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Micromachined Planar Supercapacitor with Interdigital Buckypaper Electrodes
- Yun-Ting Chen,
- Cheng-Wen Ma,
- Chia-Ming Chang and
- Yao-Joe Yang
In this work, a flexible micro-supercapacitor with interdigital planar buckypaper electrodes is presented. A simple fabrication process involving vacuum filtration method and SU-8 molding techniques is proposed to fabricate in-plane interdigital buck...