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Open AccessArticle

Low Concentration Response Hydrogen Sensors Based on Wheatstone Bridge

1
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China
2
National Key Laboratory of Science and Technology on Vacuum Technology and Physics, Lanzhou Institute of Physics, Lanzhou 730000, China
*
Author to whom correspondence should be addressed.
Sensors 2019, 19(5), 1096; https://doi.org/10.3390/s19051096
Received: 24 January 2019 / Revised: 27 February 2019 / Accepted: 1 March 2019 / Published: 4 March 2019
(This article belongs to the Special Issue MEMS Sensors and Resonators)
The PdNi film hydrogen sensors with Wheatstone bridge structure were designed and fabricated with the micro-electro-mechanical system (MEMS) technology. The integrated sensors consisted of four PdNi alloy film resistors. The internal two were shielded with silicon nitride film and used as reference resistors, while the others were used for hydrogen sensing. The PdNi alloy films and SiN films were deposited by magnetron sputtering. The morphology and microstructure of the PdNi films were characterized with X-ray diffraction (XRD). For efficient data acquisition, the output signal was converted from resistance to voltage. Hydrogen (H2) sensing properties of PdNi film hydrogen sensors with Wheatstone bridge structure were investigated under different temperatures (30 °C, 50 °C and 70 °C) and H2 concentrations (from 10 ppm to 0.4%). The hydrogen sensor demonstrated distinct response at different hydrogen concentrations and high repeatability in cycle testing under 0.4% H2 concentration. Towards 10 ppm hydrogen, the PdNi film hydrogen sensor had evident and collectable output voltage of 600 μV. View Full-Text
Keywords: hydrogen sensors; PdNi thin films; Wheatstone bridge; low concentration hydrogen sensors; PdNi thin films; Wheatstone bridge; low concentration
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MDPI and ACS Style

Jiang, H.; Tian, X.; Deng, X.; Zhao, X.; Zhang, L.; Zhang, W.; Zhang, J.; Huang, Y. Low Concentration Response Hydrogen Sensors Based on Wheatstone Bridge. Sensors 2019, 19, 1096.

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