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Keywords = Wheatstone bridge

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19 pages, 7072 KB  
Article
Research on Tail Rotor Load Test Flight Technology for Helicopters Based on Strain Sensor Measurement
by Shuaike Jiao, Jiahong Zheng, Kang Li and Xiaoqing Hu
Sensors 2026, 26(8), 2287; https://doi.org/10.3390/s26082287 - 8 Apr 2026
Viewed by 382
Abstract
The load characteristics of the helicopter tail rotor system are critical to flight safety and handling performance, and flight testing remains the most direct and reliable means to obtain authentic load data. In this paper, the well-established Wheatstone bridge strain measurement method is [...] Read more.
The load characteristics of the helicopter tail rotor system are critical to flight safety and handling performance, and flight testing remains the most direct and reliable means to obtain authentic load data. In this paper, the well-established Wheatstone bridge strain measurement method is adopted to carry out accurate load testing on the helicopter tail rotor system. The tail rotor assembly mainly consists of the tail rotor shaft, pitch link, and tail rotor blades, which undertake different load transfer tasks during flight. Under actual operating conditions, the tail rotor shaft bears significant axial tension as well as combined lateral and vertical bending moments; the pitch link is primarily subjected to alternating axial tension and compression; and the tail rotor blades withstand complex loads including flapping bending, lagwise bending, and torsional moments. According to the distinct stress characteristics and force transmission paths of each component, targeted flight test maneuvers are reasonably designed. These maneuvers include steady-level flight at low, medium, and high speeds, zigzag climbing flight, near-ground side-rear flight, as well as deceleration-to-sprint and obstacle slope maneuvers specified in ADS-33E. Key flight parameters are selected for in-depth analysis to reveal the load distribution and dynamic variation patterns of the tail rotor under typical operating conditions. On this basis, a helicopter load risk test point matrix is established to identify high-risk working conditions and key monitoring positions. This study provides a solid theoretical and data foundation for subsequent flight test monitoring and structural strength verification. It effectively reduces flight test risks, improves monitoring efficiency and accuracy, and helps cut down the human, material, and financial costs associated with flight test monitoring. The research results can also provide important references for the design optimization and safety evaluation of helicopter tail rotor systems. Full article
(This article belongs to the Collection Sensors and Sensing Technology for Industry 4.0)
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9 pages, 1768 KB  
Proceeding Paper
A Low-Cost 3D Printed Piezoresistive Airflow Sensor for Biomedical and Industrial Applications
by Utkucan Tek, Mehmet Akif Nişancı and İhsan Çiçek
Eng. Proc. 2026, 122(1), 16; https://doi.org/10.3390/engproc2026122016 - 16 Jan 2026
Viewed by 752
Abstract
Flow sensing is essential in biomedical engineering, industrial process control, and environmental monitoring. Conventional sensors, while accurate, are often constrained by high fabrication costs, complex processes, and limited design flexibility, restricting their use in disposable or rapidly customizable applications. This paper presents a [...] Read more.
Flow sensing is essential in biomedical engineering, industrial process control, and environmental monitoring. Conventional sensors, while accurate, are often constrained by high fabrication costs, complex processes, and limited design flexibility, restricting their use in disposable or rapidly customizable applications. This paper presents a novel ultra-low-cost airflow sensor fabricated entirely through fused deposition modeling 3D printing. The device employs a cantilever-based structure printed with PETg filament, followed by the deposition of a conductive ABS piezoresistive layer in a two-step process requiring no curing or post-processing. Experimental characterization reveals that the sensor operates in an ultra-low pressure range of 0.88–26.68 Pa, corresponding to flow velocities of 1.2–6.6 m/s. The sensor achieves a sensitivity of 967 Ω/Pa, a resolution of 9.27 Pa, and a detection limit of 83.27 Pa, with a total resistance change of approximately 51.5 kΩ. This kilo-ohm-scale response enables direct readout via a digital multimeter without requiring Wheatstone bridges or instrumentation amplifiers. The minimalist design, combined with sub-5 min fabrication time and material cost below $0.05, positions this sensor as an accessible platform for disposable, scalable, and resource-constrained flow monitoring applications in both biomedical and industrial contexts. Full article
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11 pages, 4063 KB  
Article
Dry-Transferred MoS2 Films on PET with Plasma Patterning for Full-Bridge Strain-Gauge Sensors
by Jinkyeong Kim, Minjae Lee, Wooseung Lee, Minseok Lee, Chang-Mo Kang, Daewoong Jung, Hyunwoo Son, Eunyoung Kim, Sangwoo Chae and Joonhyub Kim
Sensors 2026, 26(2), 585; https://doi.org/10.3390/s26020585 - 15 Jan 2026
Cited by 1 | Viewed by 871
Abstract
In this study, a high-performance MoS2-based strain-gauge pressure was sensor fabricated entirely below 80 °C, enabling direct integration onto flexible polyethylene terephthalate (PET) substrates. The sensor comprised a three-layer MoS2 channel (~2 nm) patterned via dry transfer and O2 [...] Read more.
In this study, a high-performance MoS2-based strain-gauge pressure was sensor fabricated entirely below 80 °C, enabling direct integration onto flexible polyethylene terephthalate (PET) substrates. The sensor comprised a three-layer MoS2 channel (~2 nm) patterned via dry transfer and O2/Ar plasma etching, interfaced with Cr/Au electrodes. This wafer-scale and cost-effective fabrication route preserves the crystallinity of the film and prevents substrate degradation. The sensor achieved a gauge factor of ~104 under compression, representing a fifty-fold improvement over conventional metal foil gauges (~2), with a linear response across both compressive and tensile regimes. Mechanical robustness was confirmed through repeated bending and tape adhesion tests, with no degradation in electrical performance. When configured as a Wheatstone bridge, this device exhibits normalized sensitivity suitable for real-time monitoring, with response and recovery times below 200 ms. These results establish O2/Ar-plasma-patterned MoS2 architectures as a scalable, cost-effective platform for next-generation flexible sensors, outperforming metal-foil technology in applications including seat-occupancy detection, wearable physiological monitoring, and tactile interfaces for soft robotics. Full article
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15 pages, 2635 KB  
Article
Frequency Response Investigations of a Non-Functionalized Triple-Microcantilever System
by Luca Banchelli, Rosen Mitrev, Vladimir Stavrov, Borislav Ganev and Todor Todorov
Micro 2025, 5(4), 59; https://doi.org/10.3390/micro5040059 - 8 Dec 2025
Viewed by 1769
Abstract
This paper presents a theoretical and experimental investigation of the amplitude–frequency response of a triple-microcantilever system designed for real-time ultra-low mass detection. The present study focuses on the unfunctionalized configuration to clarify the intrinsic electromechanical behavior of this system. Starting with analytical expressions, [...] Read more.
This paper presents a theoretical and experimental investigation of the amplitude–frequency response of a triple-microcantilever system designed for real-time ultra-low mass detection. The present study focuses on the unfunctionalized configuration to clarify the intrinsic electromechanical behavior of this system. Starting with analytical expressions, output voltage amplitude–frequency responses are derived for a Wheatstone-bridge-based readout circuit and used to analyze the relationship between the resonant frequencies and mechanical amplitude–frequency responses of the three microcantilevers and the resulting electrical response. The extrema and zero-crossing points of the output voltage do not trivially coincide with the individual resonance peaks or their intersection points; this offers more freedom for defining strong detection criteria. A specialized experimental setup has been developed and used to measure the frequency response of a fabricated triple-microcantilever prototype; good agreement with the theoretical predictions has been found within the operating range. Initial humidification tests confirm the high sensitivity of the microsystem against small added masses, corresponding to an estimated detection limit on the order of 10−16 kg for the unfunctionalized device. In this way, the present work confirms the validity of the proposed triple-microcantilever configuration for ultra-low mass sensing and outlines its potential for future application in pathogen detection upon surface functionalization. Full article
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22 pages, 4298 KB  
Article
Electronic Noise Measurement of a Magnetoresistive Sensor: A Comparative Study
by Cristina Davidaș, Elena Mirela Ștețco, Liviu Marin Viman, Mihai Sebastian Gabor, Ovidiu Aurel Pop and Traian Petrișor
Sensors 2025, 25(19), 6182; https://doi.org/10.3390/s25196182 - 6 Oct 2025
Cited by 1 | Viewed by 2027
Abstract
The intrinsic noise of giant magnetoresistive (GMR) sensors is large at low frequencies, and their resolution is inevitably significantly limited. Investigation of GMR noise requires the use of measurement systems that have lower noise than the sample. In this context, the main purpose [...] Read more.
The intrinsic noise of giant magnetoresistive (GMR) sensors is large at low frequencies, and their resolution is inevitably significantly limited. Investigation of GMR noise requires the use of measurement systems that have lower noise than the sample. In this context, the main purpose of this study is to evaluate the effectiveness of two electronic noise measurement configurations of a single GMR sensing element. The first method connects the sample in a voltage divider configuration and the second method connects in a Wheatstone bridge configuration. Three amplification set-ups were investigated: a low-noise amplifier, an ultra-low-noise amplifier and an instrumentation amplifier. Using cross-correlation, the noise of the measurement system introduced by the amplifiers was reduced. Noise spectra were recorded at room temperature in the frequency range of 0.5 Hz to 10 kHz, under different sample bias voltages. The measurements were performed in zero applied magnetic field and in a field corresponding to the maximum sensitivity of the sensor. From the noise spectra, the detectivity of the sensor was determined to be in the 200–300 nT/√Hz range. Good agreement was observed between the results obtained using all three set-ups, suggesting the effectiveness of the noise measurement systems applied to the magnetoresistive sensor. Full article
(This article belongs to the Special Issue Advances and Applications of Magnetic Sensors: 2nd Edition)
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10 pages, 3823 KB  
Proceeding Paper
Investigation of Triple-Microcantilever Sensor for Ultra-Low Mass-Sensing Applications
by Luca Banchelli, Vladimir Stavrov, Borislav Ganev, Nikolay Nikolov and Todor Todorov
Eng. Proc. 2025, 100(1), 60; https://doi.org/10.3390/engproc2025100060 - 17 Jul 2025
Cited by 1 | Viewed by 941
Abstract
This paper discusses a new method and sensor for the detection of ultra-low masses, such as those of viruses and biomarkers. The sensor contains three microcantilevers with a common substrate that vibrates. The detection method processes phase-shifted signals from Wheatstone bridges from connected [...] Read more.
This paper discusses a new method and sensor for the detection of ultra-low masses, such as those of viruses and biomarkers. The sensor contains three microcantilevers with a common substrate that vibrates. The detection method processes phase-shifted signals from Wheatstone bridges from connected piezoresistors formed on the vibrating microcantilevers and passive resistors on the rigid substrate. Each microcantilever has a gold pad that can be either active or passive. When a mass is detected, the shape of the amplitude–frequency response changes. The proposed method has high mass sensitivity and can respond up to one minute, which is an important challenge for nanocantilever sensors. Full article
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14 pages, 1576 KB  
Article
Calibration of Inductance Using a PXI-Based Maxwell–Wien Bridge from 20 Hz to 20 kHz
by Mohamed Ouameur and Emmanuel Patois
Metrology 2025, 5(2), 29; https://doi.org/10.3390/metrology5020029 - 16 May 2025
Viewed by 2065
Abstract
This paper presents a Maxwell–Wien bridge for use in the calibration of standard inductances with values between 100 µH and 10 H and frequencies from 20 Hz to 20 kHz. The inductances are measured by comparison with a variable standard capacitor, in parallel [...] Read more.
This paper presents a Maxwell–Wien bridge for use in the calibration of standard inductances with values between 100 µH and 10 H and frequencies from 20 Hz to 20 kHz. The inductances are measured by comparison with a variable standard capacitor, in parallel association with a variable standard resistor, on the bridge modified by a Wagner balance. The variable standards are calibrated after the bridge balance. The other resistors in the bridge are standard resistors, pre-calibrated in AC using an automatic Wheatstone bridge and in DC after the bridge has been balanced using a comparison bridge with standard resistors traceable to the quantum Hall effect standards. PXI modules are used to supply the bridge with two voltages controllable in amplitude and phase. Design details and the uncertainty budget are discussed. For an inductance of 100 mH characterized by an internal resistance of 83 Ω, the expanded uncertainties are less than 6 µH on the inductance and 20 mΩ on the internal resistance. For inductances from 100 µH to 10 H, the relative uncertainties are less than 0.02% of the inductance and 0.2% of the internal resistance from 20 Hz to 20 kHz. Full article
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24 pages, 7603 KB  
Article
Active Vibration Control of Cantilever Structures by Integrating the Closed Loop Control Action into Transient Solution of Finite Element Model and an Application to Aircraft Wing
by İlker Bülbül, Murat Akdağ and Hira Karagülle
Machines 2025, 13(5), 379; https://doi.org/10.3390/machines13050379 - 30 Apr 2025
Cited by 2 | Viewed by 1704
Abstract
In this study, the active vibration control (AVC) of a cantilever beam with an end mass is considered first and studied experimentally and through simulation. The Laplace transform method, Newmark method, and ANSYS are used for simulations. An impulse force applied to the [...] Read more.
In this study, the active vibration control (AVC) of a cantilever beam with an end mass is considered first and studied experimentally and through simulation. The Laplace transform method, Newmark method, and ANSYS are used for simulations. An impulse force applied to the mass and the velocity actuation applied to the base are assumed to be disturbance and controlling input, respectively. The displacement of the mass is taken as the feedback signal in simulations. Four strain gauges are located near the bottom point, connected with a Wheatstone bridge, and the output voltage of a load-cell amplifier (LCA) is used as the feedback signal in experiments. Strain feedback is considered in experiments because it is easy to implement, cost-effective, and can be used in applications. Experimental displacement signals obtained from the top of the beam are compared with the output signals from LCA and it is observed that they are approximately linearly dependent. Velocity input is generated with a servo motor-driven linear actuator in experiments. The closed loop control is achieved by a personal computer with an Adlink-9222 PCI DAQ card and a C program in the experiments. The integration of the closed loop control action into the transient solution with Newmark method and ANSYS is implemented in simulations. The input reference value is taken as zero for vibration control. The instantaneous value of the feedback signal at a time step is subtracted from zero to find the error signal value and the error value is multiplied by the control gain to calculate the controlling signal. The simulation results obtained with the Newmark method and ANSYS are in good agreement with the analytical results obtained with Laplace transform method. Simulation results are also in acceptable agreement with the experimental results for explaining the behavior of the success of AVC depending on the control gain, Kp. After verifying ANSYS solutions, the ANSYS procedure is applied to an aircraft wing as a real complex cantilever structure. The wing, with a length of 810.8 mm, 13 ribs with a length of 300 mm, and NACA 4412 airfoil, is considered in this study. It is observed that the AVC of real engineering structures can be simulated by integrating control action into transient solution in ANSYS. Full article
(This article belongs to the Special Issue Active Vibration Control System)
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31 pages, 20934 KB  
Article
The Design and Research of the Bolt Loosening Monitoring System in Combine Harvesters Based on Wheatstone Bridge Circuit Sensor
by Yi Lian, Bangzhui Wang, Meiyan Sun, Kexin Que, Sijia Xu, Zhong Tang and Zhilong Huang
Agriculture 2025, 15(7), 704; https://doi.org/10.3390/agriculture15070704 - 26 Mar 2025
Cited by 4 | Viewed by 1523
Abstract
The combine harvester, as a multi-component machine comprising a cutting table, a conveyor, a threshing cylinder, and other components, experiences significant stress and bolt failures in cutting table-conveyor structures due to inherent excitation and the cutting table’s cantilevered design. To address bolt loosening [...] Read more.
The combine harvester, as a multi-component machine comprising a cutting table, a conveyor, a threshing cylinder, and other components, experiences significant stress and bolt failures in cutting table-conveyor structures due to inherent excitation and the cutting table’s cantilevered design. To address bolt loosening monitoring in the critical joint, this paper designed a Wheatstone bridge circuit-based wireless monitoring system and a multi-channel Wheatstone bridge sensor, enabling multi-bolt monitoring on combine harvesters. Utilizing LoRa wireless communication, the system effectively overcomes the wiring complexity and deployment difficulties of traditional agricultural machinery bolt monitoring systems. The Wheatstone bridge sensor can precisely monitor pre-tightening forces up to 150 kN for M12–M24 bolts. A calibration test based on dynamic time warping (DTW) accurately fitted the sensor’s response to pressure and displacement with determination coefficients of 0.9780 and 0.9753. Then, a validation test focusing on connection bolts revealed a 95.12% overlap between the simulated measurement range and the calibration range under pre-tightening conditions. Furthermore, fitting curves for simulated measurements against tightening torque and angle yielded coefficients of determination of 0.9945 and 0.9939, which demonstrated accurate fitting of pre-tightening conditions and defined the monitoring range of 3.02 × 1012 to 3.49 × 1012. Finally, combined with simulation results, a field performance test confirmed the sensor’s ability to detect minute 5% pre-load reductions, achieve 200 ms data transmission to a host computer, and maintain lossless data transmission over 1.2 km. This sensor and system design provided a valuable reference for bolt loosening monitoring in combine harvesters and other agricultural machinery. Full article
(This article belongs to the Section Agricultural Technology)
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16 pages, 1923 KB  
Article
A High-Sensitivity, Low-Noise, and Low-Hysteresis Tunneling Magnetoresistance Sensor Based on Structural Optimization of Magnetic Tunnel Junctions
by Ran Bi, Ruiying Chen, Shilin Wu, Haoyu Ma, Huiquan Zhang, Xinting Liu, Jinliang He and Jun Hu
Sensors 2025, 25(6), 1730; https://doi.org/10.3390/s25061730 - 11 Mar 2025
Cited by 14 | Viewed by 3945
Abstract
Accurate measurement of magnetic fields holds immense significance across various disciplines, such as IC circuit measurement, geological exploration, and aerospace. The sensitivity and noise parameters of magnetic field sensors play a vital role in detecting minute fluctuations in magnetic fields. However, the current [...] Read more.
Accurate measurement of magnetic fields holds immense significance across various disciplines, such as IC circuit measurement, geological exploration, and aerospace. The sensitivity and noise parameters of magnetic field sensors play a vital role in detecting minute fluctuations in magnetic fields. However, the current detection capability of tunneling magnetoresistance (TMR) is insufficient to meet the requirements for weak magnetic field measurement. This study investigates the impact of structural and fabrication parameters on the performance of TMR sensors. We fabricated series-connected TMR sensors with varying long-axis lengths of the elliptical cross-section and adjusted their performance by modifying annealing magnetic fields and magnetic field bias along the easy axis. The results demonstrate that TMR sensitivity decreases with increasing long-axis length, increases initially and then decreases with an annealing magnetic field, and decreases with a higher bias magnetic field along the easy axis. The voltage noise level of TMR sensors decreases as the long-axis length increases. Notably, the detection capability of TMR sensors exhibits a non-monotonic dependence on long-axis length. Moreover, we optimized the hysteresis of TMR sensors by applying a magnetic field bias along the easy axis. When the bias along the easy axis reached 16 Oe or −40 Oe, the hysteresis level was reduced to below 0.5 Oe. After encapsulating the TMR devices into a full Wheatstone bridge structure, we achieved a detection capability of 17 nT/Hz@1Hz. This study highlights that the detection capability of TMR devices is jointly influenced by fabrication parameters. By optimizing parameter configuration, this work provides theoretical guidance for further enhancing the performance of TMR devices in magnetic field measurements. Full article
(This article belongs to the Section Physical Sensors)
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17 pages, 2471 KB  
Article
Differential Alternating Current Field Measurement with Deep Learning for Crack Detection and Evaluation
by Chenxu Fan, Zhenhu Jin and Jiamin Chen
Micromachines 2025, 16(3), 318; https://doi.org/10.3390/mi16030318 - 10 Mar 2025
Cited by 3 | Viewed by 2041
Abstract
This paper introduces a novel differential TMR-ACFM probe integrated with deep learning for crack detection and evaluation. The differential design effectively mitigates the lift-off effect and external noise, thereby enhancing detection performance without increasing costs. A miniature TMR was designed and fabricated for [...] Read more.
This paper introduces a novel differential TMR-ACFM probe integrated with deep learning for crack detection and evaluation. The differential design effectively mitigates the lift-off effect and external noise, thereby enhancing detection performance without increasing costs. A miniature TMR was designed and fabricated for the probe. Two TMR units were integrated in an area of 175 × 200 microns, and two dies formed the differential structure of the Wheatstone bridge. Experimental results indicate that, in comparison to conventional probes, the quality factor of the differential probe is improved by more than an order of magnitude, and the signal-to-noise ratio is enhanced by over 3 dB. Additionally, a CNN + CBAM network is developed and trained on experimental data to achieve high-precision evaluation of crack dimensions. For cracks measuring 10–30 mm in length, 2–6 mm in depth, and 0.25–1.25 mm in width, the relative errors in the predicted dimensions are 0.201%, 0.709%, and 7.224%, respectively. These results underscore the significant potential of the proposed approach for quantitative crack detection. Full article
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17 pages, 4458 KB  
Article
A Sub-50nW Implantable Body Temperature Sensor and Its Application to a Rat
by Jounghoon Lim, Sieun Lee, Seonae Jang, Young Sang Cho and Jong Pal Kim
Appl. Sci. 2025, 15(5), 2269; https://doi.org/10.3390/app15052269 - 20 Feb 2025
Cited by 3 | Viewed by 2832
Abstract
An ultra-low-power implantable body temperature sensor with a power consumption of 40.9 nW is presented. Deep body temperature measurement can be utilized for diseases such as inflammatory response due to implantable devices, treatment of traumatic brain injury, early monitoring of rejection after kidney [...] Read more.
An ultra-low-power implantable body temperature sensor with a power consumption of 40.9 nW is presented. Deep body temperature measurement can be utilized for diseases such as inflammatory response due to implantable devices, treatment of traumatic brain injury, early monitoring of rejection after kidney transplantation, and monitoring of frictional heat in artificial joints, as well as health management such as ovulation cycles. Since it is implanted in the body and operated by a battery, it is very important to minimize power consumption. For low power consumption, we propose a dynamic virtual Wheatstone bridge technology for low-power transducer driving, and the simplified architecture is designed to operate at 0.6 V. The chip fabricated in a 180 nm CMOS process meets the ASTM E1112-00 specification for medical thermometers. That is, it can measure from 34 °C to 43 °C and meets the accuracy of ±0.1 °C between 37 °C and 39 °C. The measured power consumption at 37 °C is 40.9 nW. To verify practical application, a temperature sensor was implanted in a rat and body temperature changes before and after anesthesia were observed. Full article
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13 pages, 1955 KB  
Article
Enhancing the Sensitivity of a Thermal Microflow Sensor: A Comprehensive Modeling and Simulation Study
by Junhua Gao, Liangliang Tian and Zhengfu Cheng
Micromachines 2025, 16(2), 231; https://doi.org/10.3390/mi16020231 - 18 Feb 2025
Cited by 4 | Viewed by 3508
Abstract
The advancement of microfluidic technology has introduced new requirements for the sensitivity of microflow sensors. To address this, this paper presents a novel high-sensitivity thermal microflow sensor incorporating a heat-insulating cavity structure. The sensor utilizes porous silicon as the substrate and employs vanadium [...] Read more.
The advancement of microfluidic technology has introduced new requirements for the sensitivity of microflow sensors. To address this, this paper presents a novel high-sensitivity thermal microflow sensor incorporating a heat-insulating cavity structure. The sensor utilizes porous silicon as the substrate and employs vanadium dioxide as the thermistor element. This study employed COMSOL Multiphysics finite element software 5.6 to investigate the impact of materials and structural factors on the sensor’s sensitivity, as well as considering the dynamic laws governing their influence. Additionally, the effects of thermal expansion and thermal stress on the microstructure of the sensor are thoroughly examined. The research results show that the sensitivity of the sensor was influenced by key factors such as the distance between the heater and the thermistors, the diameter of the flow channel, the power of the heater, and the presence of an insulation cavity. The utilization of B-phase vanadium dioxide, known for its high temperature coefficient of resistance and suitable resistivity, led to a significant reduction in sensor size and a remarkable improvement in sensitivity. The implementation of four thermistors forming a Wheatstone full bridge further enhanced the sensor’s sensitivity. The sensor’s sensitivity was substantially higher when employing a porous silicon substrate compared with a silicon substrate. Moreover, the integration of a micro-bridge and four micro-beams composed of silicon nitride into the sensor’s structure further improved its sensitivity. The proposed design holds promise for enhancing the sensitivity of thermal microflow sensors and offers valuable insights for future advancements in MEMS technology. Full article
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13 pages, 4909 KB  
Article
Design and Application of Uniaxially Sensitive Stress Sensor
by Kaituo Wu, Zixun Xiang, Xinbo Lu, Yichao Yan, Chunyang Wu, Tao Wang and Wanli Zhang
Micromachines 2025, 16(1), 94; https://doi.org/10.3390/mi16010094 - 15 Jan 2025
Cited by 2 | Viewed by 3340
Abstract
Current stress sensors for microsystems face integration challenges and complex signal decoding. This paper proposes a real-time uniaxially sensitive stress sensor. It is obtained by simple combinations of bar resistors using their sensitivity differences in different axes. With the aid of a Wheatstone [...] Read more.
Current stress sensors for microsystems face integration challenges and complex signal decoding. This paper proposes a real-time uniaxially sensitive stress sensor. It is obtained by simple combinations of bar resistors using their sensitivity differences in different axes. With the aid of a Wheatstone bridge, the sensor can measure the uniaxial stress magnitude by simple calibration of the stress against the output voltage and detect the bidirectional stress magnitude and direction in a micro-zone by simple rotation. The theoretical sensitivity obtained from simulation is 0.087 mV/V·MPa when the X-bridge is stressed in the X-direction under 1 V of excitation, and the test sensitivity of the X-bridge prepared in this paper is 0.1 mV/V·MPa. The design is structurally and procedurally simple, exhibits better temperature stability, and reduces interface requirements, making it suitable for the health monitoring of multi-chip microsystem chips. Full article
(This article belongs to the Special Issue Acoustic Transducers and Their Applications, 2nd Edition)
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36 pages, 9661 KB  
Article
Piezoresistive Cantilever Microprobe with Integrated Actuator for Contact Resonance Imaging
by Tianran Ma, Michael Fahrbach and Erwin Peiner
Sensors 2025, 25(2), 332; https://doi.org/10.3390/s25020332 - 8 Jan 2025
Cited by 2 | Viewed by 5588
Abstract
A novel piezoresistive cantilever microprobe (PCM) with an integrated electrothermal or piezoelectric actuator has been designed to replace current commercial PCMs, which require external actuators to perform contact-resonance imaging (CRI) of workpieces and avoid unwanted “forest of peaks” observed at large travel speed [...] Read more.
A novel piezoresistive cantilever microprobe (PCM) with an integrated electrothermal or piezoelectric actuator has been designed to replace current commercial PCMs, which require external actuators to perform contact-resonance imaging (CRI) of workpieces and avoid unwanted “forest of peaks” observed at large travel speed in the millimeter-per-second range. Initially, a PCM with integrated resistors for electrothermal actuation (ETA) was designed, built, and tested. Here, the ETA can be performed with a piezoresistive Wheatstone bridge, which converts mechanical strain into electrical signals by boron diffusion in order to simplify the production process. Moreover, a new substrate contact has been added in the new design for an AC voltage supply for the Wheatstone bridge to reduce parasitic signal influence via the EAM (Electromechanical Amplitude Modulation) in our homemade CRI system. Measurements on a bulk Al sample show the expected force dependence of the CR frequency. Meanwhile, fitting of the measured contact-resonance spectra was applied based on a Fano-type line shape to reveal the material-specific signature of a single harmonic resonator. However, noise is greatly increased with the bending mode and contact force increasing on viscoelastic samples. Then, to avoid unspecific peaks remaining in the spectra of soft samples, cantilevers with integrated piezoelectric actuators (PEAs) were designed. The numbers and positions of the actuators were optimized for specific CR vibration modes using analytical modeling of the cantilever bending based on the transfer-matrix method and Hertzian contact mechanics. To confirm the design of the PCM with a PEA, finite element analysis (FEA) of CR probing of a sample with a Young’s modulus of 10 GPa was performed. Close agreement was achieved by Fano-type line shape fitting of amplitude and phase of the first four vertical bending modes of the cantilever. As an important structure of the PCM with a PEA, the piezoresistive Wheatstone bridge had to have suitable doping parameters adapted to the boundary conditions of the manufacturing process of the newly designed PCM. Full article
(This article belongs to the Section Sensor Materials)
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