Development of Micro-Electromechanical Systems (MEMS)

Dear Colleagues,

Micro-Electro-Mechanical Systems (MEMS) is enabling the integration of mechanical components, sensors, actuators, and electronics on a single chip at the microscale. Currently, MEMS sensors are widely used in various fields, due to their small size, low power consumption and high performance, such as MEMS accelerometers, MEMS gyroscopes and MEMS pressure sensors in consumer electronics, industrial automation, emerging fields, etc.

The purpose of this Special Issue is to provide a comprehensive overview of the latest applications and advances in MEMS sensors, especially in physical sensors. It seeks to highlight innovative research and development efforts in sensors phenomenology, modeling, evaluation, sensor systems and applications.

We welcome the submission of original research articles and reviews. The research areas covered may include (but are not limited to) the following:

• Physical MEMS sensor deployment, especially in high-end appications;
• Physical MEMS sensor phenomenology, modeling and evaluation;
• Physical MEMS sensor systems, including signals, processing and interface circuits;
• Physical MEMS sensor data processing and AI;
• Smart physical MEMS sensors;
• Sensors in industrial and emerging practices.

We look forward to receiving your contributions.

Dr. Xingyin Xiong
Dr. Fang Chen
Dr. Yuan Wang
Guest Editors

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