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Micromachines, Volume 13, Issue 3

2022 March - 150 articles

Cover Story: High-production-rate fabrication of high-performance thin-film lithium niobate electro-optic modulators has been achieved using photolithography-assisted chemo-mechanical etching (PLACE) technology, resulting in an electro-optic 3-dB bandwidth beyond 50 GHz, a half wave voltage-length product of 2.16 Vcm, and a fiber-to-fiber insertion loss of 2.6 dB. View this paper
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Micromachines - ISSN 2072-666X
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