Micromachines, Volume 9, Issue 1

Quality factor is one of the most important parameters for a MEMS resonator. Most MEMS resonators are dominated by thermoelastic dissipation (TED). This paper demonstrates that the TED in a disk resonator that is made of (111) single-crystal silicon...

An experimental study of in vivo insulin delivery through microinjection by using hollow silicon microneedle array is presented. A case study was carried out on a healthy human subject in vivo to determine the influence of delivery parameters on drug...

Previous studies have shown that spectral analysis based on force data can elucidate fundamental physical phenomena during chemical mechanical planarization (CMP). While it has not been literally described elsewhere, such analysis was partly motivate...

Ultrafast laser microfabrication is a very powerful method for producing integrated devices in transparent materials [1].[...]

A device for studying the mechanical and electrical behavior of free-standing micro-fabricated metal structures, subjected to a very large deformation, is presented in this paper. The free-standing structures are intended to serve as interconnects in...

Wireless medical body-area networks are used to connect sensor nodes that monitor vital parameters. The radio consumes a large portion of the sensor energy budget, and hence its power dissipation should be minimized. The low-noise amplifier (LNA) is...

We study the pair dynamics of two self-propelled sphere dimers in the chemically active medium in which a cubic autocatalytic chemical reaction takes place. Concentration gradient around the dimer, created by reactions occurring on the catalytic sphe...

Food safety remains one of the most important issues in most countries and the detection of food hazards plays a key role in the systematic approach to ensuring food safety. Rapid, easy-to-use and low-cost analytical tools are required to detect chem...

Forming microspheres or microbeads from nanofibrous materials has recently attracted research interest for their applications in various fields, because these structures greatly impact cellular behaviors and functions. However, conventional methods o...

The micro-electro-mechanical system (MEMS) resonator developed based on surface processing technology usually changes the section shape either due to excessive etching or insufficient etching. In this paper, a section parameter is proposed to describ...