-substrate bonds. It has been shown [...] Read more.
Molecular motors play a vital role in the transport of material within the cell. A family of motors of growing interest are burnt bridge ratchets (BBRs). BBRs rectify spatial fluctuations into directed motion by creating and destroying motor-substrate bonds. It has been shown that the motility of a BBR can be optimized as a function of the system parameters. However, the amount of energy input required to generate such motion and the resulting efficiency has been less well characterized. Here, using a deterministic model, we calculate the efficiency of a particular type of BBR, namely a polyvalent hub interacting with a surface of substrate. We find that there is an optimal burn rate and substrate concentration that leads to optimal efficiency. Additionally, the substrate turnover rate has important implications on motor efficiency. We also consider the effects of force-dependent unbinding on the efficiency and find that under certain conditions the motor works more efficiently when bond breaking is included. Our results provide guidance for how to optimize the efficiency of BBRs. Full article
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15 pages, 3859 KiB  
Article
Contributions of Red Blood Cell Sedimentation in a Driving Syringe to Blood Flow in Capillary Channels
by Yang Jun Kang
Micromachines 2022, 13(6), 909; https://doi.org/10.3390/mi13060909 - 08 Jun 2022
Cited by 4 | Viewed by 1753
Abstract
The erythrocyte sedimentation rate (ESR), which has been commonly used to detect physiological and pathological diseases in clinical settings, has been quantified using an interface in a vertical tube. However, previous methods do not provide biophysical information on blood during the ESR test. [...] Read more.
The erythrocyte sedimentation rate (ESR), which has been commonly used to detect physiological and pathological diseases in clinical settings, has been quantified using an interface in a vertical tube. However, previous methods do not provide biophysical information on blood during the ESR test. Therefore, it is necessary to quantify the individual contributions in terms of viscosity and pressure. In this study, to quantify RBC sedimentation, the image intensity (Ib) and interface (β) were obtained by analyzing the blood flow in the microfluidic channels. Based on threshold image intensity, the corresponding interfaces of RBCs (Ib > 0.15) and diluent (Ib < 0.15) were employed to obtain the viscosities (µb, µ0) and junction pressures (Pb, P0). Two coefficients (CH1, CH2) obtained from the empirical formulas (µb = µ0 [1 + CH1], Pb = P0 [1 + CH2]) were calculated to quantify RBC sedimentation. The present method was then adopted to detect differences in RBC sedimentation for various suspended blood samples (healthy RBCs suspended in dextran solutions or plasma). Based on the experimental results, four parameters (µ0, P0, CH1, and CH2) are considered to be effective for quantifying the contributions of the hematocrit and diluent. Two coefficients exhibited more consistent trends than the conventional ESR method. In conclusion, the proposed method can effectively detect RBC sedimentation. Full article
(This article belongs to the Special Issue Interfaces in Microfluidics)
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11 pages, 2069 KiB  
Article
A Highly Accurate Method for Deformation Reconstruction of Smart Deformable Structures Based on Flexible Strain Sensors
by Chengguo Yu, Xinyu Gao, Wenlin Liao, Zhili Zhang and Guishan Wang
Micromachines 2022, 13(6), 910; https://doi.org/10.3390/mi13060910 - 08 Jun 2022
Cited by 1 | Viewed by 1545
Abstract
Smart deformable structures that integrate designing, sensing, and controlling technology have been widely applied in the fields of aerospace, robotics, and biomedical engineering due to their multi-functional requirements. The deformation reconstruction method essential for security monitoring and shape controlling, especially for the large [...] Read more.
Smart deformable structures that integrate designing, sensing, and controlling technology have been widely applied in the fields of aerospace, robotics, and biomedical engineering due to their multi-functional requirements. The deformation reconstruction method essential for security monitoring and shape controlling, especially for the large deflection deformation, remains a challenge on accuracy and efficiency. This paper takes a wind tunnel’s fixed-flexible nozzle (FFN) plate as the research object to develop a highly accurate deformation reconstruction method based on sensing information from flexible strain sensors. The mechanical behaviors of the FFN plate with large deflection deformation, which is modeled as a cantilever beam, are studied to analyze the relationship of the strain and moment. Furthermore, the large deflection factor and shell bending theory are creatively utilized to derive and modify the strain–moment based reconstruction method (SMRM), where the contour of the FFN plate is solved by particular elliptic integrals. As a result, structural simulation based on ABAQUS further demonstrates that the reconstruction error of SMRM is 21.13% less than that of the classic Ko-based reconstruction method (KORM). An FFN prototype accompanied by customized flexible sensors is developed to evaluate the accuracy and efficiency of the SMRM, resulting in a maximum relative error of 3.97% that is acceptable for practical applications in smart deformable structures, not limited to the FFN plate. Full article
(This article belongs to the Special Issue Structural Analyses and Designs for Flexible/Stretchable Electronics)
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