- Article
Tin, The Enabler—Hydrogen Diffusion into Ruthenium
- Chidozie Onwudinanti,
- Ionuţ Tranca,
- Thomas Morgan and
- Shuxia Tao
Hydrogen interaction with ruthenium is of particular importance for the ruthenium-capped multilayer reflectors used in extreme ultraviolet (EUV) lithography. Hydrogen causes blistering, which leads to a loss of reflectivity. This problem is aggravate...

