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Open AccessArticle

The Analysis of the Influence of Threshold on the Dynamic Contact Process of a Fabricated Vertically Driven MEMS Inertial Switch

1
The College of Information Engineering, Qujing Normal University, Qujing 655000, China
2
The College of Mechanical Engineering, Guizhou Institute of Technology, Guiyang 550003, China
*
Author to whom correspondence should be addressed.
Micromachines 2019, 10(11), 791; https://doi.org/10.3390/mi10110791
Received: 21 October 2019 / Revised: 15 November 2019 / Accepted: 16 November 2019 / Published: 18 November 2019
(This article belongs to the Special Issue MEMS/NEMS Sensors: Fabrication and Application, Volume II)
In this work, to evaluate the influence of the threshold on the dynamic contact process, five models (number 1, 2, 3, 4, 5) with different thresholds were proposed and fabricated with surface micromachining technology. The contact time and response time were used to characterize the dynamic contact performance. The dynamic contact processes of the inertial switches with gradually increasing thresholds were researched using analytical, simulation, and experimental methods. The basic working principle analysis of the inertial switch shows that the contact time of the inertial switch with a low-g value can be extended by using a simply supported beam as the fixed electrode, but the high-G inertial needs more elasticity for fixed electrode. The simulation results indicate that the response time and contact time decrease with the increment in the designed threshold. Prototypes were tested using a dropping hammer system, and the test result indicates that the contact time of the inertial switch with a fixed electrode of the simply supported beam is about 15 and 5 μs when the threshold is about 280 and 580 g, respectively. Meanwhile, the contact time can be extended to 100 μs for the inertial switch using a spring as the fixed electrode when the threshold is about 280 and 580 g. These test results not only prove that the spring fixed electrode can effectively extend the contact time, but also prove that the style of the fixed electrode is the deciding factor affecting the contact time of the high-G inertial switch. View Full-Text
Keywords: MEMS inertial switch; surface micromachining; dynamic contact process; threshold MEMS inertial switch; surface micromachining; dynamic contact process; threshold
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MDPI and ACS Style

Chen, W.; Wang, R.; Wang, H.; Kong, D.; Sun, S. The Analysis of the Influence of Threshold on the Dynamic Contact Process of a Fabricated Vertically Driven MEMS Inertial Switch. Micromachines 2019, 10, 791.

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