- Article
Experimental Study of Irradiation of Thin Oxide and Mo/Si Multilayers by High Brightness Broadband VUV/UV Radiation and Their Degradation
- Victor D. Telekh,
- Aleksei V. Pavlov,
- Daniil V. Kirillov,
- Evgeny V. Vorob’ev,
- Alexander G. Turyanskiy,
- Viacheslav M. Senkov,
- Petr A. Tsygankov,
- Freddy F. Parada-Becerra,
- Vladimir R. Vesnin and
- Andrei S. Skriabin
This study discusses the main features of the irradiation of prospective multilayer coatings by VUV/UV radiation from compressed plasma flows. Such radiation is characterized by a broadband spectrum and high brightness fluxes. Oxide and Mo/Si bilayer...

