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Micromachines 2017, 8(12), 361;

Laser-Assisted Mist Capillary Self-Alignment

College of Mechanical and Electrical Engineering, Shaanxi University of Science and Technology, Xi’an 710021, China
Department of Applied Physics, Aalto University, 02150 Espoo, Finland
Department of Electrical Engineering and Automation, Aalto University, 02150 Espoo, Finland
Author to whom correspondence should be addressed.
Received: 9 November 2017 / Revised: 6 December 2017 / Accepted: 13 December 2017 / Published: 15 December 2017
(This article belongs to the Special Issue Microscale Surface Tension and Its Applications)
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This paper reports a method combining laser die transfer and mist capillary self-alignment. The laser die transfer technique is employed to feed selected microchips from a thermal release tape onto a receiving substrate and mist capillary self-alignment is applied to align the microchips to the predefined receptor sites on the substrate in high-accuracy. The parameters for a low-power laser die transfer process have been investigated and experimentally optimized. The acting forces during the mist-induced capillary self-alignment process have been analyzed and the critical volume enabling capillary self-alignment has been estimated theoretically and experimentally. We have demonstrated that microchips can be transferred onto receptor sites in 300–400 ms using a low-power laser (100 mW), and chips can self-align to the corresponding receptor sites in parallel with alignment accuracy of 1.4 ± 0.8 μm. The proposed technique has great potential in high-throughput and high-accuracy assembly of micro devices. This paper is extended from an early conference paper (MARSS 2017). View Full-Text
Keywords: mist capillary self-alignment; laser die transfer; hydrophilic/superhydrophobic patterned surfaces; microasssembly mist capillary self-alignment; laser die transfer; hydrophilic/superhydrophobic patterned surfaces; microasssembly

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Chang, B.; Zhu, Z.; Koverola, M.; Zhou, Q. Laser-Assisted Mist Capillary Self-Alignment. Micromachines 2017, 8, 361.

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