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Micromachines, Volume 14, Issue 4

April 2023 - 190 articles

Cover Story: Micromachined deformable mirrors are often assembled using adhesives to bond actuators to a compliant face sheet. A new approach to minimizing stresses induced by adhesive assembly involves moving the adhesive joints to the ends of slender posts that extend integrally from the face sheet. These graphics depict a mirror face sheet made using silicon-on-insulator wafers and deep reactive ion etching. The “Overview” graphic shows the 12 mm diameter, 10 µm thick face sheet as fabricated with 37 integral slender posts. Three graphics are scanning electron micrographs of a portion of the posts, face sheet, and rigid silicon frame. Two graphics are scanning electron micrographs of a single post integrally fabricated with the face sheet membrane and our design versions. View this paper
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Articles (190)

  • Communication
  • Open Access
4 Citations
3,948 Views
10 Pages

21 April 2023

With gate length (Lg) and gate spacing length (Ls) shrinkage, the cell-to-cell z-interference phenomenon is increasingly severe in 3D NAND charge-trap memory. It has become one of the key reliability concerns for 3D NAND cell scaling. In this work, z...

  • Article
  • Open Access
5 Citations
4,096 Views
33 Pages

21 April 2023

In this article, based on the developed methodology, the stages of designing the sensitive element of a microelectromechanical gyroscope with an open-loop structure are considered. This structure is intended for use in control units for mobile object...

  • Article
  • Open Access
11 Citations
2,214 Views
16 Pages

21 April 2023

The main concern of this paper is to introduce some new tubular shapes whose cross-sections result from the imposition of Navier’s velocity slip at the surface. A new family of pipes induced by the slip mechanism is thus discovered. The family...

  • Article
  • Open Access
10 Citations
2,560 Views
26 Pages

SiamHAS: Siamese Tracker with Hierarchical Attention Strategy for Aerial Tracking

  • Faxue Liu,
  • Jinghong Liu,
  • Qiqi Chen,
  • Xuan Wang and
  • Chenglong Liu

21 April 2023

For the Siamese network-based trackers utilizing modern deep feature extraction networks without taking full advantage of the different levels of features, tracking drift is prone to occur in aerial scenarios, such as target occlusion, scale variatio...

  • Article
  • Open Access
19 Citations
5,918 Views
14 Pages

21 April 2023

As one of the most important modes of transportation, the safety of running trains and railway tracks is significant. It is essential to power sensors that detect and track health in remote areas. The vibration energy of the track structure is enormo...

  • Article
  • Open Access
7 Citations
2,090 Views
15 Pages

21 April 2023

Abrasive water jetting is an effective dressing method for a fixed abrasive pad (FAP) and can improve FAP machining efficiency and the impact of abrasive water jet (AWJ) pressure on the dressing effect; moreover, the machining state of FAP after dres...

  • Article
  • Open Access
11 Citations
3,417 Views
10 Pages

Efficient Synthesis of a Schiff Base Copper(II) Complex Using a Microfluidic Device

  • Masashi Kobayashi,
  • Takashiro Akitsu,
  • Masahiro Furuya,
  • Tetsushi Sekiguchi,
  • Shuichi Shoji,
  • Takashi Tanii and
  • Daiki Tanaka

21 April 2023

The efficient synthesis of amino acid Schiff base copper(II) complexes using a microfluidic device was successfully achieved. Schiff bases and their complexes are remarkable compounds due to their high biological activity and catalytic function. Conv...

  • Article
  • Open Access
23 Citations
3,443 Views
26 Pages

21 April 2023

The timely detection and diagnosis of diseases and accurate monitoring of specific genetic conditions require rapid and accurate separation, sorting, and direction of target cell types toward a sensor device surface. In that regard, cellular manipula...

  • Article
  • Open Access
1 Citations
2,169 Views
14 Pages

Hierarchical Design of CuO/Nickel–Cobalt–Sulfide Electrode by a Facile Two-Step Potentiostatic Deposition

  • Sa Lv,
  • Peiyu Geng,
  • Yaodan Chi,
  • Huan Wang,
  • Xuefeng Chu,
  • Yang Zhao,
  • Boqi Wu,
  • Wenshi Shang,
  • Chao Wang and
  • Jia Yang
  • + 2 authors

20 April 2023

Herein, a scalable electrodeposition strategy is proposed to achieve hierarchical CuO/nickel–cobalt–sulfide (NCS) electrodes using two-step potentiostatic deposition followed by high-temperature calcination. The introduction of CuO provid...

  • Article
  • Open Access
2,697 Views
14 Pages

20 April 2023

In this paper, the transient breakdown voltage (TrBV) of a silicon-on-insulator (SOI) laterally diffused metal-oxide-semiconductor (LDMOS) device was increased by introducing a step P-type doping buried layer (SPBL) below the buried oxide (BOX). Devi...

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Micromachines - ISSN 2072-666X