Electronic Materials, Volume 5, Issue 4
2024 December - 8 articles
Cover Story: In this work, we demonstrate the simple but versatile use of a helium ion microscope (HIM) for fabrication of conducting metallic nano and micro structures on arbitrary substrates. Thermally evaporated and highly insulating ultra-thin films of gold or silver that have a discontinuous nano-cluster morphology are used as a seed layer. This seed layer can be patterned by directly “drawing” on it with a low-energy focused helium-ion beam, forming conductive metallic lines and other patterns. This high-definition technique of direct writing with an ion beam, free from in vacuo catalytic or precursor chemistries, opens new opportunities for directly fabricating elements of conformal metallic nano circuits (interconnects, resistors, and contacts) on arbitrary organic or inorganic substrates, including those with highly curved surfaces. View this paper - Issues are regarded as officially published after their release is announced to the table of contents alert mailing list .
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