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Nanomaterials 2019, 9(3), 443;

Growth of CaxCoO2 Thin Films by A Two-Stage Phase Transformation from CaO–CoO Thin Films Deposited by Rf-Magnetron Reactive Cosputtering

Thin Film Physics Division, Department of Physics Chemistry and Biology (IFM), Linköping University, SE-58183 Linköping, Sweden
Author to whom correspondence should be addressed.
Received: 14 February 2019 / Revised: 1 March 2019 / Accepted: 12 March 2019 / Published: 15 March 2019
(This article belongs to the Special Issue Design and Development of Nanostructured Thin Films)
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The layered cobaltates AxCoO2 (A: alkali metals and alkaline earth metals) are of interest in the area of energy harvesting and electronic applications, due to their good electronic and thermoelectric properties. However, their future widespread applicability depends on the simplicity and cost of the growth technique. Here, we have investigated the sputtering/annealing technique for the growth of CaxCoO2 (x = 0.33) thin films. In this approach, CaO–CoO film is first deposited by rf-magnetron reactive cosputtering from metallic targets of Ca and Co. Second, the as-deposited film is reactively annealed under O2 gas flow to form the final phase of CaxCoO2. The advantage of the present technique is that, unlike conventional sputtering from oxide targets, the sputtering is done from the metallic targets of Ca and Co; thus, the deposition rate is high. Furthermore, the composition of the film is controllable by controlling the power at the targets. View Full-Text
Keywords: thin film; nanostructure; CaxCoO2; sputtering; phase transformation thin film; nanostructure; CaxCoO2; sputtering; phase transformation

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Paul, B.; Lu, J.; Eklund, P. Growth of CaxCoO2 Thin Films by A Two-Stage Phase Transformation from CaO–CoO Thin Films Deposited by Rf-Magnetron Reactive Cosputtering. Nanomaterials 2019, 9, 443.

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