Search Results (644)

This paper presents a theoretical model of a thin, penny-shaped piezoelectric actuator bonded to an isotropic thermo-elastic substrate under coupled electrical-thermal-diffusive loading. The problem is assumed to be axisymmetric, and the peeling stress of the film is neglected in accordance with membrane theory, yielding a simplified equilibrium equation for the piezoelectric film. By employing potential theory and the Hankel transform technique, the surface strain of the substrate is analytically derived. Under the assumption of perfect bonding, a governing integral equation is established in terms of interfacial shear stress. The solution to this integral equation is obtained numerically using orthotropic Chebyshev polynomials. The derived results include the interfacial shear stress, stress intensity factors, as well as the radial and hoop stresses within the system. Finite element analysis is conducted to validate the theoretical predictions. Furthermore, parametric studies elucidate the influence of material mismatch and actuator geometry on the mechanical response. The findings demonstrate that, the performance of the piezoelectric actuator can be optimized through judicious control of the applied electrical-thermal-diffusive loads and careful selection of material and geometric parameters. This work provides valuable insights for the design and optimization of piezoelectric actuator structures in practical engineering applications. Full article

Defensive pessimism, an important emotion regulation and motivation strategy, has increasingly attracted scholarly attention in psychology. Recently, sensor-based methods have begun to supplement or replace traditional questionnaire surveys in personality research. However, current approaches for collecting vital signs data face several challenges, including limited monitoring durations, significant data deviations, and susceptibility to external interference. This paper proposes a novel approach using a NiCr/NiSi alloy film temperature sensor, which has a K-type structure and flexible piezoelectric pressure sensor to identify and predict defensive pessimism personality traits. Experimental results indicate that the Seebeck coefficients for K-, T-, and E-type thermocouples are approximately 41 μV/°C, 39 μV/°C, and 57 μV/°C, respectively, which align closely with national standards and exhibit good consistency across multiple experimental groups. Moreover, radial artery frequency experiments demonstrate a strong linear relationship between pulse rate and the intensity of external stimuli, where stronger stimuli correspond to faster pulse rates. Simulation experiments further reveal a high correlation between radial artery pulse frequency and skin temperature, and a regression model based on the physiological sensor data shows a good fit (p < 0.05). These findings verify the feasibility of using temperature and flexible piezoelectric pressure sensors to identify and predict defensive pessimism personality characteristics. Full article

This paper presents a novel approach employing localized annealing through Joule heating to enhance the performance of Thin-Film Piezoelectric-on-Silicon (TPoS) MEMS resonators that are crucial for applications in sensing, energy harvesting, frequency filtering, and timing control. Despite recent advancements, piezoelectric MEMS resonators still suffer from anchor-related energy losses and limited quality factors (Qs), posing significant challenges for high-performance applications. This study investigates interface modification to boost the quality factor (Q) and reduce the motional resistance, thus improving the electromechanical coupling coefficient and reducing insertion loss. To balance the trade-off between device miniaturization and performance, this work uniquely applies DC current-induced localized annealing to TPoS MEMS resonators, facilitating metal diffusion at the interface. This process results in the formation of platinum silicide, modifying the resonator’s stiffness and density, consequently enhancing the acoustic velocity and mitigating the side-supporting anchor-related energy dissipations. Experimental results demonstrate a Q-factor enhancement of over 300% (from 916 to 3632) and a reduction in insertion loss by more than 14 dB, underscoring the efficacy of this method for reducing anchor-related dissipations due to the highest annealing temperature at the anchors. The findings not only confirm the feasibility of Joule heating for interface modifications in MEMS resonators but also set a foundation for advancements of this post-fabrication thermal treatment technology. Full article

This work presents an innovative hydrothermal approach for fabricating flexible piezoelectric PZT thin films on 20 μm titanium foil substrates using TiO₂ and SrTiO₃ (STO) interlayers. Three heterostructures (Ti/PZT, Ti/TiO₂/PZT, and Ti/TiO₂/STO/PZT) were synthesized to enable low-temperature growth and improve ferroelectric performance for advanced flexible MEMS. Characterizations including XRD, PFM, and P–E loop analysis evaluated crystallinity, piezoelectric coefficient d₃₃, and polarization behavior. The results demonstrate that the multilayered Ti/TiO₂/STO/PZT structure significantly enhances performance. XRD confirmed the STO buffer layer effectively reduces lattice mismatch with PZT to ~0.76%, promoting stable morphotropic phase boundary (MPB) composition formation. This optimized film exhibited superior piezoelectric and ferroelectric properties, with a high d₃₃ of 113.42 pm/V, representing an ~8.65% increase over unbuffered Ti/PZT samples, and displayed more uniform domain behavior in PFM imaging. Impedance spectroscopy showed the lowest minimum impedance of 8.96 Ω at 10.19 MHz, indicating strong electromechanical coupling. Furthermore, I–V measurements demonstrated significantly suppressed leakage currents in the STO-buffered samples, with current levels ranging from 10⁻¹² A to 10⁻⁹ A over ±3 V. This structure also showed excellent fatigue endurance through one million electrical cycles, confirming its mechanical and electrical stability. These findings highlight the potential of this hydrothermally engineered flexible heterostructure for high-performance actuators and sensors in advanced MEMS applications. Full article

Natural polymers, polysaccharides, demonstrate piezoelectric behavior suitable for force sensor manufacturing. Carrageenan hydrogel film with α-iron oxide particles can act as a piezoelectric polysaccharide-based force sensor. The mechanical impact on the hydrogel caused by a falling ball shows the impact response time, which is measured in milliseconds. Repeating several experiments in a row shows the dynamics of fatigue, which does not reduce the speed of response to impact. Through the practical experiments, we sought to demonstrate how theoretical knowledge describes the hydrogel we elaborated, which works as a piezoelectric material. In addition to the theoretical basis, which includes the operation of the metal and metal oxide contact junction, the interaction between the metal oxide and the hydrogel surfaces, the paper presents the practical application of this knowledge to the complex hydrogel film. The simple calculations presented in this paper are intended to predict the hydrogel film’s characteristics and explain the results obtained during practical experiments. Carrageenan, as a low-cost and already widely used polysaccharide in various industries, is suitable for the production of low-cost force sensors in combination with iron oxide. Full article

By introducing oxygen doping, the structure of an AlCrNbSiTiN coating was optimized, and its high-temperature oxidation resistance was improved. As the oxygen content incorporated increases, the coating changes from an FCC structure to an amorphous or spinel structure. Meanwhile, stress relaxation occurred, and the hardness of the coating dropped to 12 gpa. Oxygen-doped coatings exhibit excellent oxidation resistance; this is especially the case for oxidized coatings, whose structure remains stable up to 900 °C in an oxidizing environment. Full article

This paper presents the electrical characterization of a flexible supercapacitor with a unique architecture incorporating a piezoelectric PVDF-TrFE film sandwiched between PEDOT:PSS:Graphene and LiTaO₃ as a charge-generating and charge-transferring layer. Impedance spectroscopy measurements reveal frequency-dependent capacitance behavior, reflecting the contributions of both piezoelectric and supercapacitor capacitances. Charge–discharge cycling tests demonstrate the device’s energy storage capabilities and indicate a potential enhancement through the piezoelectric effect. Supercapacitor cycling tests demonstrate the device’s energy storage capabilities, with an estimated specific capacitance of 10.14 F/g, a power density of 16.3 W/g, an energy density of 5.63 Wh/kg, and a Coulombic efficiency of 96.1% from an active area of 1 cm². The proposed structure can serve as an independent harvester and storage for low-power, wearable sensors. Full article

This study presents a self-powered smart wrist brace integrated with a piezoelectric sensor for real-time biomechanical monitoring during weightlifting activities. The system was designed to quantify wrist flexion across multiple loading conditions (0 kg, 0.5 kg, and 1.0 kg), leveraging mechanical strain-induced voltage generation to capture angular displacement. A flexible PVDF film was embedded within a custom-fitted wrist brace and tested on male and female participants performing controlled wrist flexion. The resulting voltage signals were analyzed to extract root-mean-square (RMS) outputs, calibration curves, and sensitivity metrics. To interpret the experimental results analytically, a lumped-parameter cantilever beam model was developed, linking wrist flexion angles to piezoelectric voltage output based on mechanical deformation theory. The model assumed a linear relationship between wrist angle and induced strain, enabling theoretical voltage prediction through simplified material and geometric parameters. Model-predicted voltage responses were compared with experimental measurements, demonstrating a good agreement and validating the mechanical-electrical coupling approach. Experimental results revealed consistent voltage increases with both wrist angle and applied load, and regression analysis demonstrated strong linear or mildly nonlinear fits with high $R^2$ values (up to 0.994) across all conditions. Furthermore, surface plots and strain sensitivity analyses highlighted the system’s responsiveness to simultaneous angular and loading changes. These findings validate the smart wrist brace as a reliable, low-power biomechanical monitoring tool, with promising applications in injury prevention, rehabilitation, and real-time athletic performance feedback. Full article

This paper considers the uniaxial orientation effect on the structure and piezoelectric properties of vinylidene fluoride-tetrafluoroethylene copolymer ferroelectric films. The films were exposed to uniaxial orientation stretching in a temperature range from 20 °C to 60 °C; then, they were contact polarized under normal conditions. The temperature dependence of the electric strength was determined. The longitudinal piezoelectric coefficient d₃₃ values were measured by the quasi-static Berlincourt method. The piezoresponse force microscopy (PFM) method was used to investigate the film domain structure before and after polarization, and the local piezoelectric coefficient values were also calculated. Phase composition was studied using differential scanning calorimetry and infrared spectroscopy with the Fourier transform. It was found that uniaxial orientation stretching contributed to an increase in the piezoelectric coefficient d₃₃ from 5 pC/N to 16–20 pC/N. The results obtained indicate the importance of the amorphous phase contribution to the formation of the piezoelectric properties in polymeric materials. Full article

Wheel-legged robots combine the advantages of both wheeled robots and traditional quadruped robots, enhancing terrain adaptability but posing higher demands on the perception of foot–ground contact forces. However, existing approaches still suffer from limited accuracy in estimating contact positions and three-dimensional contact forces when dealing with flexible tire–ground interactions. To address this challenge, this study proposes a foot–ground contact state detection technique and optimization method based on multi-sensor fusion and intelligent modeling for wheel-legged robots. First, finite element analysis (FEA) is used to simulate strain distribution under various contact conditions. Combined with global sensitivity analysis (GSA), the optimal placement of PVDF sensors is determined and experimentally validated. Subsequently, under dynamic gait conditions, data collected from the PVDF sensor array are used to predict three-dimensional contact forces through Gaussian process regression (GPR) and artificial neural network (ANN) models. A custom experimental platform is developed to replicate variable gait frequencies and collect dynamic contact data for validation. The results demonstrate that both GPR and ANN models achieve high accuracy in predicting dynamic 3D contact forces, with normalized root mean square error (NRMSE) as low as 8.04%. The models exhibit reliable repeatability and generalization to novel inputs, providing robust technical support for stable contact perception and motion decision-making in complex environments. Full article

This study presents the successful fabrication of lead zirconate titanate (PZT) thin films on silicon (Si) substrates using a hybrid deposition method combining spin-coating and RF sputtering techniques. Initially, a PZT layer was deposited through four successive spin-coating cycles, followed by an additional layer formed via RF sputtering. The resulting multilayer structure was annealed at ${700 }^{°}$C for 2 h to improve crystallinity. Comprehensive material characterization was conducted using XRD, SEM, cross-sectional SEM, EDX, and UV–VIS absorbance spectroscopy. The analyses confirmed the formation of a well-crystallized perovskite phase, a uniform surface morphology, and an optical band gap of approximately 3.55 eV, supporting its suitability for sensing applications. Building upon these findings, a multilayer PZT-based touch sensor was fabricated and electrically characterized. Low-frequency I–V measurements demonstrated consistent and repeatable polarization behavior under cyclic loading conditions. In addition, $\left|Z\right|$–f measurements were performed to assess the sensor’s dynamic electrical behavior. Although expected dielectric responses were observed, the absence of distinct anti-resonance peaks suggested non-idealities linked to ${\mathrm{Ag}}^{+}$ ion diffusion from the electrode layers. To account for these effects, the classical Butterworth–Van Dyke (BVD) equivalent circuit model was extended with additional inductive and resistive components representing parasitic pathways. This modified model provided excellent agreement with the measured impedance and phase data, offering deeper insight into the interplay between material degradation and electrical performance. Overall, the developed sensor structure exhibits strong potential for use in piezoelectric sensing applications, particularly for tactile and pressure-based interfaces. Full article

This paper presents a cost-effective and versatile pico-dispensing technique as an efficient and straightforward approach for depositing zinc oxide nanoparticle (ZnO—NP) thin films on micromechanical devices (MEMS). Due to its piezoelectric properties, bulk ZnO is commonly used as a material for micro-/nanocantilever actuation. The pico-dispensing process provides precise control over the deposition, allowing uniform and localized application of ZnO—NP on microcantilevers. Compared to traditional ZnO deposition techniques (e.g., sputtering or sol–gel), pico-dispensing of ZnO—NP offers advantages in simplicity, reduced material waste, and significantly lower costs. Furthermore, it is easy to tailor the composition and properties by incorporating nanoparticles of other materials. Experimental results demonstrate that ZnO—NP thin films deposited via pico-dispensing enable actuation with amplitudes of several nanometers and bandwidths up to 250 kHz, making them potentially suitable for actuation of micromechanical devices such as in dynamic AFM modes. Full article

In this work, energy was harvested from ankle flexion during gait. For this, two piezoelectric thin films were tested: PVDF and CdS. The PVDF film was a commercial option, and the CdS film was fabricated in our laboratory. Deposition of the CdS film is also reported in this work. Energy harvested during gait from heel strike and ankle flexion was compared. Tests were performed with 10 healthy volunteers walking on a treadmill at 1.2–1.5 km/h. The volunteers wore a sock with piezoelectric films incorporated in the heel and ankle joint (talocrural joint). Tests were performed first with the PVDF film and then with the CdS film. The CdS thin film obtained a d₃₃ coefficient of 1.4928 nm/V, indicating high electrical energy generated from strain-stress. The talocrural joint generated the most energy: 11.359 μJ for the PVDF film and 0.854 μJ for the CdS film. Although the CdS film generated less energy than the commercial option, it was shown that harvesting energy from ankle flexion increased the energy harvested by more than 700% during gait compared to the energy harvested from heel-to-ground impact. Full article

In the context of autonomous environmental monitoring, this study investigates a surface acoustic wave (SAW) sensor designed for selective carbon dioxide (CO₂) detection. The sensor is based on a LiTaO₃ piezoelectric substrate with copper interdigital transducers and a polyetherimide (PEI) layer, chosen for its high electromechanical coupling and strong CO₂ affinity. Finite element simulations were conducted to analyze the resonance frequency response under varying gas concentrations, film thicknesses, pressures, and temperatures. Results demonstrate a linear and sensitive frequency shift, with detection capability starting from 10 ppm. The sensor’s autonomy is ensured by a piezoelectric energy harvester composed of a cantilever beam structure with an attached seismic mass, where mechanical vibrations induce stress in a piezoelectric layer (PZT-5H or PVDF), generating electrical energy via the direct piezoelectric effect. Analytical and numerical analyses were performed to evaluate the influence of excitation frequency, material properties, and optimal load on power output. This integrated configuration offers a compact and energy-independent solution for real-time CO₂ monitoring in low-power or inaccessible environments. Full article

Piezoelectric polyvinylidene fluoride (PVDF) film sensors embedded in a tire can make the tire have a sense of tactile. Thus, PVDF strain sensors play an important role in smart tires. However, temperature tolerance of PVDF is a key issue limiting its application in smart tire as the embedding process needs high temperature vulcanization. This paper proposes a film repolarization method to treat PVDF film materials after high temperature vulcanization, which can be implemented to apply in smart tire. Variation in piezoelectric properties and its changing mechanism of PVDF film are analyzed with the methods of X-Ray Diffraction Spectroscopy (XRD) and Fourier Transform Infrared Spectroscopy (FTIR). Vulcanization process that PVDF film sensors undergo in tire applications are simulated. Furthermore, properties of the PVDF sensors with different process stages are simulated based on finite element model. An experimental platform of the PVDF sensors is set up and the drop rod experiments are conducted. Results verify the performance improvement of the repolarization strategy on embedded PVDF sensors. The effectiveness of the repolarization in the PVDF film shows a great significance for the application of strain sensors in smart tire. Full article