Progress in MEMS/NEMS Devices

A special issue of Electronics (ISSN 2079-9292). This special issue belongs to the section "Microelectronics".

Deadline for manuscript submissions: closed (31 October 2019) | Viewed by 11916

Special Issue Editor

University of South-Eastern Norway, Raveien 215, No-3199 Horten, Norway
Interests: micro- and nanotechnologies; microsystems; microelectromechanical systems (mems); silicon sensor technologies; semiconductor sensor technologies; optoelectronic sensor technologies; packaging & interconnection technologies for micro- and nanotechnologies
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Special Issue Information

Dear Colleagues,

Ever since they first emerged as a spinoff from integrated circuit technology, MEMS/NEMS devices have experienced progress that has not only been remarkable but is still rapidly progressing. This progress has been and continues to be accelerated by several “killer applications”, starting with automotive applications such as airbag accelerometers and later on with consumer applications such as navigation sensors in mobile phones and smart watches. What is more, cost has been plummeting all the while performance has dramatically increased. This progress is steadily opening up new applications, like home appliances, increasing the market volume further both in the number of devices and in market size. MEMS/NEMS microsensors have been the dominant feature, but MEMS/NEMS microactuators like inkjet printer nozzles and micro mirrors for optical applications like digital projectors are also progressing steadily. Silicon is the dominantly used material exploiting silicon micromachining; at first with bulk micromachining but increasingly also with surface micromachined devices, driven mainly by the advantage of their low cost. Other material platforms are also used in niche applications, for instance, RF-MEMS switches made in gallium arsenide used for microwave applications. Front-end electronics for MEMS/NEMS devices are increasingly integrated into packaged micro- and nanosystems, mostly in hybrid configuration with a separate IC chip, but more and more as monolithic chips containing both the MEMS/NEMS device and the electronics. Monolithic chip integration is technologically challenging, with a high nonrecurring engineering (NRE) cost, and mostly used for high volume production where the high NRE cost can be recaptured, or high-end applications where it gives an advantageous performance. Worldwide, excellent research activities on MEMS/NEMS devices are steadily contributing to the progress of the state-of-the-art, and in this Special Issue, we will highlight work of excellence in the field.

Prof. Dr. Per Ohlckers
Guest Editor

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Keywords

  • MEMS devices
  • NEMS devices
  • micro- and nanosystems
  • Microsensors
  • Microactuators
  • Silicon micromachining
  • Bulk micromachining
  • Surface micromachining
  • Front-end electronics
  • Monolithic integration

Published Papers (3 papers)

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Research

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18 pages, 6731 KiB  
Article
A Compound Control System for FR4-Based Electromagnetic Scanning Micrograting
by Fan Yu, Quan Wen, Hongjie Lei, Liangkun Huang and Zhiyu Wen
Electronics 2019, 8(7), 770; https://doi.org/10.3390/electronics8070770 - 10 Jul 2019
Cited by 4 | Viewed by 2658
Abstract
This paper presents a compound control system for precise control of the flame-retardant 4 (FR4)-based electromagnetic scanning micrograting. It mainly consists of a frequency controller and an angle controller. A dual closed-loop structure consisting of a current loop and an angle loop was [...] Read more.
This paper presents a compound control system for precise control of the flame-retardant 4 (FR4)-based electromagnetic scanning micrograting. It mainly consists of a frequency controller and an angle controller. A dual closed-loop structure consisting of a current loop and an angle loop was designed in the angle controller. In addition, the incremental proportional–integral–derivative (PID) control algorithm was designed in the current loop, and the fuzzy-PID control algorithm was employed in the angle loop. From the experimental results, the frequency controller can effectively track the real-time resonant frequency of the scanning micrograting with a tracking accuracy of 0.1 Hz. The overshoot of the scanning micrograting is eliminated. Compared to an open-loop control system, the control system presented in this work reduces the steady-state error of the scanning micrograting from 1.122% to 0.243%. The control accuracy of the compound control system is 0.02°. The anti-interference recovery time of the scanning micrograting was reduced from 550 ms to 181 ms, and the long-term stability was increased from 2.94% to 0.12%. In the compound control system presented in this paper, the crucial parameters of the FR4-based electromagnetic scanning micrograting, including motion accuracy, anti-interference ability, and long-term stability, were effectively improved. Full article
(This article belongs to the Special Issue Progress in MEMS/NEMS Devices)
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Review

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26 pages, 1505 KiB  
Review
The Mechanical Effects Influencing on the Design of RF MEMS Switches
by Igor E. Lysenko, Alexey V. Tkachenko, Olga A. Ezhova, Boris G. Konoplev, Eugeny A. Ryndin and Elena V. Sherova
Electronics 2020, 9(2), 207; https://doi.org/10.3390/electronics9020207 - 22 Jan 2020
Cited by 14 | Viewed by 5011
Abstract
Radio-frequency switches manufactured by microelectromechanical systems technology are now widely used in aerospace systems and other mobile installations for various purposes. In these operating conditions, these devices are often exposed to intense mechanical environmental influences that have a strong impact on their operation. [...] Read more.
Radio-frequency switches manufactured by microelectromechanical systems technology are now widely used in aerospace systems and other mobile installations for various purposes. In these operating conditions, these devices are often exposed to intense mechanical environmental influences that have a strong impact on their operation. These negative effects can lead to unwanted short-circuit or open-circuit in the radio-frequency transmission line or to irreversible damage to structural elements. Such a violation in the operation of radio-frequency microelectromechanical switches leads to errors and improper functioning of the electronic equipment in which they are integrated. Thus, this review is devoted to the analysis of the origin of these negative intense mechanical effects of the environment, their classification, and analysis, as well as a review of methods to reduce or prevent their negative impact on the design of radio-frequency microelectromechanical switches. Full article
(This article belongs to the Special Issue Progress in MEMS/NEMS Devices)
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14 pages, 4217 KiB  
Review
Recent Advancements in Inertial Micro-Switches
by Yingchun Peng, Yanling Sun, Guoxi Luo, Guoguo Wu and Tao Zhang
Electronics 2019, 8(6), 648; https://doi.org/10.3390/electronics8060648 - 09 Jun 2019
Cited by 9 | Viewed by 3737
Abstract
Inertial micro-switches have great potential in the applications of acceleration sensing, due to the integrated advantages of a small size, high integration level, and low or even no power consumption. This paper presents an overview of the recent advancements made in research on [...] Read more.
Inertial micro-switches have great potential in the applications of acceleration sensing, due to the integrated advantages of a small size, high integration level, and low or even no power consumption. This paper presents an overview of the recent advancements made in research on the sensitive direction, threshold acceleration, contact effect, and threshold accuracy of inertial micro-switches. The reviewed switches were categorized according to the performance parameters, including multi-directional switches, multi-threshold switches, persistent closed switches, flexible-electrode switches, and low-g high-threshold-accuracy switches. The current challenges and prospects are also discussed. Full article
(This article belongs to the Special Issue Progress in MEMS/NEMS Devices)
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