- Article
Fabrication of Pyramid Structure Substrate Utilized for Epitaxial Growth Free-Standing GaN
- Ruixian Yu,
- Baoguo Zhang,
- Lei Zhang,
- Yongzhong Wu,
- Haixiao Hu,
- Lei Liu,
- Yongliang Shao and
- Xiaopeng Hao
Metal–organic chemical vapor deposition (MOCVD)-grown GaN on sapphire substrate was etched by hot phosphoric acids. Pyramid structures were obtained in the N-polar face of the MOCVD–GaN. Details of the formation process and morphology of...