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Micromachines, Volume 13, Issue 9

2022 September - 189 articles

Cover Story: Microgrippers are promising tools for the micro-manipulation and characterization of cells. In this paper, a biocompatible electro-thermally actuated microgripper with rotary capacitive position sensor is presented. To overcome the limited displacement possibilities usually provided by electrothermal actuators, conjugate surface flexure hinges (CSFH) are adopted. A kinematics modeling approach based on the pseudo-rigid-body method (PRBM) is applied to describe the microgripper’s working mechanism, and analytical modeling, based on the finite elements method (FEM), is used to optimize the electrothermal actuator design and the heat dissipation mechanism. Finally, FEM-based simulations are carried out to verify the microgripper, the electrothermal actuator and heat dissipation mechanism performance, and to assess the validity of the analytical modeling. View this paper
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Articles (189)

  • Review
  • Open Access
20 Citations
5,797 Views
32 Pages

Fabrication of Concave Microwells and Their Applications in Micro-Tissue Engineering: A Review

  • Weijin Guo,
  • Zejingqiu Chen,
  • Zitao Feng,
  • Haonan Li,
  • Muyang Zhang,
  • Huiru Zhang and
  • Xin Cui

19 September 2022

At present, there is an increasing need to mimic the in vivo micro-environment in the culture of cells and tissues in micro-tissue engineering. Concave microwells are becoming increasingly popular since they can provide a micro-environment that is cl...

  • Article
  • Open Access
3 Citations
4,574 Views
8 Pages

Optimization of the Field Plate Design of a 1200 V p-GaN Power High-Electron-Mobility Transistor

  • Chia-Hao Liu,
  • Chong-Rong Huang,
  • Hsiang-Chun Wang,
  • Yi-Jie Kang,
  • Hsien-Chin Chiu,
  • Hsuan-Ling Kao,
  • Kuo-Hsiung Chu,
  • Hao-Chung Kuo,
  • Chih-Tien Chen and
  • Kuo-Jen Chang

19 September 2022

This study optimized the field plate (FP) design (i.e., the number and positions of FP layers) of p-GaN power high-electron-mobility transistors (HEMTs) on the basic of simulations conducted using the technology computer-aided design software of Silv...

  • Article
  • Open Access
2 Citations
3,136 Views
21 Pages

Interaction of Shock Waves with Water Saturated by Nonreacting or Reacting Gas Bubbles

  • Sergey M. Frolov,
  • Konstantin A. Avdeev,
  • Viktor S. Aksenov,
  • Illias A. Sadykov,
  • Igor O. Shamshin and
  • Fedor S. Frolov

19 September 2022

A compressible medium represented by pure water saturated by small nonreactive or reactive gas bubbles can be used for generating a propulsive force in large-, medium-, and small-scale thrusters referred to as a pulsed detonation hydroramjet (PDH), w...

  • Article
  • Open Access
2 Citations
2,631 Views
14 Pages

19 September 2022

The need for studies on new simulation and monitoring methods for interactions occurring during material processing in high-power fiber laser systems has increased. In this manuscript, a structure that can intervene in real time and improved solution...

  • Article
  • Open Access
13 Citations
7,765 Views
12 Pages

19 September 2022

In this work, we propose a vertical gate-all-around device architecture (GAA-FinFET) with the aim of simultaneously improving device performance as well as addressing the short channel effect (SCE). The GAA-FinFET was built using the technology compu...

  • Article
  • Open Access
38 Citations
8,152 Views
15 Pages

AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application

  • Yichen Liu,
  • Lihao Wang,
  • Yongquan Su,
  • Yuyao Zhang,
  • Yang Wang and
  • Zhenyu Wu

18 September 2022

This paper presents AlScN piezoelectric two-axis MEMS mirrors with gimbal-less and gimbaled designs fabricated in a CMOS-compatible manner. Integrated piezoelectric sensors provided feedback signals of the actual mirror positions. The mirror with a d...

  • Article
  • Open Access
5 Citations
2,688 Views
12 Pages

18 September 2022

A non-invasive laser fiber-optic method based on infrared sensors for heart rate (Hr) recording was applied to assess the physiological condition of Pinna nobilis. During 2017, the specimens of P. nobilis were sampled at three sites within the Boka K...

  • Article
  • Open Access
9 Citations
2,955 Views
19 Pages

18 September 2022

In this paper, laboratory experiments of LARMbot torso V1 are reported in the third mode, thereby providing a testing characterization. Sensors were used to measure parameters including the contact force between the shoulder and cables, linear accele...

  • Article
  • Open Access
11 Citations
2,906 Views
18 Pages

18 September 2022

This paper presents design and characterisation of a new compact metasurface based linear polarisation converter for terahertz applications. The metasurface unit cell with periodicity of 0.292λ0 consists of an asymmetrically oriented planar do...

  • Article
  • Open Access
6 Citations
4,663 Views
16 Pages

17 September 2022

Aluminum nitride (AlN) thin-film materials possess a wide energy gap; thus, they are suitable for use in various optoelectronic devices. In this study, AlN thin films were deposited using radio frequency magnetron sputtering with an Al sputtering tar...

  • Article
  • Open Access
2 Citations
3,126 Views
14 Pages

Kinematic Properties of a Twisted Double Planetary Chaotic Mixer: A Three-Dimensional Numerical Investigation

  • Telha Mostefa,
  • Aissaoui Djamel Eddine,
  • Naas Toufik Tayeb,
  • Shakhawat Hossain,
  • Arifur Rahman,
  • Bachiri Mohamed and
  • Kwang-Yong Kim

17 September 2022

In this study, a numerical investigation based on the CFD method is carried out to study the unsteady laminar flow of Newtonian fluid with a high viscosity in a three-dimensional simulation of a twisted double planetary mixer, which is composed of tw...

  • Article
  • Open Access
2,453 Views
25 Pages

17 September 2022

To address the problems of the large positioning error and long positioning time of the traditional positioning strategy, namely, the two-phase simultaneous power-off method (TPSPM), a new positioning strategy, called the first single-phase then two-...

  • Article
  • Open Access
14 Citations
2,654 Views
8 Pages

17 September 2022

Inorganic n-type Bi2Te3 flexible thin film, as a promising near-room temperature thermoelectric material, has attracted extensive research interest and application potentials. In this work, to further improve the thermoelectric performance of flexibl...

  • Article
  • Open Access
4 Citations
2,671 Views
11 Pages

High Quality Pt–Pt Metal Bonding for High Temperature Packaging

  • Jiazheng Liu,
  • Junqiang Wang,
  • Mengwei Li and
  • Haikun Zhang

17 September 2022

Platinum is an ideal material for high-temperature resistant device packaging due to its higher melting point and good electrical properties. In this paper, the thermocompression bonding of Pt–Pt metal electrodes was successfully realized throu...

  • Article
  • Open Access
3 Citations
3,563 Views
7 Pages

Ultra-Wideband Power Amplifier Design Strategy for 5G Sub-6-GHz Applications

  • Jorge Julián Moreno Rubio,
  • Edison Ferney Angarita Malaver and
  • Jairo Alonso Mesa Lara

17 September 2022

This paper presents a strategy to design ultrawideband power amplifiers with a fractional bandwidth of approximately 200%. It exploits a simple output matching network, which consists of a series transmission line together with a shunt stub, to compe...

  • Article
  • Open Access
9 Citations
2,706 Views
16 Pages

3D Printable Soft Sensory Fiber Networks for Robust and Complex Tactile Sensing

  • David Hardman,
  • Thomas George Thuruthel,
  • Antonia Georgopoulou,
  • Frank Clemens and
  • Fumiya Iida

17 September 2022

The human tactile system is composed of multi-functional mechanoreceptors distributed in an optimized manner. Having the ability to design and optimize multi-modal soft sensory systems can further enhance the capabilities of current soft robotic syst...

  • Article
  • Open Access
7 Citations
3,917 Views
13 Pages

17 September 2022

Interconnections are essential for integrating the packaging substrate, and defect-free copper-filling can further improve the reliability in through holes (THs). The coating properties and filling processes are mainly dominated by the interplays amo...

  • Article
  • Open Access
8 Citations
3,403 Views
13 Pages

Tactile Perception Object Recognition Based on an Improved Support Vector Machine

  • Xingxing Zhang,
  • Shaobo Li,
  • Jing Yang,
  • Yang Wang,
  • Zichen Huang and
  • Jinhu Zhang

17 September 2022

Tactile perception is an irreplaceable source of information for humans to explore the surrounding environment and has advantages over sight and hearing in processing the material properties and detailed shapes of objects. However, with the increasin...

  • Article
  • Open Access
9 Citations
5,100 Views
17 Pages

17 September 2022

With the rapid development of nano/micro technology for commercial electronics, the typical interconnection method could not satisfy the high power-density packaging requirement. The 2.5D/3D integrated packaging was seen as a promising technology for...

  • Article
  • Open Access
5 Citations
2,427 Views
15 Pages

17 September 2022

Modulation recognition (MR) has become an essential topic in today’s wireless communications systems. Recently, convolutional neural networks (CNNs) have been employed as a potent tool for MR because of their ability to minimize the feature&rsq...

  • Article
  • Open Access
6 Citations
2,933 Views
15 Pages

16 September 2022

The geometric accuracy of a hemispherical shell resonator (HSR) affects the assembly accuracy and final performance of a hemispherical resonant gyroscope in many ways. During the precision grinding of a resonator, the tool-setting error and wear erro...

  • Article
  • Open Access
4 Citations
4,180 Views
13 Pages

Design and Simulation of a Ring Transducer Array for Ultrasound Retinal Stimulation

  • Chenlin Xu,
  • Gengxi Lu,
  • Haochen Kang,
  • Mark S. Humayun and
  • Qifa Zhou

16 September 2022

Argus II retinal prosthesis is the US Food and Drug Administration (FDA) approved medical device intended to restore sight to a patient’s blind secondary to retinal degeneration (i.e., retinitis pigmentosa). However, Argus II and most reported...

  • Feature Paper
  • Review
  • Open Access
10 Citations
4,581 Views
22 Pages

16 September 2022

To maximize the performance of energy storage systems more effectively, modern batteries/supercapacitors not only require high energy density but also need to be fully recharged within a short time or capable of high-power discharge for electric vehi...

  • Article
  • Open Access
7 Citations
2,832 Views
13 Pages

The Impact of Manufacturing Imperfections on the Performance of Metalenses and a Manufacturing-Tolerant Design Method

  • Yicheng Zhu,
  • Wenjuan Wang,
  • Feilong Yu,
  • Qingquan Liu,
  • Zilu Guo,
  • Guanhai Li,
  • Pingping Chen and
  • Wei Lu

16 September 2022

Metalenses play an important role in optoelectronic integrated devices, given their advantages in miniaturization and integration. Due to its high aspect ratio subwavelength structure, fabricating metalenses requires a high-level dry etching technolo...

  • Article
  • Open Access
10 Citations
2,665 Views
33 Pages

Impedance Iterative Learning Backstepping Control for Output-Constrained Multisection Continuum Arms Based on PMA

  • Yuexuan Xu,
  • Xin Guo,
  • Jian Li,
  • Xingyu Huo,
  • Hao Sun,
  • Gaowei Zhang,
  • Qianqian Xing,
  • Minghe Liu,
  • Tianyi Ma and
  • Qingsong Ding

16 September 2022

Background: Pneumatic muscle actuator (PMA) actuated multisection continuum arms are widely applied in various fields with high flexibility and bionic properties. Nonetheless, their kinematic modeling and control strategy proves to be extremely chall...

  • Review
  • Open Access
27 Citations
5,661 Views
35 Pages

16 September 2022

Polymeric micro devices are gaining huge market potential in broad areas of medical devices, diagnostic devices, drug delivery, and optical applications. Current research is focusing on developing functional polymeric micro devices on a mass-producti...

  • Review
  • Open Access
6 Citations
3,907 Views
10 Pages

16 September 2022

Simultaneous monitoring of animal behavior and neuronal activity in the brain enables us to examine the neural underpinnings of behaviors. Conventionally, the neural activity data are buffered, amplified, multiplexed, and then converted from analog t...

  • Article
  • Open Access
10 Citations
2,748 Views
12 Pages

Poly(1-Napthylamine) Nanoparticles as Potential Scaffold for Supercapacitor and Photocatalytic Applications

  • Ahmad Umar,
  • Sundararajan Ashok Kumar,
  • Daniel Rani Rosaline,
  • Hassan Algadi,
  • Ahmed A. Ibrahim,
  • Faheem Ahmed,
  • Edson Luiz Foletto and
  • Savariroyan Stephen Rajkumar Inbanathan

16 September 2022

Herein, we explore the supercapacitor and photocatalytic applications of poly(1-naphthylamine) (PNA) nanoparticles. The PNA nanoparticles were synthesized by using polymerization of 1-naphthylamine and characterized with several techniques in order t...

  • Article
  • Open Access
6 Citations
3,384 Views
16 Pages

15 September 2022

Real-time, simultaneous, and adaptive beam steering into multiple regions of interest replaces conventional raster scanning with a less time-consuming and flexible beam steering framework, where only regions of interest are scanned by a laser beam. C...

  • Article
  • Open Access
7 Citations
3,394 Views
17 Pages

Investigation of the Physical Mechanism of Acoustic Attenuation in Viscous Isotropic Solids

  • Lin Fa,
  • Lili Li,
  • Hong Gong,
  • Wenhui Chen,
  • Jing Jiang,
  • Guoqiang You,
  • Jifeng Liang,
  • Yandong Zhang and
  • Meishan Zhao

15 September 2022

The traditional acoustic attenuation coefficient is derived from an analogy of the attenuation of an electromagnetic wave propagating inside a non-ideal medium, featuring only the attenuation of wave propagation. Nonetheless, the particles inside vis...

  • Article
  • Open Access
1 Citations
3,139 Views
16 Pages

Micromachined Tools Using Acoustic Wave Triggering for the Interaction with the Growth of Plant Biological Systems

  • Simone Grasso,
  • Francesca Di Marcello,
  • Anna Sabatini,
  • Alessandro Zompanti,
  • Maria Vittoria Di Loreto,
  • Costanza Cenerini,
  • Francesco Lodato,
  • Laura De Gara,
  • Christian Cherubini and
  • Marco Santonico
  • + 1 author

15 September 2022

A plant biological system is exposed to external influences. In general, each plant has its characteristics and needs with specific interaction mechanisms adapted to its survival. Interactions between systems can be examined and modeled as energy exc...

  • Article
  • Open Access
6 Citations
3,182 Views
13 Pages

Asymmetric Jetting during the Impact of Liquid Drops on Superhydrophobic Concave Surfaces

  • Chengmin Chen,
  • Hongjun Zhong,
  • Zhe Liu,
  • Jianchun Wang,
  • Jianmei Wang,
  • Guangxia Liu,
  • Yan Li and
  • Pingan Zhu

14 September 2022

The impact of liquid drops on superhydrophobic solid surfaces is ubiquitous and of practical importance in many industrial processes. Here, we study the impingement of droplets on superhydrophobic surfaces with a macroscopic dimple structure, during...

  • Article
  • Open Access
1 Citations
2,765 Views
12 Pages

14 September 2022

The effect of the work-function variation (WFV) of metal-oxide-semiconductor field-effect transistor (MOSFET) gates on a monolithic 3D inverter (M3DINV) structure is investigated in the current paper. The M3DINV has a structure in which MOSFETs are s...

  • Article
  • Open Access
2 Citations
2,374 Views
13 Pages

Hierarchical Self-Assembly of Dipolar ZnO Nanoparticles and Microdroplets

  • Najla Ghifari,
  • Rachid Bennacer,
  • Adil Chahboun and
  • Abdel I. El Abed

14 September 2022

In this work, we investigated the orientation and the polarization of ZnO nanoparticles, which serve as building blocks of highly monodisperse microspheres, using a droplet microfluidic-assisted synthesis method. We observe, for the first time, a squ...

  • Article
  • Open Access
2 Citations
2,246 Views
19 Pages

14 September 2022

In recent years, the emergence of COVID-19 and other epidemics caused by RNA(ribonucleic acid)-type genetic viruses has aroused the close attention of governments around the world on emergency response to public safety and health emergencies. In this...

  • Article
  • Open Access
6 Citations
3,595 Views
25 Pages

Influence of Machining Conditions on Micro-Geometric Accuracy Elements of Complex Helical Surfaces Generated by Thread Whirling

  • Vasile Merticaru,
  • Gheorghe Nagîț,
  • Oana Dodun,
  • Eugen Merticaru,
  • Marius Ionuț Rîpanu,
  • Andrei Marius Mihalache and
  • Laurențiu Slătineanu

14 September 2022

Complex surfaces such as helical ones are commonly used in machinery. Such surfaces can be obtained by various machining processes, one of these processes being thread whirling. The influence of machining conditions needs to be better understood to d...

  • Feature Paper
  • Article
  • Open Access
2 Citations
2,875 Views
6 Pages

Low Buffer Trapping Effects above 1200 V in Normally off GaN-on-Silicon Field Effect Transistors

  • Idriss Abid,
  • Youssef Hamdaoui,
  • Jash Mehta,
  • Joff Derluyn and
  • Farid Medjdoub

14 September 2022

We report on the fabrication and electrical characterization of AlGaN/GaN normally off transistors on silicon designed for high-voltage operation. The normally off configuration was achieved with a p-gallium nitride (p-GaN) cap layer below the gate,...

  • Article
  • Open Access
3 Citations
2,073 Views
8 Pages

Mango-Stone-Derived Nitrogen-Doped Porous Carbon for Supercapacitors

  • Yi Wang,
  • Xinzi Yuan,
  • Xingyu Guan,
  • Kunling Ren,
  • Yan Yang,
  • Jun Luo and
  • Yantao Zheng

14 September 2022

The preparation of N-doped porous carbon (NC-800) is presented via facile mango stone carbonization at 800 °C. The NC-800 material exhibits good cycle stability (the capacity retention is 97.8% after 5000 cycles) and high specific capacitance of...

  • Article
  • Open Access
4 Citations
2,974 Views
14 Pages

Static Torque Analysis of Micro Claw-Pole Stepper Motor Based on Field-Circuit Combination

  • Yuanxu Xin,
  • Yan Sun,
  • Xudong Wang,
  • Xiaofei Xi,
  • Yabin Su and
  • Yong Yang

13 September 2022

Because of the complexity of the structure and magnetic circuit of the micro claw-pole stepper motor, it is difficult to analyze this kind of motor quickly and accurately. Therefore, it takes a lot of time to accurately model and use the three-dimens...

  • Feature Paper
  • Article
  • Open Access
7 Citations
4,187 Views
16 Pages

Rapid and Continuous Cryopreservation of Stem Cells with a 3D Micromixer

  • Lin Ding,
  • Sajad Razavi Bazaz,
  • Jesus Shrestha,
  • Hoseyn A. Amiri,
  • Sima Mas-hafi,
  • Balarka Banerjee,
  • Graham Vesey,
  • Morteza Miansari and
  • Majid Ebrahimi Warkiani

13 September 2022

Cryopreservation is the final step of stem cell production before the cryostorage of the product. Conventional methods of adding cryoprotecting agents (CPA) into the cells can be manual or automated with robotic arms. However, challenging issues with...

  • Article
  • Open Access
4 Citations
2,919 Views
13 Pages

Super-Resolution Reconstruction of Cytoskeleton Image Based on A-Net Deep Learning Network

  • Qian Chen,
  • Haoxin Bai,
  • Bingchen Che,
  • Tianyun Zhao,
  • Ce Zhang,
  • Kaige Wang,
  • Jintao Bai and
  • Wei Zhao

13 September 2022

To date, live-cell imaging at the nanometer scale remains challenging. Even though super-resolution microscopy methods have enabled visualization of sub-cellular structures below the optical resolution limit, the spatial resolution is still far from...

  • Article
  • Open Access
2 Citations
2,124 Views
18 Pages

A Cantilever-Based Piezoelectric MEMS for Arbitrary XY Path Generation

  • Fabio Botta,
  • Andrea Rossi and
  • Nicola Pio Belfiore

13 September 2022

This work pertains to the design of a cantilever-based piezoelectric MEMS device that is capable of generating arbitrary paths of its tip. The conceived device consists of a pair of rigidly coupled piezoelectric bimorph cantilevers, and a theoretical...

  • Article
  • Open Access
1 Citations
3,237 Views
15 Pages

A Comparative Modelling Study of New Robust Packaging Technology 1 mm2 VCSEL Packages and Their Mechanical Stress Properties

  • Khairul Mohd Arshad,
  • Muhamad Mat Noor,
  • Asrulnizam Abd Manaf,
  • Hiroshi Kawarada,
  • Shaili Falina and
  • Mohd Syamsul

13 September 2022

Face recognition is one of the most sophisticated disciplines of biometric systems. The use of VCSEL in automotive applications is one of the most recent advances. The existing VCSEL package with a diffuser on top of a lens intended for automotive ap...

  • Article
  • Open Access
3 Citations
2,089 Views
18 Pages

12 September 2022

Scaling fractional-order memristor circuit is important for realizing a fractional-order memristor. However, the effective operating-frequency range, operation order, and fractional-order memristance of the scaling fractional-order memristor circuit...

  • Article
  • Open Access
4 Citations
2,028 Views
6 Pages

12 September 2022

We demonstrate highly flexible and efficient organic light-emitting devices (OLEDs) using an ultra-smooth NAN anode. A template-stripping process was employed to create an ultra-smooth NAN anode on a photopolymer substrate. The flexible OLEDs obtaine...

  • Article
  • Open Access
7 Citations
2,640 Views
14 Pages

Wound-Dressing-Based Antenna Inkjet-Printed Using Nanosilver Ink for Wireless Medical Monitoring

  • Chun-Bing Chen,
  • Hsuan-Ling Kao,
  • Li-Chun Chang,
  • Yi-Chen Lin,
  • Yung-Yu Chen,
  • Wen-Hung Chung and
  • Hsien-Chin Chiu

12 September 2022

In this paper, we present a wound-dressing-based antenna fabricated via screen-printed and inkjet-printed technologies. To inkjet print a conductive film on wound dressing, it must be screen-printed, UV-curable-pasted, and hard-baked to provide appro...

  • Review
  • Open Access
53 Citations
22,065 Views
24 Pages

Silicon Photonic Phase Shifters and Their Applications: A Review

  • Haoyang Sun,
  • Qifeng Qiao,
  • Qingze Guan and
  • Guangya Zhou

12 September 2022

With the development of silicon photonics, dense photonic integrated circuits play a significant role in applications such as light detection and ranging systems, photonic computing accelerators, miniaturized spectrometers, and so on. Recently, exten...

  • Feature Paper
  • Review
  • Open Access
31 Citations
7,962 Views
25 Pages

11 September 2022

Breast cancer is the most common type of cancer and it is treated with surgical intervention, radiotherapy, chemotherapy, or a combination of these regimens. Despite chemotherapy’s ample use, it has limitations such as bioavailability, adverse side e...

  • Article
  • Open Access
6 Citations
2,086 Views
14 Pages

A Novel Damping Control of Grid-Connected Converter Based on Optimal Split-Inductor Concept

  • Chao Chen,
  • Liwu Gong,
  • Wei Zhang,
  • Tao Wu,
  • Yixing Gu and
  • Changli Shi

11 September 2022

In this paper, a grid-connected converter is investigated. Since the AC side of the grid-connected converter is the LC filter, there is a second-order system resonance problem, and the conventional passive damping control has an inherent limitation o...

  • Article
  • Open Access
15 Citations
2,676 Views
15 Pages

Double Immunochromatographic Test System for Sensitive Detection of Phycotoxins Domoic Acid and Okadaic Acid in Seawater and Seafood

  • Olga D. Hendrickson,
  • Elena A. Zvereva,
  • Olga N. Solopova,
  • Anatoly V. Zherdev,
  • Peter G. Sveshnikov,
  • Sergei A. Eremin and
  • Boris B. Dzantiev

10 September 2022

In this investigation, a double immunochromatographic analysis (ICA) of two relevant phycotoxins, domoic acid (DA) and okadaic acid (OA), was developed for the first time. The ICA was performed in the indirect competitive format using gold nanopartic...

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Micromachines - ISSN 2072-666X