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Advanced Micro-Electro-Mechanical Systems and Micro-Electro-Optical-Mechanical Systems in Scanning Probe Microscopy
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Advanced Micro-Electro-Mechanical Systems and Micro-Electro-Optical-Mechanical Systems in Scanning Probe Microscopy

A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Sensing and Imaging".

Deadline for manuscript submissions: 25 October 2025 | Viewed by 2399

Special Issue Editor

Dr. Andrzej Sikora

E-Mail Website
Guest Editor
Department of Nanometrology, Faculty of Electronics, Photonics and Microsystems, Wrocław University of Science and Technology, 50-370 Wrocław, Poland
Interests: mechanical and electrical properties of materials at the micro- and nanoscale; development and use in research of near-field microscopy, atomic force microscopy; design and construction of measuring equipment

Special Issue Information

Dear Colleagues,

The continuous evolution of micro-electro-mechanical systems (MEMSs) and micro-electro-optical- mechanical systems (MEOMSs) has significantly impacted the field of sensor design, offering unprecedented capabilities in precision sensing, actuation, and control.

Within the domain of scanning probe microscopy (SPM), the integration of advanced MEMSs into MEOMSs has brought forth a new era of high-resolution imaging, manipulation, and sensing on the nanoscale level. By leveraging the unique characteristics of MEMSs and MEOMSs, researchers and engineers have been able to develop novel scanning probe technologies that push the boundaries of spatial resolution, sensitivity, and multifunctionality. As a result, SPM techniques, including atomic force microscopy (AFM) and scanning near-field optical microscopy (SNOM), have undergone remarkable enhancements, opening up new avenues for exploring biological systems, understanding material properties, and advancing nanotechnology applications.

This Special Issue aims to provide a platform for researchers to share their latest findings, technological advancements, and innovative applications at the intersection of MEMSs/MEOMSs and scanning probe microscopy within the sensor community. Through this collection of contributions, we seek to foster collaboration, inspire new research directions, and propel the ongoing development of MEMS/MEOMS-based sensor technologies for SPM and beyond.

Dr. Andrzej Sikora
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Sensors is an international peer-reviewed open access semimonthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • MEMSs
  • MEOMSs
  • scanning probe microscopy
  • sensors
  • nanoscale imaging
  • biosensing
  • control systems

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Published Papers (2 papers)

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13 pages, 1438 KiB  
Article
Adaptive Drive as a Control Strategy for Fast Scanning in Dynamic Mode Atomic Force Microscopy
by Matilde Gelli, Bruno Tiribilli, Faiza Abdul Salam, Massimo Vassalli and Michele Basso
Sensors 2025, 25(3), 860; https://doi.org/10.3390/s25030860 - 31 Jan 2025
Viewed by 556
Abstract
Atomic Force Microscopy (AFM) is an advanced imaging technique which features nanoscale resolution and the ability to work under physiological conditions on soft samples. Modern AFM systems offer easy access to Dynamic Mode imaging which reduces the tip–sample interaction and increases the effective [...] Read more.
Atomic Force Microscopy (AFM) is an advanced imaging technique which features nanoscale resolution and the ability to work under physiological conditions on soft samples. Modern AFM systems offer easy access to Dynamic Mode imaging which reduces the tip–sample interaction and increases the effective resolution. However, the intrinsic nature of this driving strategy induces a trade-off between three different aspects: the scanning speed, an accurate topography reconstruction and weak interaction forces. The impact of this inherent trade-off is especially evident when imaging samples with steep and deep valleys, and artifacts are often created in the reconstructed topography. This phenomenon, known as parachuting, rapidly worsens at faster speeds. In this paper, a new strategy is proposed for limiting parachuting artifacts, based on an adaptive driving strategy, which can be easily implemented as an add-on to commercial AFM systems. The suggested method has been tested on grid samples, and it enhances the nano-imaging quality by effectively reducing artifacts in the topography. Full article
(This article belongs to the Special Issue Advanced Micro-Electro-Mechanical Systems and Micro-Electro-Optical-Mechanical Systems in Scanning Probe Microscopy)
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14 pages, 5170 KiB  
Article
Conductive Atomic Force Microscopy—Ultralow-Current Measurement Systems for Nanoscale Imaging of a Surface’s Electrical Properties
by Andrzej Sikora, Krzysztof Gajewski, Dominik Badura, Bartosz Pruchnik, Tomasz Piasecki, Kamil Raczkowski and Teodor Gotszalk
Sensors 2024, 24(17), 5649; https://doi.org/10.3390/s24175649 - 30 Aug 2024
Viewed by 1484
Abstract
One of the most advanced and versatile nanoscale diagnostic tools is atomic force microscopy. By enabling advanced imaging techniques, it allows us to determine various assets of a surface, including morphological, electrical, mechanical, magnetic, and thermal properties. Measuring local current flow is one [...] Read more.
One of the most advanced and versatile nanoscale diagnostic tools is atomic force microscopy. By enabling advanced imaging techniques, it allows us to determine various assets of a surface, including morphological, electrical, mechanical, magnetic, and thermal properties. Measuring local current flow is one of the very important methods of evaluation for, for instance, photovoltaic materials or semiconductor structures and other nanodevices. Due to contact areas, the current densities can easily reach above 1 kA/m2; therefore, special detection/measurement setups are required. They meet the required measurement range, sensitivity, noise level, and bandwidth at the measurement scale. Also, they prevent the sample from becoming damaged and prevent unwanted tip–sample issues. In this paper, we present three different nanoscale current measurement solutions, supported with test results, proving their performance. Full article
(This article belongs to the Special Issue Advanced Micro-Electro-Mechanical Systems and Micro-Electro-Optical-Mechanical Systems in Scanning Probe Microscopy)
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