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Open AccessArticle

A Robust Fully-Integrated Digital-Output Inductive CMOS-MEMS Accelerometer with Improved Inductor Quality Factor

1
Department of Electrical and Computer Engineering, National Chiao Tung University, Hsin Chu 300, Taiwan
2
Taiwan Semiconductor Manufacturing Company, Hsin Chu 300, Taiwan
*
Author to whom correspondence should be addressed.
Micromachines 2019, 10(11), 792; https://doi.org/10.3390/mi10110792
Received: 26 October 2019 / Revised: 9 November 2019 / Accepted: 11 November 2019 / Published: 18 November 2019
(This article belongs to the Special Issue Advanced MEMS/NEMS Technology, Volume II)
This paper presents the design, fabrication, and characterization of an inductive complementary metal oxide semiconductor micro-electromechanical systems (CMOS-MEMS) accelerometer with on-chip digital output based on LC oscillators. While most MEMS accelerometers employ capacitive detection schemes, the proposed inductive detection scheme is less susceptible to the stress-induced structural curling and deformation that are commonly seen in CMOS-MEMS devices. Oscillator-based frequency readout does not need analog to digital conversion and thus can simplify the overall system design. In this paper, a high-Q CMOS inductor was connected in series with the low-Q MEMS sensing inductor to improve its quality factor. Measurement results showed the proposed device had an offset frequency of 85.5 MHz, sensitivity of 41.6 kHz/g, noise floor of 8.2 mg/√Hz, bias instability of 0.94 kHz (11 ppm) at an average time of 2.16 s, and nonlinearity of 1.5% full-scale. View Full-Text
Keywords: CMOS-MEMS; accelerometer; inductive; inductor; sprinductor; LC tank; oscillator; quality factor; digital output CMOS-MEMS; accelerometer; inductive; inductor; sprinductor; LC tank; oscillator; quality factor; digital output
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Chiu, Y.; Liu, H.-W.; Hong, H.-C. A Robust Fully-Integrated Digital-Output Inductive CMOS-MEMS Accelerometer with Improved Inductor Quality Factor. Micromachines 2019, 10, 792.

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