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Micromachines, Volume 10, Issue 8 (August 2019) – 61 articles

Cover Story (view full-size image): A miniaturized sensor based on a metal-biopolymer nanocomposite film was developed for the detection of multiple heavy metal ions in water. A novel co-electrodeposition technique allowed the formation of a nanocomposite film on a screen-printed electrode, resulting in improved sensitivity compared to previous studies. The developed sensor was validated with contaminated wastewater samples. View this paper
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23 pages, 9534 KiB  
Review
A Review: Preparation, Performance, and Applications of Silicon Oxynitride Film
by Yue Shi, Liang He, Fangcao Guang, Luhai Li, Zhiqing Xin and Ruping Liu
Micromachines 2019, 10(8), 552; https://doi.org/10.3390/mi10080552 - 20 Aug 2019
Cited by 55 | Viewed by 9450
Abstract
Silicon oxynitride (SiNxOy) is a highly promising functional material for its luminescence performance and tunable refractive index, which has wide applications in optical devices, non-volatile memory, barrier layer, and scratch-resistant coatings. This review presents recent developments, and discusses the [...] Read more.
Silicon oxynitride (SiNxOy) is a highly promising functional material for its luminescence performance and tunable refractive index, which has wide applications in optical devices, non-volatile memory, barrier layer, and scratch-resistant coatings. This review presents recent developments, and discusses the preparation methods, performance, and applications of SiNxOy film. In particular, the preparation of SiNxOy film by chemical vapor deposition, physical vapor deposition, and oxynitridation is elaborated in details. Full article
(This article belongs to the Special Issue Silicon Photonics Bloom)
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11 pages, 2705 KiB  
Article
A Passive Microfluidic Device for Chemotaxis Studies
by Maria Laura Coluccio, Maria Antonia D’Attimo, Costanza Maria Cristiani, Patrizio Candeloro, Elvira Parrotta, Elisabetta Dattola, Francesco Guzzi, Giovanni Cuda, Ernesto Lamanna, Ennio Carbone, Ulrich Krühne, Enzo Di Fabrizio and Gerardo Perozziello
Micromachines 2019, 10(8), 551; https://doi.org/10.3390/mi10080551 - 20 Aug 2019
Cited by 19 | Viewed by 4745
Abstract
This work presents a disposable passive microfluidic system, allowing chemotaxis studies, through the generation of a concentration gradient. The device can handle liquid flows without an external supply of pressure or electric gradients, but simply using gravity force. It is able to ensure [...] Read more.
This work presents a disposable passive microfluidic system, allowing chemotaxis studies, through the generation of a concentration gradient. The device can handle liquid flows without an external supply of pressure or electric gradients, but simply using gravity force. It is able to ensure flow rates of 10 µL/h decreasing linearly with 2.5% in 24 h. The device is made of poly(methylmethacrylate) (PMMA), a biocompatible material, and it is fabricated by micro-milling and solvent assisted bonding. It is assembled into a mini incubator, designed properly for cell biology studies in passive microfluidic devices, which provides control of temperature and humidity levels, a contamination-free environment for cells with air and 5% of CO2. Furthermore, the mini incubator can be mounted on standard inverted optical microscopes. By using our microfluidic device integrated into the mini incubator, we are able to evaluate and follow in real-time the migration of any cell line to a chemotactic agent. The device is validated by showing cell migration at a rate of 0.36 µm/min, comparable with the rates present in scientific literature. Full article
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7 pages, 11238 KiB  
Article
Low Conductivity Decay of Sn–0.7Cu–0.2Zn Photovoltaic Ribbons for Solar Cell Application
by Kuan-Jen Chen, Fei-Yi Hung, Truan-Sheng Lui and Lin Hsu
Micromachines 2019, 10(8), 550; https://doi.org/10.3390/mi10080550 - 19 Aug 2019
Cited by 2 | Viewed by 2962
Abstract
The present study applied Sn–0.7Cu–0.2Zn alloy solders to a photovoltaic ribbon. Intermetallic compounds of Cu6Sn5 and Ag3Sn formed at the Cu/solder/Ag interfaces of the module after reflow. Electron probe microanalyzer images showed that a Cu–Zn solid-solution layer (Zn [...] Read more.
The present study applied Sn–0.7Cu–0.2Zn alloy solders to a photovoltaic ribbon. Intermetallic compounds of Cu6Sn5 and Ag3Sn formed at the Cu/solder/Ag interfaces of the module after reflow. Electron probe microanalyzer images showed that a Cu–Zn solid-solution layer (Zn accumulation layer) existed at the Cu/solder interface. After a 72 h current stress, no detectable amounts of Cu6Sn5 were found. However, a small increase in Ag3Sn was found. Compared with a Sn–0.7Cu photovoltaic module, the increase of the intermetallic compounds thickness in the Sn–0.7Cu–0.2Zn photovoltaic module was much smaller. A retard in the growth of the intermetallic compounds caused the series resistance of the module to slightly increase by 9%. A Zn accumulation layer formed at the module interfaces by adding trace Zn to the Sn–0.7Cu solder, retarding the growth of the intermetallic compounds and thus enhancing the lifetime of the photovoltaic module. Full article
(This article belongs to the Special Issue Nanostructured Photovoltaic Devices)
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10 pages, 9313 KiB  
Article
3D Printing of Elastic Membranes for Fluidic Pumping and Demonstration of Reciprocation Inserts on the Microfluidic Disc
by Maria Bauer, Adrian Bahani, Tracy Ogata and Marc Madou
Micromachines 2019, 10(8), 549; https://doi.org/10.3390/mi10080549 - 19 Aug 2019
Cited by 2 | Viewed by 3795
Abstract
While 3D printing is increasingly used in most fields of engineering, its utilization for microfluidics has thus far been limited. To demonstrate future applications of 3D printing for microfluidic structures, we investigate the fluidic characteristics of material jetted surfaces. We also demonstrate the [...] Read more.
While 3D printing is increasingly used in most fields of engineering, its utilization for microfluidics has thus far been limited. To demonstrate future applications of 3D printing for microfluidic structures, we investigate the fluidic characteristics of material jetted surfaces. We also demonstrate the manufacture of dual-material microfluidic inserts that feature rigid and elastic elements. The fabricated parts are inserted on a microfluidic CD, enhancing design freedom and prototyping capability of over molded parts. Furthermore, printed elastic membranes are tested for fatigue during elastic-pneumatic pumping and rigid and elastic surfaces are characterized with regards to hydrophilicity and surface topography. Finally, different printed disc inserts are demonstrated for moving liquid towards the center of rotation, the mixing of liquids, and controlling burst events through channels width. Full article
(This article belongs to the Special Issue 3D Printed Microfluidic Devices and Its Applications)
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11 pages, 1063 KiB  
Article
3D Printed Lab-on-a-Chip Platform for Chemical Stimulation and Parallel Analysis of Ion Channel Function
by Daniel Aschenbrenner, Oliver Friedrich and Daniel F. Gilbert
Micromachines 2019, 10(8), 548; https://doi.org/10.3390/mi10080548 - 19 Aug 2019
Cited by 10 | Viewed by 3882
Abstract
Functional imaging has been a widely established method for the assessment of ion channel function in vitro. Conventional infrastructure used for in vitro functional analysis of ion channels is typically proprietary, non-customizable, expensive, and requires a high level of skill to use and [...] Read more.
Functional imaging has been a widely established method for the assessment of ion channel function in vitro. Conventional infrastructure used for in vitro functional analysis of ion channels is typically proprietary, non-customizable, expensive, and requires a high level of skill to use and maintain. 3D desktop printing, which is employed in the rapid prototyping field, allows for quick engineering of alternatives to conventional imaging infrastructure that are customizable, low cost, and user friendly. Here, we describe an ultra-low-cost microfluidic lab-on-a-chip (LOC) device manufactured using acrylonitrile butadiene styrene (ABS) for in vitro functional imaging of ion channels that can quickly and easily be reconstructed using three-dimensional (3D) desktop printing. The device is light weight (<5 g), small (20 mm × 49 mm), and extremely low cost (<EUR 1). We simulate fluidics within the printed channels and assess the suitability of the engineered chamber to generate homogeneous mixtures during solution exchange. We demonstrate the usability of the 3D printed microfluidic device in a case study using Fluo-4-loaded human embryonal kidney-derived (HEK293) cells, recombinantly expressing the capsaicin receptor, transient receptor potential vanilloid receptor type 1 (TRPV1), as a model system. In the case study, we confirm its applicability to solution exchange for chemical stimulation and parallel functional time-lapse fluorescence microscopy-based calcium imaging. We assess the suitability of ABS for culturing HEK293 cells inside the microfluidic LOC, based on qualitative analysis of microscopic transmission light images of ABS-exposed HEK293 cells and confirm the previously reported biocompatibility of ABS. To highlight the versatility of the 3D printed microfluidic device, we provide an example for multiplication of the shown concept within a 3D printed multichannel microfluidic LOC to be used, for example, in a higher throughput format for parallelized functional analysis of ion channels. While this work focusses on Ca2+ imaging with TRPV1 channels, the device may also be useful for application with other ion channel types and in vitro models. Full article
(This article belongs to the Special Issue 3D Printed Microfluidic Devices and Its Applications)
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7 pages, 1666 KiB  
Article
Contact Photolithography at Sub-Micrometer Scale Using a Soft Photomask
by Chun-Ying Wu, Heng Hsieh and Yung-Chun Lee
Micromachines 2019, 10(8), 547; https://doi.org/10.3390/mi10080547 - 18 Aug 2019
Cited by 16 | Viewed by 8027
Abstract
This paper proposes a method for improving the patterning resolution of conventional contact photolithography from the micrometer, down to the sub-micrometer scale. The key element is a soft polydimethylsiloxane (PDMS) photomask, which is first replicated from a silicon mold and then patterned with [...] Read more.
This paper proposes a method for improving the patterning resolution of conventional contact photolithography from the micrometer, down to the sub-micrometer scale. The key element is a soft polydimethylsiloxane (PDMS) photomask, which is first replicated from a silicon mold and then patterned with a black photoresist (PR) layer to selectively block ultraviolet (UV) light. This soft PDMS photomask can easily form an intimate and conformable contact with a PR-coated substrate and hence can perform contact photolithography with high pattern resolution. The fabrication processes of this black-PR/PDMS soft photomask are experimentally carried out. Using the fabricated soft photomask, UV patterning by contact photolithography with the smallest line-width of 170 nm over a 4” wafer area was successfully achieved. The advantages and potentials of this new type of contact photolithography will be addressed. Full article
(This article belongs to the Special Issue Advanced MEMS/NEMS Technology, Volume II)
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8 pages, 1226 KiB  
Article
Magneto-Electroluminescence in ITO/MEH-PPV:PEO:LiCF3SO3/Al Polymer Light-Emitting Electrochemical Cells
by Mingpeng Zhu, Xueting Yuan and Gang Ni
Micromachines 2019, 10(8), 546; https://doi.org/10.3390/mi10080546 - 17 Aug 2019
Cited by 4 | Viewed by 4407
Abstract
Magnetic field effects (MFE) have been extensively studied in organic light emitting diodes because of their potential application in organic spintronics devices. However, only a few studies on MFE in organic light-emitting electrochemical cells (LEC) have been reported. In this paper, magnetic field [...] Read more.
Magnetic field effects (MFE) have been extensively studied in organic light emitting diodes because of their potential application in organic spintronics devices. However, only a few studies on MFE in organic light-emitting electrochemical cells (LEC) have been reported. In this paper, magnetic field effects on the electroluminescence of an LEC device with the structure of ITO/MEH-PPV:PEO:LiCF3SO3/Al were studied at various temperatures. The luminance–current–voltage curves of the device shows the typical bi-polar characteristics of LECs; positive magnetic electroluminescence (MEL) was observed with a value of about 2.5% (B = 42 mT, 250 K), showing a Lorentzian line shape. With a decrease in temperature, the MEL value and the threshold voltage increased accordingly, below the possible mechanism is discussed. Full article
(This article belongs to the Special Issue Organic Electronic Devices)
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17 pages, 8753 KiB  
Article
Towards a Miniaturized 3D Receiver WPT System for Capsule Endoscopy
by Sadeque Reza Khan and Marc P.Y. Desmulliez
Micromachines 2019, 10(8), 545; https://doi.org/10.3390/mi10080545 - 17 Aug 2019
Cited by 18 | Viewed by 4726
Abstract
The optimization, manufacturing, and performance characterization of a miniaturized 3D receiver (RX)-based wireless power transfer (WPT) system fed by a multi-transmitter (multi-TX) array is presented in this study for applications in capsule endoscopy (CE). The 200 mm outer diameter, 35 μm thick printed [...] Read more.
The optimization, manufacturing, and performance characterization of a miniaturized 3D receiver (RX)-based wireless power transfer (WPT) system fed by a multi-transmitter (multi-TX) array is presented in this study for applications in capsule endoscopy (CE). The 200 mm outer diameter, 35 μm thick printed spiral TX coils of 2.8 g weight, is manufactured on a flexible substrate to enable bendability and portability of the transmitters by the patients. The 8.9 mm diameter—4.8 mm long, miniaturized 3D RX—includes a 4 mm diameter ferrite road to increase power transfer efficiency (PTE) and is dimensionally compatible for insertion into current endoscopic capsules. The multi-TX is activated using a custom-made high-efficiency dual class-E power amplifier operated in subnominal condition. A resulting link and system PTE of 1% and 0.7%, respectively, inside a phantom tissue is demonstrated for the proposed 3D WPT system. The specific absorption rate (SAR) is simulated using the HFSSTM software (15.0) at 0.66 W/kg at 1 MHz operation frequency, which is below the IEEE guidelines for tissue safety. The maximum variation in temperature was also measured as 1.9 °C for the typical duration of the capsule’s travel in the gastrointestinal tract to demonstrate the patients’ tissues safety. Full article
(This article belongs to the Special Issue 10th Anniversary of Micromachines)
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12 pages, 3950 KiB  
Article
Fabrication of Different Microchannels by Adjusting the Extrusion Parameters for Sacrificial Molds
by Wenlai Tang, Hao Liu, Liya Zhu, Jianping Shi, Zongan Li, Nan Xiang and Jiquan Yang
Micromachines 2019, 10(8), 544; https://doi.org/10.3390/mi10080544 - 17 Aug 2019
Cited by 14 | Viewed by 5063
Abstract
Using the 3D printed mold-removal method to fabricate microchannel has become a promising alternative to the conventional soft lithography technique, due to the convenience in printing channel mold and the compatibility with PDMS material. Although having great potential, the use of single filament [...] Read more.
Using the 3D printed mold-removal method to fabricate microchannel has become a promising alternative to the conventional soft lithography technique, due to the convenience in printing channel mold and the compatibility with PDMS material. Although having great potential, the use of single filament extruded by fused deposition modeling (FDM) as the sacrificial channel mold has not been elaborately studied. In this paper, we demonstrate the fabrication of microchannels with different structure and size by controllably extruding the sacrificial channel molds. The influences of the main processing parameters including working distance, extrusion amount and printing speed on the printed microchannels are systematically investigated. The results show that, the circular and low-aspect-ratio straight microchannels with different sizes can be fabricated by adjusting the extrusion amounts. The sinusoidal, 3D curved and cross-linked curved microchannels along straight path can be fabricated, either independently or in combination, by the combined control of the working distance, extrusion amount and printing speed. The complex microchannels with different structural features can also be printed along curved serpentine, rectangular serpentine, and spiral paths. This paper presents a simple and powerful method to fabricate the complex microchannels with different structure and size by just controlling the processing parameters for extruding channel molds. Full article
(This article belongs to the Special Issue 10th Anniversary of Micromachines)
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10 pages, 2414 KiB  
Article
A Compact, Syringe-Assisted, Vacuum-Driven Micropumping Device
by Anyang Wang, Domin Koh, Philip Schneider, Evan Breloff and Kwang W. Oh
Micromachines 2019, 10(8), 543; https://doi.org/10.3390/mi10080543 - 17 Aug 2019
Cited by 9 | Viewed by 6284
Abstract
In this paper, a simple syringe‑assisted pumping method is introduced. The proposed fluidic micropumping system can be used instead of a conventional pumping system which tends to be large, bulky, and expensive. The micropump was designed separately from the microfluidic channels and directly [...] Read more.
In this paper, a simple syringe‑assisted pumping method is introduced. The proposed fluidic micropumping system can be used instead of a conventional pumping system which tends to be large, bulky, and expensive. The micropump was designed separately from the microfluidic channels and directly bonded to the outlet of the microfluidic device. The pump components were composed of a dead‑end channel which was surrounded by a microchamber. A syringe was then connected to the pump structure by a short tube, and the syringe plunger was manually pulled out to generate low pressure inside the microchamber. Once the sample was loaded in the inlet, air inside the channel diffused into the microchamber through the PDMS (polydimethylsiloxane) wall, acting as a dragging force and pulling the sample toward the outlet. A constant flow with a rate that ranged from 0.8 nl · s 1 to 7.5 nl · s 1 was achieved as a function of the geometry of the pump, i.e., the PDMS wall thickness and the diffusion area. As a proof-of-concept, microfluidic mixing was demonstrated without backflow. This method enables pumping for point-of-care testing (POCT) with greater flexibility in hand-held PDMS microfluidic devices. Full article
(This article belongs to the Special Issue Biomedical Microfluidic Devices 2019)
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20 pages, 4324 KiB  
Article
Positioning Error Analysis and Control of a Piezo-Driven 6-DOF Micro-Positioner
by Chao Lin, Shan Zheng, Pingyang Li, Zhonglei Shen and Shuang Wang
Micromachines 2019, 10(8), 542; https://doi.org/10.3390/mi10080542 - 17 Aug 2019
Cited by 16 | Viewed by 4544
Abstract
This paper presents a positioning error model and a control compensation scheme for a six-degree-of-freedom (6-DOF) micro-positioner based on a compliant mechanism and piezoelectric actuators (PZT). The positioning error model is established by means of the kinematic model of the compliant mechanism and [...] Read more.
This paper presents a positioning error model and a control compensation scheme for a six-degree-of-freedom (6-DOF) micro-positioner based on a compliant mechanism and piezoelectric actuators (PZT). The positioning error model is established by means of the kinematic model of the compliant mechanism and complete differential coefficient theory, which includes the relationships between three typical errors (hysteresis, machining and measuring errors) and the total positioning error. The quantitative analysis of three errors is demonstrated through several experimental studies. Afterwards, an inverse Presiach model-based feedforward compensation of the hysteresis nonlinearity is employed by the control scheme, combined with a proportional-integral-derivative (PID) feedback controller for the compensation of machining and measuring errors. Moreover, a back propagation neural network PID (BP-PID) controller and a cerebellar model articulation controller neural network PID (CMAC-PID) controller are also adopted and compared to obtain optimal control. Taking the translational motion along the X axis as an example, the positioning errors are sharply reduced by the inverse hysteresis model with the maximum error of 12.76% and a root-mean-square error of 4.09%. In combination with the CMAC-PID controller, the errors are decreased to 0.63% and 0.23%, respectively. Hence, simulated and experimental results reveal that the proposed approach can improve the positioning accuracy of 6-DOF for the micro-positioner. Full article
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16 pages, 3860 KiB  
Article
A RISC-V Processor with Area-Efficient Memristor-Based In-Memory Computing for Hash Algorithm in Blockchain Applications
by Xiaoyong Xue, Chenzedai Wang, Wenjun Liu, Hangbing Lv, Mingyu Wang and Xiaoyang Zeng
Micromachines 2019, 10(8), 541; https://doi.org/10.3390/mi10080541 - 16 Aug 2019
Cited by 11 | Viewed by 6027
Abstract
Blockchain technology is increasingly being used in Internet of things (IoT) devices for information security and data integrity. However, it is challenging to implement complex hash algorithms with limited resources in IoT devices owing to large energy consumption and a long processing time. [...] Read more.
Blockchain technology is increasingly being used in Internet of things (IoT) devices for information security and data integrity. However, it is challenging to implement complex hash algorithms with limited resources in IoT devices owing to large energy consumption and a long processing time. This paper proposes a RISC-V processor with memristor-based in-memory computing (IMC) for blockchain technology in IoT applications. The IMC-adapted instructions were designed for the Keccak hash algorithm by virtue of the extendibility of the RISC-V instruction set architecture (ISA). Then, a RISC-V processor with area-efficient memristor-based IMC was developed based on an open-source core for IoT applications, Hummingbird E200. The general compiling policy with the data allocation method is also disclosed for the IMC implementation of the Keccak hash algorithm. An evaluation shows that >70% improvements in both performance and energy saving were achieved with limited area overhead after introducing IMC in the RISC-V processor. Full article
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12 pages, 3435 KiB  
Article
Resistive Switching Memory Devices Based on Body Fluid of Bombyx mori L.
by Lu Wang and Dianzhong Wen
Micromachines 2019, 10(8), 540; https://doi.org/10.3390/mi10080540 - 16 Aug 2019
Cited by 11 | Viewed by 4456
Abstract
Resistive switching memory devices are strong candidates for next-generation data storage devices. Biological memristors made from renewable natural biomaterials are very promising due to their biocompatibility, biodegradability, and ecological benignity. In this study, a nonvolatile memristor was fabricated using the body fluid of [...] Read more.
Resistive switching memory devices are strong candidates for next-generation data storage devices. Biological memristors made from renewable natural biomaterials are very promising due to their biocompatibility, biodegradability, and ecological benignity. In this study, a nonvolatile memristor was fabricated using the body fluid of Bombyx mori as the dielectric layer. The developed Al/Bombyx mori body fluid film/indium tin oxide (ITO) biomemristor exhibited bipolar resistive switching characteristics with a maximum on/off current ratio greater than 104. The device showed a retention time of more than 1 × 104 s without any signs of deterioration, thus proving its good stability and reliability. The resistive switching behavior of the Al/Bombyx mori body fluid film/ITO biological memristor is driven by the formation and breakage of conductive filaments formed by the migration of oxygen ions. This study confirms that Bombyx mori body fluid, a 100% natural, inexpensive, and abundant material, is a potential candidate as a nonvolatile biomemristor material with broad application prospects. Full article
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43 pages, 4895 KiB  
Review
Selective Carbon Material Engineering for Improved MEMS and NEMS
by Stephane Neuville
Micromachines 2019, 10(8), 539; https://doi.org/10.3390/mi10080539 - 16 Aug 2019
Cited by 41 | Viewed by 5900
Abstract
The development of micro and nano electromechanical systems and achievement of higher performances with increased quality and life time is confronted to searching and mastering of material with superior properties and quality. Those can affect many aspects of the MEMS, NEMS and MOMS [...] Read more.
The development of micro and nano electromechanical systems and achievement of higher performances with increased quality and life time is confronted to searching and mastering of material with superior properties and quality. Those can affect many aspects of the MEMS, NEMS and MOMS design including geometric tolerances and reproducibility of many specific solid-state structures and properties. Among those: Mechanical, adhesion, thermal and chemical stability, electrical and heat conductance, optical, optoelectronic and semiconducting properties, porosity, bulk and surface properties. They can be affected by different kinds of phase transformations and degrading, which greatly depends on the conditions of use and the way the materials have been selected, elaborated, modified and assembled. Distribution of these properties cover several orders of magnitude and depend on the design, actually achieved structure, type and number of defects. It is then essential to be well aware about all these, and to distinguish and characterize all features that are able to affect the results. For this achievement, we point out and discuss the necessity to take into account several recently revisited fundamentals on carbon atomic rearrangement and revised carbon Raman spectroscopy characterizing in addition to several other aspects we will briefly describe. Correctly selected and implemented, these carbon materials can then open new routes for many new and more performing microsystems including improved energy generation, storage and conversion, 2D superconductivity, light switches, light pipes and quantum devices and with new improved sensor and mechanical functions and biomedical applications. Full article
(This article belongs to the Special Issue Carbon Based Electronic Devices)
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13 pages, 3149 KiB  
Communication
A Toolbox for Organelle Mechanobiology Research—Current Needs and Challenges
by Qian Feng, Sung Sik Lee and Benoît Kornmann
Micromachines 2019, 10(8), 538; https://doi.org/10.3390/mi10080538 - 16 Aug 2019
Cited by 10 | Viewed by 5368
Abstract
Mechanobiology studies from the last decades have brought significant insights into many domains of biological research, from development to cellular signaling. However, mechano-regulation of subcellular components, especially membranous organelles, are only beginning to be unraveled. In this paper, we take mitochondrial mechanobiology as [...] Read more.
Mechanobiology studies from the last decades have brought significant insights into many domains of biological research, from development to cellular signaling. However, mechano-regulation of subcellular components, especially membranous organelles, are only beginning to be unraveled. In this paper, we take mitochondrial mechanobiology as an example to discuss recent advances and current technical challenges in this field. In addition, we discuss the needs for future toolbox development for mechanobiological research of intracellular organelles. Full article
(This article belongs to the Special Issue Microfluidics for Soft Matter and Mechanobiology, Volume I)
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12 pages, 2614 KiB  
Article
A Lab-on-a-Chip Device Integrated DNA Extraction and Solid Phase PCR Array for the Genotyping of High-Risk HPV in Clinical Samples
by Cancan Zhu, Anzhong Hu, Junsheng Cui, Ke Yang, Xinchao Zhu, Yong Liu, Guoqing Deng and Ling Zhu
Micromachines 2019, 10(8), 537; https://doi.org/10.3390/mi10080537 - 15 Aug 2019
Cited by 30 | Viewed by 7557
Abstract
Point-of-care (POC) molecular diagnostics play a crucial role in the prevention and treatment of infectious diseases. It is necessary to develop portable, easy-to-use, inexpensive and rapid molecular diagnostic tools. In this study, we proposed a lab-on-a-chip device that integrated DNA extraction, solid-phase PCR [...] Read more.
Point-of-care (POC) molecular diagnostics play a crucial role in the prevention and treatment of infectious diseases. It is necessary to develop portable, easy-to-use, inexpensive and rapid molecular diagnostic tools. In this study, we proposed a lab-on-a-chip device that integrated DNA extraction, solid-phase PCR and genotyping detection. The ingenious design of the pneumatic microvalves enabled the fluid mixing and reagent storage to be organically combined, significantly reducing the size of the chip. The solid oligonucleotide array incorporated into the chip allowed the spatial separation of the primers and minimized undesirable interactions in multiplex amplification. As a proof-of-concept for POC molecular diagnostics on the device, five genotypes of high-risk human papillomavirus (HPV) (HPV16/HPV18/HPV31/HPV33/HPV58) were examined. Positive quality control samples and HPV patient cervical swab specimens were analyzed on the integrated microdevice. The platform was capable of detection approximately 50 copies of HPV virus per reaction during a single step, including DNA extraction, solid-phase PCR and genotype detection, in 1 h from samples being added to the chip. This simple and inexpensive microdevice provided great utility for the screening and monitoring of HPV genotypes. The sample-to-result platform will pave the way for wider application of POC molecular testing in the fields of clinical diagnostics, food safety, and environmental monitoring. Full article
(This article belongs to the Special Issue Biosensors for Pathogen Detection)
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15 pages, 22299 KiB  
Article
Metal and Polymeric Strain Gauges for Si-Based, Monolithically Fabricated Organs-on-Chips
by William F. Quirós-Solano, Nikolas Gaio, Cinzia Silvestri, Gregory Pandraud, Ronald Dekker and Pasqualina M. Sarro
Micromachines 2019, 10(8), 536; https://doi.org/10.3390/mi10080536 - 15 Aug 2019
Cited by 10 | Viewed by 4698
Abstract
Organ-on-chip (OOC) is becoming the alternative tool to conventional in vitro screening. Heart-on-chip devices including microstructures for mechanical and electrical stimulation have been demonstrated to be advantageous to study structural organization and maturation of heart cells. This paper presents the development of metal [...] Read more.
Organ-on-chip (OOC) is becoming the alternative tool to conventional in vitro screening. Heart-on-chip devices including microstructures for mechanical and electrical stimulation have been demonstrated to be advantageous to study structural organization and maturation of heart cells. This paper presents the development of metal and polymeric strain gauges for in situ monitoring of mechanical strain in the Cytostretch platform for heart-on-chip application. Specifically, the optimization of the fabrication process of metal titanium (Ti) strain gauges and the investigation on an alternative material to improve the robustness and performance of the devices are presented. The transduction behavior and functionality of the devices are successfully proven using a custom-made set-up. The devices showed resistance changes for the pressure range (0–3 kPa) used to stretch the membranes on which heart cells can be cultured. Relative resistance changes of approximately 0.008% and 1.2% for titanium and polymeric strain gauges are respectively reported for membrane deformations up to 5%. The results demonstrate that both conventional IC metals and polymeric materials can be implemented for sensing mechanical strain using robust microfabricated organ-on-chip devices. Full article
(This article belongs to the Special Issue Organs-on-chips)
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12 pages, 3040 KiB  
Article
Effects of Ionic Strength on Lateral Particle Migration in Shear-Thinning Xanthan Gum Solutions
by Mira Cho, Sun Ok Hong, Seung Hak Lee, Kyu Hyun and Ju Min Kim
Micromachines 2019, 10(8), 535; https://doi.org/10.3390/mi10080535 - 15 Aug 2019
Cited by 8 | Viewed by 4164
Abstract
Viscoelastic fluids, including particulate systems, are found in various biological and industrial systems including blood flow, food, cosmetics, and electronic materials. Particles suspended in viscoelastic fluids such as polymer solutions migrate laterally, forming spatially segregated streams in pressure-driven flow. Viscoelastic particle migration was [...] Read more.
Viscoelastic fluids, including particulate systems, are found in various biological and industrial systems including blood flow, food, cosmetics, and electronic materials. Particles suspended in viscoelastic fluids such as polymer solutions migrate laterally, forming spatially segregated streams in pressure-driven flow. Viscoelastic particle migration was recently applied to microfluidic technologies including particle counting and sorting and the micromechanical measurement of living cells. Understanding the effects on equilibrium particle positions of rheological properties of suspending viscoelastic fluid is essential for designing microfluidic applications. It has been considered that the shear-thinning behavior of viscoelastic fluid is a critical factor in determining the equilibrium particle positions. This work presents the lateral particle migration in two different xanthan gum-based viscoelastic fluids with similar shear-thinning viscosities and the linear viscoelastic properties. The flexibility and contour length of the xanthan gum molecules were tuned by varying the ionic strength of the solvent. Particles suspended in flexible and short xanthan gum solution, dissolved at high ionic strength, migrated toward the corners in a square channel, whereas particles in the rigid and long xanthan gum solutions in deionized water migrated toward the centerline. This work suggests that the structural properties of polymer molecules play significant roles in determining the equilibrium positions in shear-thinning fluids, despite similar bulk rheological properties. The current results are expected to be used in a wide range of applications such as cell counting and sorting. Full article
(This article belongs to the Special Issue Microfluidics for Soft Matter and Mechanobiology, Volume I)
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11 pages, 1855 KiB  
Article
Hemostasis-On-a-Chip: Impedance Spectroscopy Meets Microfluidics for Hemostasis Evaluation
by Shadi Karimi, Josep Farré-Lladós, Enrique Mir, Ginés Escolar and Jasmina Casals-Terré
Micromachines 2019, 10(8), 534; https://doi.org/10.3390/mi10080534 - 14 Aug 2019
Cited by 8 | Viewed by 4892
Abstract
In the case of vascular injury, a complex process (of clotting) starts, involving mainly platelets and coagulation factors. This process in healthy humans is known as hemostasis, but when it is deregulated (thrombosis), it can be the cause of important cardiovascular diseases. Nowadays, [...] Read more.
In the case of vascular injury, a complex process (of clotting) starts, involving mainly platelets and coagulation factors. This process in healthy humans is known as hemostasis, but when it is deregulated (thrombosis), it can be the cause of important cardiovascular diseases. Nowadays, the aging of the population and unhealthy lifestyles increase the impact of thrombosis, and therefore there is a need for tools to provide a better understanding of the hemostasis mechanisms, as well as more cost-effective diagnosis and control devices. This study proposes a novel microflow chamber, with interchangeable biomimetic surfaces to evaluate global hemostasis, using reduced amounts of blood sample and reagents, and also a minimized time required to do the test. To validate the performance of this novel device, a study on the new oral anticoagulant Apixaban (APIX) has been performed and compared to previous conventional techniques. The test shows an excellent agreement, while the amount of the required sample has been reduced (only 100 µL is used), and the amount of reagent as well. An imprinted electrode embedded in the chamber in order to measure the impedance during the coagulation process. This approach distinguishes the impedance behavior of plasma poor in platelets (PPP) and plasma rich in platelets (PRP) for the first time. Full article
(This article belongs to the Special Issue Biomedical Microfluidic Devices 2019)
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18 pages, 4765 KiB  
Article
Permeability of Epithelial/Endothelial Barriers in Transwells and Microfluidic Bilayer Devices
by Timothy S. Frost, Linan Jiang, Ronald M. Lynch and Yitshak Zohar
Micromachines 2019, 10(8), 533; https://doi.org/10.3390/mi10080533 - 13 Aug 2019
Cited by 66 | Viewed by 11660
Abstract
Lung-on-a-chip (LoC) models hold the potential to rapidly change the landscape for pulmonary drug screening and therapy, giving patients more advanced and less invasive treatment options. Understanding the drug absorption in these microphysiological systems, modeling the lung-blood barrier is essential for increasing the [...] Read more.
Lung-on-a-chip (LoC) models hold the potential to rapidly change the landscape for pulmonary drug screening and therapy, giving patients more advanced and less invasive treatment options. Understanding the drug absorption in these microphysiological systems, modeling the lung-blood barrier is essential for increasing the role of the organ-on-a-chip technology in drug development. In this work, epithelial/endothelial barrier tissue interfaces were established in microfluidic bilayer devices and transwells, with porous membranes, for permeability characterization. The effect of shear stress on the molecular transport was assessed using known paracellular and transcellular biomarkers. The permeability of porous membranes without cells, in both models, is inversely proportional to the molecular size due to its diffusivity. Paracellular transport, between epithelial/endothelial cell junctions, of large molecules such as transferrin, as well as transcellular transport, through cell lacking required active transporters, of molecules such as dextrans, is negligible. When subjected to shear stress, paracellular transport of intermediate-size molecules such as dextran was enhanced in microfluidic devices when compared to transwells. Similarly, shear stress enhances paracellular transport of small molecules such as Lucifer yellow, but its effect on transcellular transport is not clear. The results highlight the important role that LoC can play in drug absorption studies to accelerate pulmonary drug development. Full article
(This article belongs to the Special Issue Organs-on-chips)
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17 pages, 2206 KiB  
Review
Recent Advances in Electrochemiluminescence Sensors for Pathogenic Bacteria Detection
by Jinjin Shen, Ting Zhou and Ru Huang
Micromachines 2019, 10(8), 532; https://doi.org/10.3390/mi10080532 - 13 Aug 2019
Cited by 37 | Viewed by 6761
Abstract
Pathogenic bacterial contamination greatly threats human health and safety. Rapidly biosensing pathogens in the early stage of infection would be helpful to choose the correct drug treatment, prevent transmission of pathogens, as well as decrease mortality and economic losses. Traditional techniques, such as [...] Read more.
Pathogenic bacterial contamination greatly threats human health and safety. Rapidly biosensing pathogens in the early stage of infection would be helpful to choose the correct drug treatment, prevent transmission of pathogens, as well as decrease mortality and economic losses. Traditional techniques, such as polymerase chain reaction and enzyme-linked immunosorbent assay, are accurate and effective, but are greatly limited because they are complex and time-consuming. Electrochemiluminescence (ECL) biosensors combine the advantages of both electrochemical and photoluminescence analysis and are suitable for high sensitivity and simple pathogenic bacteria detection. In this review, we summarize recent advances in ECL sensors for pathogenic bacteria detection and highlight the development of paper-based ECL platforms in point of care diagnosis of pathogens. Full article
(This article belongs to the Special Issue Biosensors for Pathogen Detection)
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10 pages, 2178 KiB  
Article
An Origami Paper-Based Device Printed with DNAzyme-Containing DNA Superstructures for Escherichia coli Detection
by Yating Sun, Yangyang Chang, Qiang Zhang and Meng Liu
Micromachines 2019, 10(8), 531; https://doi.org/10.3390/mi10080531 - 12 Aug 2019
Cited by 37 | Viewed by 5564
Abstract
Rapid detection of pathogenic bacteria is extremely important for public health and safety. Here, we describe for the first time an integrated origami paper-based analytical device (PAD) incorporating cell lysis, molecular recognition, amplification and visual detection of Escherichia coli (E. coli). [...] Read more.
Rapid detection of pathogenic bacteria is extremely important for public health and safety. Here, we describe for the first time an integrated origami paper-based analytical device (PAD) incorporating cell lysis, molecular recognition, amplification and visual detection of Escherichia coli (E. coli). The device features three components: paper for its ability to extract protein molecules nonspecifically from cells, DNA superstructures for their ability to immobilize RNA-cleaving DNAzymes (RCDs) but undergo target-induced RNA cleavage on paper, and isothermal rolling circle amplification (RCA) for its ability to amplify each cleavage event into repetitive sequence units that can be detected by naked eye. This device can achieve detection of E. coli K12 with a detection limit of as low as 103 CFU·mL−1 in a total turnaround time of 35 min. Furthermore, this device allowed the sensitive detection of E. coli in complex sample matrices such as juice and milk. Given that more specific RCDs can be evolved for diverse bacteria, the integrated PAD holds great potential for rapid, sensitive and highly selective detection of pathogenic bacteria in resource-limited settings. Full article
(This article belongs to the Special Issue Biosensors for Pathogen Detection)
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14 pages, 2348 KiB  
Article
Direct Patterning of a Carbon Nanotube Thin Layer on a Stretchable Substrate
by Eunji Lee, Hye Jin Kim, Yejin Park, Seungjun Lee, Sae Youn Lee, Taewon Ha, Hyun-Joon Shin, Youngbaek Kim and Jinsik Kim
Micromachines 2019, 10(8), 530; https://doi.org/10.3390/mi10080530 - 11 Aug 2019
Cited by 8 | Viewed by 4769
Abstract
Solution-based direct patterning on an elastomer substrate with meniscus-dragging deposition (MDD) enables fabrication of very thin carbon nanotube (CNT) layers in the nanometer scale (80–330 nm). To fabricate the CNT pattern with CNT solution, contact angle, electrical variation, mechanical stress, and surface cracks [...] Read more.
Solution-based direct patterning on an elastomer substrate with meniscus-dragging deposition (MDD) enables fabrication of very thin carbon nanotube (CNT) layers in the nanometer scale (80–330 nm). To fabricate the CNT pattern with CNT solution, contact angle, electrical variation, mechanical stress, and surface cracks of elastomer substrate were analyzed to identify the optimal conditions of O2 treatment (treatment for 30 s with RF power of 50 W in O2 atmosphere of 50 sccm) and mixture ratio between Ecoflex and polydimethylsiloxane (PDMS) (Ecoflex:PDMS = 5:1). The type of mask for patterning of the CNT layer was determined through quantitative analysis for sharpness and uniformity of the fabricated CNT pattern. Through these optimization processes, the CNT pattern was produced on the elastomer substrate with selected mask (30 μm thick oriented polypropylene). The thickness of CNT pattern was also controlled to have hundreds nanometer and 500 μm wide rectangular and circular shapes were demonstrated. Furthermore, the change in the current and resistance of the CNT layer according to the applied strain on the elastomer substrate was analyzed. Our results demonstrated the potential of the MDD method for direct CNT patterning with high uniformity and the possibility to fabricate a stretchable sensor. Full article
(This article belongs to the Special Issue Microfluidics for Soft Matter and Mechanobiology, Volume I)
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9 pages, 4489 KiB  
Article
Narrow Linewidth Distributed Bragg Reflectors Based on InGaN/GaN Laser
by Wuze Xie, Junze Li, Mingle Liao, Zejia Deng, Wenjie Wang and Song Sun
Micromachines 2019, 10(8), 529; https://doi.org/10.3390/mi10080529 - 11 Aug 2019
Cited by 7 | Viewed by 5135
Abstract
A variety of emerging technologies, such as visible light communication systems, require narrow linewidths and easy-to-integrate light sources. Such a requirement could be potentially fulfilled with the distributed Bragg reflector (DBR) lasers, which are also promising for the monolithical integration with other optical [...] Read more.
A variety of emerging technologies, such as visible light communication systems, require narrow linewidths and easy-to-integrate light sources. Such a requirement could be potentially fulfilled with the distributed Bragg reflector (DBR) lasers, which are also promising for the monolithical integration with other optical components. The InGaN/GaN-based surface etched DBR is designed and optimized using the finite-difference-time-domain (FDTD) method to obtain very narrow-band reflectors that can serve as a wavelength filter. The results reveal that the ultimate reflectivity depends on the grating period and duty ratio of the DBR. Based on the design, the DBR lasers with various duty ratios are fabricated, specifically, the 19th, 13th and 3rd order DBR grating with duty ratio set as 50%/75%/95%. The minimum linewidth could be achieved at 0.45 nm from the 19th order grating with a 75% duty ratio. For comparison, the Fabry–Pérot (F–P) based on the same indium gallium nitride/gallium nitride (InGaN/GaN) epitaxial wafer are fabricated. The full width at half maximum (FWHM) of the DBR laser shrank by 65% compared to that of the conventional F–P laser, which might be helpful in the application of the visible light communication system. Full article
(This article belongs to the Special Issue Nanostructured Light-Emitters)
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8 pages, 3924 KiB  
Article
Enhanced Photon Emission Efficiency Using Surface Plasmon Effect of Pt Nanoparticles in Ultra-Violet Emitter
by Hee-Jung Choi, Sohyeon Kim, Eun-Kyung Chu, Beom-Rae Noh, Won-Seok Lee, Soon-Hwan Kwon, Semi Oh and Kyoung-Kook Kim
Micromachines 2019, 10(8), 528; https://doi.org/10.3390/mi10080528 - 9 Aug 2019
Cited by 6 | Viewed by 3885
Abstract
We demonstrate the surface plasmon (SP)-enhanced ultraviolet (UV) emitter using Pt nanoparticles (NPs). The UV emitter is hole-patterned on the p-AlGaN layer to consider the penetration depth of Pt NPs. The Pt NPs with sizes under 50 nm are required to realize [...] Read more.
We demonstrate the surface plasmon (SP)-enhanced ultraviolet (UV) emitter using Pt nanoparticles (NPs). The UV emitter is hole-patterned on the p-AlGaN layer to consider the penetration depth of Pt NPs. The Pt NPs with sizes under 50 nm are required to realize the plasmonic absorption in UV wavelength. In this study, we confirm the average Pt NP sizes of 10 nm, 20 nm, and 25 nm, respectively, at an annealing temperature of 600 °C. The absorption of annealed Pt NPs is covered with the 365-nm wavelength. The electroluminescence intensity of SP-UV is 70% higher than that of reference UV emitter without hole-patterns and Pt NPs. This improvement can be attributed to the increase of spontaneous emission rate through resonance coupling between the excitons in multiple quantum wells and Pt NPs deposited on the p-AlGaN layer. Full article
(This article belongs to the Special Issue Nanostructured Light-Emitters)
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9 pages, 3310 KiB  
Article
Microfluidic Generation of Amino-Functionalized Hydrogel Microbeads Capable of On-Bead Bioassay
by Seongsoo Kim, Sang-Myung Lee, Sung Sik Lee and Dong-Sik Shin
Micromachines 2019, 10(8), 527; https://doi.org/10.3390/mi10080527 - 9 Aug 2019
Cited by 4 | Viewed by 5051
Abstract
Microfluidic generation of hydrogel microbeads is a highly efficient and reproducible approach to create various functional hydrogel beads. Here, we report a method to prepare crosslinked amino-functionalized polyethylene glycol (PEG) microbeads using a microfluidic channel. The microbeads generated from a microfluidic device were [...] Read more.
Microfluidic generation of hydrogel microbeads is a highly efficient and reproducible approach to create various functional hydrogel beads. Here, we report a method to prepare crosslinked amino-functionalized polyethylene glycol (PEG) microbeads using a microfluidic channel. The microbeads generated from a microfluidic device were evaluated by scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDS) and confocal laser scanning microscopy, respectively. We found that the microbeads were monodisperse and the amino groups were localized on the shell region of the microbeads. A swelling test exhibited compatibility with various solvents. A cell binding assay was successfully performed with RGD peptide-coupled amino-functionalized hydrogel microbeads. This strategy will enable the large production of the various functional microbeads, which can be used for solid phase peptide synthesis and on-bead bioassays. Full article
(This article belongs to the Special Issue Microfluidics for Soft Matter and Mechanobiology, Volume I)
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1 pages, 158 KiB  
Editorial
Microscale Surface Tension and its Applications
by Pierre Lambert and Massimo Mastrangeli
Micromachines 2019, 10(8), 526; https://doi.org/10.3390/mi10080526 - 9 Aug 2019
Cited by 2 | Viewed by 2825
Abstract
More than 200 years since the earliest scientific investigations by Young, Laplace and Plateau, liquid surface tension is still the object of thriving fundamental and applied research [...] Full article
(This article belongs to the Special Issue Microscale Surface Tension and Its Applications)
11 pages, 6755 KiB  
Article
A Wireless Implantable System for Facilitating Gastrointestinal Motility
by Po-Min Wang, Genia Dubrovsky, James C.Y. Dunn, Yi-Kai Lo and Wentai Liu
Micromachines 2019, 10(8), 525; https://doi.org/10.3390/mi10080525 - 9 Aug 2019
Cited by 7 | Viewed by 4862
Abstract
Gastrointestinal (GI) electrical stimulation has been shown in several studies to be a potential treatment option for GI motility disorders. Despite the promising preliminary research progress, however, its clinical applicability and usability are still unknown and limited due to the lack of a [...] Read more.
Gastrointestinal (GI) electrical stimulation has been shown in several studies to be a potential treatment option for GI motility disorders. Despite the promising preliminary research progress, however, its clinical applicability and usability are still unknown and limited due to the lack of a miniaturized versatile implantable stimulator supporting the investigation of effective stimulation patterns for facilitating GI dysmotility. In this paper, we present a wireless implantable GI modulation system to fill this technology gap. The system consists of a wireless extraluminal gastrointestinal modulation device (EGMD) performing GI electrical stimulation, and a rendezvous device (RD) and a custom-made graphical user interface (GUI) outside the body to wirelessly power and configure the EGMD to provide the desired stimuli for modulating GI smooth muscle activities. The system prototype was validated in bench-top and in vivo tests. The GI modulation system demonstrated its potential for facilitating intestinal transit in the preliminary in vivo chronic study using porcine models. Full article
(This article belongs to the Special Issue Implantable Wireless Devices)
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23 pages, 13356 KiB  
Article
Analysis of the Vertical Driving Performance of Multiple Connected Pipe-Climbing Microrobots with Magnetic Wheels
by Munehisa Takeda and Isao Shimoyama
Micromachines 2019, 10(8), 524; https://doi.org/10.3390/mi10080524 - 9 Aug 2019
Cited by 2 | Viewed by 3744
Abstract
In this study, we analyzed the vertical driving performance of multiple connected magnetic wheel-driven microrobots when moving up and down a small cylinder that simulated a pipe. The dynamics of pipe climbing by the magnetic wheel-driven microrobot were analyzed considering the magnetic attraction [...] Read more.
In this study, we analyzed the vertical driving performance of multiple connected magnetic wheel-driven microrobots when moving up and down a small cylinder that simulated a pipe. The dynamics of pipe climbing by the magnetic wheel-driven microrobot were analyzed considering the magnetic attraction force and slip; a vertical climbing simulator was developed considering the hoop force and external force from the adjacent microrobots to determine the magnetic attraction force required for multiple connected microrobot pipe climbing. A prototype of an independent vertical climbing microrobot, 5 mm long, 9 mm wide, and 6.5 mm high, and prototypes of 10 microrobots were manufactured to evaluate the vertical driving performance. The usefulness was verified by showing that three driving microrobots can move seven non-driving microrobots comprising 60% of their own weight up and down along a small cylinder. Full article
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10 pages, 2457 KiB  
Article
Determination of Mercury(II) on A Centrifugal Microfluidic Device Using Ionic Liquid Dispersive Liquid−Liquid Microextraction
by Yun Hui, Yujia Liu, William C. Tang, Dian Song, Marc Madou, Shanhong Xia and Tianzhun Wu
Micromachines 2019, 10(8), 523; https://doi.org/10.3390/mi10080523 - 8 Aug 2019
Cited by 13 | Viewed by 4119
Abstract
An integrated centrifugal microfluidic device was developed to preconcentrate and detect hazardous mercury (II) in water with ionic liquid as environmentally friendly extractant. An automatically salt-controlled ionic liquid dispersive liquid–liquid microextraction on a centrifugal microfluidic device was designed, fabricated, and characterized. The entire [...] Read more.
An integrated centrifugal microfluidic device was developed to preconcentrate and detect hazardous mercury (II) in water with ionic liquid as environmentally friendly extractant. An automatically salt-controlled ionic liquid dispersive liquid–liquid microextraction on a centrifugal microfluidic device was designed, fabricated, and characterized. The entire liquid transport mixing and separation process was controlled by rotation speed, siphon valves, and capillary valves. Still frame images on the rotating device showed the process in detail, revealing the sequential steps of mixing, siphon priming, transportation between chambers, and phase separation. The preconcentration of red dye could be clearly observed with the naked eye. By combining fluorescence probe and microscopy techniques, the device was tested to determine ppb-level mercury (II) in water, and was found to exhibit good linearity and low detection limit. Full article
(This article belongs to the Special Issue Advanced MEMS/NEMS Technology, Volume II)
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