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Micromachines, Volume 5, Issue 3

September 2014 - 28 articles

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Articles (28)

  • Article
  • Open Access
9 Citations
7,590 Views
9 Pages

Adaptive Liquid Lens Actuated by Droplet Movement

  • Chao Liu,
  • Qiong-Hua Wang,
  • Li-Xiao Yao and
  • Ming-Huan Wang

4 August 2014

In this paper we report an adaptive liquid lens actuated by droplet movement. Four rectangular PMMA (Polymethyl Methacrylate) substrates are stacked to form the device structure. Two ITO (Indium Tin Oxide) sheets stick on the bottom substrate. One PM...

  • Review
  • Open Access
29 Citations
11,911 Views
10 Pages

UV-LIGA: From Development to Commercialization

  • Grégoire Genolet and
  • Hubert Lorenz

23 July 2014

A major breakthrough in UV-LIGA (Lithographie, Galvanoformung and Abformung) started with the use of epoxy-based EPON® SU-8 photoresist in the mid-1990s. Using this photoresist has enabled the fabrication of tall and high aspect ratio structures wit...

  • Article
  • Open Access
25 Citations
10,476 Views
14 Pages

Laser Direct Writing of Thick Hybrid Polymers for Microfluidic Chips

  • Akanksha Singh,
  • Gianmario Scotti,
  • Tiina Sikanen,
  • Ville Jokinen and
  • Sami Franssila

22 July 2014

This work presents patterning of thick (10–50 µm) hybrid polymer structures of ORMOCER® by laser direct writing. ORMOCER® combine polymer-like fabrication processes with glass-like surface chemistry that is beneficial for many bio-microfluidic applic...

  • Article
  • Open Access
6 Citations
9,108 Views
15 Pages

CO2 Laser Manufacturing of Miniaturised Lenses for Lab-on-a-Chip Systems

  • Mazher-Iqbal Mohammed and
  • Marc Phillipe Yves Desmulliez

21 July 2014

This article describes the manufacturing and characterisation of plano-convex miniaturised lenses using a CO2 laser engraving process in PMMA substrates. The technique allows for lenses to be fabricated rapidly and in a reproducible manner at depths...

  • Article
  • Open Access
20 Citations
9,262 Views
15 Pages

Implementation of Synchronous Micromotor in Developing Integrated Microfluidic Systems

  • Ala'aldeen Al-Halhouli,
  • Stefanie Demming,
  • Andreas Waldschik and
  • Stephanus Büttgenbach

18 July 2014

This paper introduces the synchronous micromotor concept and presents new investigations on its application as an integrated driving mechanism in microfluidic systems. A spiral channel viscous micropump and a microstirrer are considered and tested as...

  • Article
  • Open Access
42 Citations
9,807 Views
10 Pages

4 July 2014

We present a flexible variable-focus converging microlens actuated by electrowetting on dielectric (EWOD). The microlens is made of two immiscible liquids and a soft polymer, polydimethylsiloxane (PDMS). Parylene intermediate layer is used to produce...

  • Article
  • Open Access
39 Citations
8,066 Views
12 Pages

3 July 2014

An ultrasonic transducer is a key component to achieve ultrasonic imaging. This paper designs a new type of Microelectromechanical Systems (MEMS) based capacitive ultrasonic transducer and a linear array based on the transducer. Through directivity a...

  • Article
  • Open Access
10 Citations
7,534 Views
12 Pages

2 July 2014

In this paper, we present sequential atmospheric pressure plasma-assisted laser ablation of photovoltaic cover glass. First, glass samples were plasma pre-treated using a hydrogenous plasma process gas in order to accomplish a modification of the nea...

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Micromachines - ISSN 2072-666X