Applications of MEMS and QCM in Smart Sensor Systems

A special issue of Electronics (ISSN 2079-9292). This special issue belongs to the section "Microelectronics".

Deadline for manuscript submissions: 15 October 2025 | Viewed by 2985

Special Issue Editors


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Guest Editor
School of Automation Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China
Interests: new sensing and detection technologies; micro-nano electronic devices; MEMS smart sensors and intelligent microsystems; flexible sensors; time–frequency signal detection and control

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Guest Editor
Institute of Marine Science and Technology, Shandong University, Qingdao, Shandong 266237, China
Interests: 2D materials-based devices

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Guest Editor
School of Integrated Circuits, Tsinghua University, Beijing 100084, China
Interests: novel materials and photoelectronic devices

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Guest Editor
Aerospace Information Research Institute (AIR), Chinese Academy of Sciences, Beijing 100190, China
Interests: flexible micro-nano electronic devices; MEMS smart sensor systems for physiological signal monitoring

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Guest Editor
School of Automation, Chongqing University of Posts and Telecommunications, Chongqing 400065, China
Interests: flexible wearable sensing
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Special Issue Information

Dear Colleagues,

Micro-Electro-Mechanical Systems (MEMS) and Quartz Crystal Microbalances (QCM) have transformed the landscape of sensing technologies. Their unique properties, such as miniaturization, high sensitivity, and low power consumption, make them indispensable in the design of smart sensor systems. As industries strive for smarter, more efficient solutions to monitor environmental, industrial, and biomedical parameters, MEMS and QCM technologies are at the forefront of these innovations. This Special Issue aims to compile cutting-edge research, reviews, and technological advancements related to the application of MEMS and QCM in the context of smart sensor systems.

This Special Issue aims to gather pioneering research and reviews that highlight the advancements and applications of MEMS and QCM technologies in smart sensor systems and to provide a platform for researchers and practitioners to share their findings and innovations in the integration of MEMS and QCM with current sensing technologies; Additionally, we hope this Special Issue to stimulate discussions on the challenges and future perspectives of MEMS and QCM applications in various fields.

In this Special Issue, original research articles and reviews are welcome. We invite contributions on a variety of topics related to MEMS and QCM in the context of smart sensors; research areas may include (but are not limited to) the following:

  1. Novel MEMS designs for environmental sensing applications (e.g., air quality, water quality, etc.);
  2. Research and progress on the basic theory of QCM;
  3. Applications of QCM sensors in sensing and testing;
  4. Application of piezoelectric sensors in precision measurement;
  5. Integration of QCM technology in medical diagnostics and biosensing;
  6. Smart MEMS-based devices for industrial automation and IoT applications;
  7. MEMS devices based on two-dimensional (2D) materials;
  8. MEMS-based wearable electronic system;
  9. Development of MEMS devices for energy harvesting applications;
  10. MEMS-based acoustic devices;
  11. MEMS-based optoelectronic devices;
  12. Advancements in MEMS sensors for health monitoring;
  13. Hybrid systems combining MEMS and QCM for enhanced sensor capabilities;
  14. Advances in materials and fabrication techniques for MEMS and QCM sensors;
  15. Development of MEMS sensors for detecting physical phenomena (e.g., pressure, acceleration, temperature, humidity, and chemical substances, etc.);
  16. The role of artificial intelligence and machine learning in enhancing the capabilities of MEMS and QCM-based sensor systems;
  17. Frequency signal transmission and synchronization;
  18. Signal synchronization and processing;
  19. Signal acquisition and analysis;
  20. Sensor-related systems.

We look forward to receiving your contributions.

Dr. Jianguo Hu
Dr. Jing Chen
Dr. Xiangshun Geng
Dr. Guangyang Gou
Dr. Qiao Chen
Guest Editors

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Keywords

  • smart sensor system
  • MEMS
  • QCM
  • wearable electronic system
  • acoustic devices
  • signal processing
  • energy harvesting
  • optoelectronic devices
  • precision measurement
  • frequency transmission

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Published Papers (2 papers)

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Research

12 pages, 8620 KiB  
Article
Picosecond-Level Synchronization over Optical Free Space Link Using White Rabbit
by Peng Zhang, Dong Hou, Ke Liu, Wenjian Zhou, Minghong Li and Lujun Fang
Electronics 2025, 14(5), 970; https://doi.org/10.3390/electronics14050970 - 28 Feb 2025
Viewed by 1745
Abstract
White Rabbit (WR) time synchronization has an accuracy up to a sub-nanosecond level. However, the current application scenario of WR is limited to wired transmission links. In this paper, we have proposed a time synchronization technique over a free space link using WR. [...] Read more.
White Rabbit (WR) time synchronization has an accuracy up to a sub-nanosecond level. However, the current application scenario of WR is limited to wired transmission links. In this paper, we have proposed a time synchronization technique over a free space link using WR. In the WR-based free space synchronization scheme, we replace the original WDM (Wavelength Division Multiplexing) with single-wavelength transmission to reduce the asymmetry of the path and design a high-power optical transceiver module to improve the transmission power. With the scheme, a free space synchronization experiment with a transmission distance of 50 m is conducted. The experimental results show that the RMS (root mean square) time drift of this free space synchronization system is 20.5 ps over a 24 h period, and the TDEV (Time Deviation) of the time synchronization is 14.3 ps at 1 s and 3.9 ps at 20,000 s. The experiment proves that it will be convenient to complete the free space time synchronization network between clock sites with the proposed technique in the future application of complex environments. Full article
(This article belongs to the Special Issue Applications of MEMS and QCM in Smart Sensor Systems)
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13 pages, 4402 KiB  
Article
Molecularly Imprinted QCM Sensor Based on Hollow ZIF-67@PDA for Sparfloxacin Detection
by Shuang Liao, Liling Wang, Cheng Chen, Lin Xu, Houjun Wang, Peng Ye, Mengmeng Sun and Feng Tan
Electronics 2024, 13(23), 4799; https://doi.org/10.3390/electronics13234799 - 5 Dec 2024
Viewed by 843
Abstract
In this study, we present the design of a molecularly imprinted polymer (MIP) for the detection of the antibiotic sparfloxacin (SPFK), combined with a high-precision quartz crystal microbalance (QCM) sensor. Green-synthesized ZIF-67@PDA-MIP was directly immobilized on the gold electrode surface of the QCM. [...] Read more.
In this study, we present the design of a molecularly imprinted polymer (MIP) for the detection of the antibiotic sparfloxacin (SPFK), combined with a high-precision quartz crystal microbalance (QCM) sensor. Green-synthesized ZIF-67@PDA-MIP was directly immobilized on the gold electrode surface of the QCM. This configuration takes advantage of the selective recognition capabilities of the MIP and the high-sensitivity response characteristics of the QCM sensor. It overcomes the limitations of traditional SPFK detection methods, offering both accurate detection and rapid responses for practical applications. The MIP-QCM sensor demonstrated enhanced sensitivity and affinity, achieving a detection limit as low as 10.3 ng/mL. Additionally, the selectivity of the sensor for SPFK was superior to that of other non-template molecules. It effectively detected SPFK residues in milk with acceptable accuracy, as indicated by recoveries ranging from 96.16% to 104.64% and a relative standard deviation (RSD) of less than 4.64%. These results suggest that the proposed MIP-QCM sensor provides an accurate, sensitive, rapid, and cost-effective method for detecting SPFK residues in animal products, and this advancement is expected to promote the widespread adoption of high-precision sensors in food safety testing. Full article
(This article belongs to the Special Issue Applications of MEMS and QCM in Smart Sensor Systems)
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