Accurate angular alignment of wafers is essential in ion implantation to prevent channeling effects that degrade device performance. This study proposes a real-time notch-angle-detection system based on you only look once version 8 with oriented boun...
In the semiconductor manufacturing process, precise control of wafer notch angles during ion implantation is critical to prevent channeling effects that can lead to defects. Current detection methods face challenges in identifying wafer notches accur...
In semiconductor manufacturing, wafer aligners have been widely used, such as the conventional alignment method using a Charge Coupled Device (CCD) transmission sensor to detect the notch or flat in a wafer. This paper presents a proposed vision alig...
A high-aspect-ratio three-dimensionally (3D) stacked comb structure for micromirror application is demonstrated by wafer bonding technology in CMOS-compatible processes in this work. A vertically stacked comb structure is designed to circumvent any m...
The wafer pre-aligner is a crucial component in the lithography process to correct the wafer center and notch orientation. To improve the precision and the efficiency of pre-alignment, a new method to calibrate the center and the orientation of a waf...
In the current study, the performance of the npn solar cell (SC) microstructure is improved by inspecting some modifications to provide possible paths for fabrication techniques of the structure. The npn microstructure is simulated by applying a proc...
In this paper, a Hall plate readout with a randomized four-phase spinning-current scheme is proposed. The goal is to remove the maximum number of offset components, including the offset associated with spike demodulation. The outcome is that only the...
This paper describes an analysis of power supply rejection and noise improvement techniques for an envelope-tracking power amplifier. Although the envelope-tracking technique improves efficiency, its power supply rejection ratio is much lower than th...
A theoretical study of RF-photonic channelizers using four architectures formed by active integrated filters with tunable gains is presented. The integrated filters are enabled by two- and four-port nano-photonic couplers (NPCs). Lossless and three i...